US5880530A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiregion solder interconnection structure
Assignee: Intel Corp
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Filing: 1996-03-29
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Granted: 1999-03-09
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Expires: 2016-03-29
Abstract
Abstract An apparatus and method for forming solder interconnection structures that reduce thermo-mechanical stresses at the solder joints of a semiconductor device and its supporting substrate. In one embodiment, the solder interconnection structure of the present invention comprises a semiconductor device and a substrate having a plurality of solder connections extending from the substrate to electrodes or bond pads on the semiconductor device. A multilayer structure is disposed between the semiconductor device and substrate filling the gap formed by the solder connections. The multilayer structure includes a first layer and a second layer, each having a different coefficient of thermal expansion. Thus, in accordance with the present invention, the stress concentration points are moved away from the solder joints of the semiconductor device and substrate to a point located between the first and second layers of the filler structure.
Inventors
- 👤 Yohko Mashimoto
- 👤 Shuji Inoue
- 👤 Jiro Kubota
- 👤 Mashahiro Kuroda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:46
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W72/00; H10W72/071; H10W72/0711; H10W72/072; H10W72/07231; H10W72/07236; H10W72/07251; H10W72/20; H10W72/851; H10W72/853; H10W72/856
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
81 words
An interconnection structure in a gap between an electrical device and a substrate, said interconnection structure comprising: an epoxy based filler divided into a first region and a second region, said filler containing a plurality of particles having the percentage by weight of said particles in said first and second regions being different; said first and second regions substantially encasing a metal bump electrically connecting a first contact pad on said electrical device and a second contact pad on said substrate.
Claim 2
Dependent Claim
81 words
An interconnection structure in a gap between an electrical device and a substrate, said interconnection structure comprising: an epoxy based filler divided into a first region and a second region, said filler containing a plurality of particles having the percentage by weight of said particles in said first and second regions being different; said first and second regions substantially encasing a metal bump electrically connecting a first contact pad on said electrical device and a second contact pad on said substrate.
Claim 3
Dependent Claim
32 words
The structure of claim 1 wherein said first region is disposed between said substrate and said second region, and said second region is disposed between said electrical device and said first region.
Claim 4
Dependent Claim
27 words
The structure of claim 2 wherein the coefficient of thermal expansion of said second region is greater than the coefficient of thermal expansion of said first region.
Claim 5
Dependent Claim
11 words
The structure of claim 1 wherein said particles comprise silica particles.
Claim 6
Dependent Claim
13 words
The structure of claim 1 wherein said particles comprise polymer impregnated fiberglass particles.
Claim 7
Dependent Claim
32 words
The structure of claim 2 wherein said particles in said first region comprise silica particles wherein the amount of silica in said first region is about 50 to 60 percent by weight.
Claim 8
Dependent Claim
32 words
The structure of claim 6 wherein said particles in said second region comprise silica particles wherein the amount of silica in said second region is approximately 5 to 10 percent by weight.
Claim 9
Dependent Claim
145 words
A structure for coupling a first and a second substrate, said structure comprising: a first contact pad on said first substrate coupled by a metal bump to a second contact pad on said second substrate; and an epoxy based filler divided into a first region and a second region, said filler containing a plurality of particles having a different coefficient of thermal expansion than said filler, the percentage by weight of said particles in said first and second regions being different, said first region being disposed between said first substrate and said second region and covering the exposed surface areas of said first contact pad and a first half of said metal bump, said second region being disposed between said second substrate and said first region and covering the exposed surface areas of said second contact pad and a second half of said metal bump.
Claim 10
Dependent Claim
145 words
A structure for coupling a first and a second substrate, said structure comprising: a first contact pad on said first substrate coupled by a metal bump to a second contact pad on said second substrate; and an epoxy based filler divided into a first region and a second region, said filler containing a plurality of particles having a different coefficient of thermal expansion than said filler, the percentage by weight of said particles in said first and second regions being different, said first region being disposed between said first substrate and said second region and covering the exposed surface areas of said first contact pad and a first half of said metal bump, said second region being disposed between said second substrate and said first region and covering the exposed surface areas of said second contact pad and a second half of said metal bump.
Claim 11
Dependent Claim
27 words
The structure of claim 8 wherein the coefficient of thermal expansion of said second region is greater than the coefficient of thermal expansion of said first region.
Claim 12
Dependent Claim
11 words
The structure of claim 8 wherein said particles comprise silica particles.
Claim 13
Dependent Claim
13 words
The structure of claim 8 wherein said particles comprise polymer impregnated fiberglass particles.
Claim 14
Dependent Claim
32 words
The structure of claim 8 wherein said particles in said first region comprise silica particles wherein the amount of silica in said first region is about 50 to 60 percent by weight.
Claim 15
Dependent Claim
32 words
The structure of claim 12 wherein said particles in said second region comprise silica particles wherein the amount of silica in said second region is about 5 to 10 percent by weight.
Claim 16
Dependent Claim
135 words
An interconnection structure in a gap between a first substrate having a first coefficient of thermal expansion and a second substrate having a second coefficient of thermal expansion, said structure comprising: a filler comprising a first region having a third coefficient of thermal expansion and a second region having a fourth coefficient of thermal expansion, said first region being disposed between said first substrate and said second region, said second region being disposed between said second substrate and said first region, said third coefficient being closer to said second coefficient than said first coefficient, said fourth coefficient being closer to said first coefficient than said second coefficient; said first and second regions substantially encasing a metal bump coupling a first contact pad on said first substrate to a second contact pad on said second substrate.
Claim 17
Dependent Claim
135 words
An interconnection structure in a gap between a first substrate having a first coefficient of thermal expansion and a second substrate having a second coefficient of thermal expansion, said structure comprising: a filler comprising a first region having a third coefficient of thermal expansion and a second region having a fourth coefficient of thermal expansion, said first region being disposed between said first substrate and said second region, said second region being disposed between said second substrate and said first region, said third coefficient being closer to said second coefficient than said first coefficient, said fourth coefficient being closer to said first coefficient than said second coefficient; said first and second regions substantially encasing a metal bump coupling a first contact pad on said first substrate to a second contact pad on said second substrate.
References Cited (Backward Citations)
US4970575A
Cited
US5300459A
Cited
JPH03231435A
Cited
US4999699A
Cited
US5089440A
Cited
US5121190A
Cited
US5250848A
Cited
US5292688A
Cited
US5143785A
Cited
US5471096A
Cited
US5194930A
Cited
JPH05315578A
Cited
US5550408A
Cited
US5468790A
Cited
JPH0766326A
Cited
US5442240A
Cited
US5567654A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-08 | 2002-09-07 | 2003-03-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-08 | 2006-09-07 | 2007-03-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-08 | 2010-09-07 | 2011-03-09 | $7700.00 | Window Closed / Lapsed |