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US5877073A
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Modified poly-buffered locos forming technology avoiding the positive charge trapping at the beak of field oxide
Assignee: Chang Liao Holdings LLC
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Filing: 1996-05-07
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Granted: 1999-03-02
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Expires: 2016-05-07
Abstract
Abstract A method for fabrication of modified poly-buffered LOCOS without positive charges trapping at the beak of the field oxide. The method employs DIW (Deionized Water) to be sprayed onto the wafer before gate electrode forming to eliminate the trapping of positive charges and reduce the undesired charge breakdown thereby increasing the yield of devices not containing this defect.
Inventors
- 👤 Pen-Liang Mao
- 👤 Jui Chi Chen
- 👤 Chen Ju-Cheng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:21
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/10; H10W10/13
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
155 words
A modified poly-buffered LOCOS process avoiding positive charge trapping at the beak of a field oxide which comprises the steps of: (a) depositing a layer of SiO 2 onto a silicon substrate, (b) depositing a layer of polycrystalline silicon onto the SiO 2 layer, (c) forming a layer of silicon nitride onto the polycrystalline silicon, (d) forming a pattern in the SiO 2 polycrystalline silicon and silicon nitride layers by etching technology, (e) subjecting said silicon substrate to an oxidation step to make a field oxide layer, wherein said silicon nitride acts as an oxidation mask; (f) forming a layer of sacrificial oxide and then stripping said sacrificial oxide, thereafter depositing a layer of gate oxide, (g) spraying deionized water onto said silicon substrate to neutralize said positive charges trapped in said field oxide, (h) forming and patterning a polysilicon gate over said gate oxide, and (i) subjecting said silicon substrate to an annealing step.
Claim 2
Dependent Claim
155 words
A modified poly-buffered LOCOS process avoiding positive charge trapping at the beak of a field oxide which comprises the steps of: (a) depositing a layer of SiO 2 onto a silicon substrate, (b) depositing a layer of polycrystalline silicon onto the SiO 2 layer, (c) forming a layer of silicon nitride onto the polycrystalline silicon, (d) forming a pattern in the SiO 2 polycrystalline silicon and silicon nitride layers by etching technology, (e) subjecting said silicon substrate to an oxidation step to make a field oxide layer, wherein said silicon nitride acts as an oxidation mask; (f) forming a layer of sacrificial oxide and then stripping said sacrificial oxide, thereafter depositing a layer of gate oxide, (g) spraying deionized water onto said silicon substrate to neutralize said positive charges trapped in said field oxide, (h) forming and patterning a polysilicon gate over said gate oxide, and (i) subjecting said silicon substrate to an annealing step.
Claim 3
Dependent Claim
22 words
A method according claim 1, wherein said SiO 2 layer is formed at a temperature ranging from 700° C. to 1000° C.
Claim 4
Dependent Claim
19 words
A method according claim 1, wherein said SiO 2 layer has a thickness of between 10 to 500 nanometers.
Claim 5
Dependent Claim
19 words
A method according claim 1, wherein said polycrystalline silicon layer has a thickness of between 5 to 500 nanometers.
Claim 6
Dependent Claim
19 words
A method according claim 1, wherein said silicon nitride layer has a thickness of between 5 to 500 nanometers.
Claim 7
Dependent Claim
19 words
A method according claim 1, wherein said field oxide layer has a thickness of between 350 to 1000 nanometers.
Claim 8
Dependent Claim
18 words
A method according claim 1, wherein said polysilicon gate has a thickness of between 200 to 500 nanometers.
Claim 9
Dependent Claim
31 words
A method according claim 1, wherein said silicon substrate is spinning during the deionized water spraying step and the spin speed of said silicon substrate is from 3000 to 6000 rpm.
Claim 10
Dependent Claim
27 words
A method according to claim 1, wherein the deionized water is ejected from the nozzle of a wafer scrubber for between about 30 seconds to 5 minutes.
Claim 11
Dependent Claim
20 words
A method according to claim 1, wherein the deionized water has a resistivity on the order of about 30 ohm-cm.
Claim 12
Dependent Claim
22 words
A method according claim 1, wherein said silicon substrate is annealed at a temperature of between about 900° C. to 1000° C.
Claim 13
Dependent Claim
16 words
A method according claim 1, wherein said silicon substrate is annealed in a nitrogen ambient atmosphere.
Claim 14
Dependent Claim
20 words
A method according to claim 1, wherein the annealing time of the wafer is between about 10 to 60 minutes.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |