US5877058A
Expired / Lapsed
US
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Method of forming an insulated-gate field-effect transistor with metal spacers
Assignee: Advanced Micro Devices Inc
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Filing: 1996-08-26
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Granted: 1999-03-02
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Expires: 2016-08-26
Abstract
Abstract An IGFET with metal spacers is disclosed. The IGFET includes a gate electrode on a gate insulator on a semiconductor substrate. Sidewall insulators are adjacent to opposing vertical edges of the gate electrode, and metal spacers are formed on the substrate and adjacent to the sidewall insulators. The metal spacers are electrically isolated from the gate electrode but contact portions of the drain and the source. Preferably, the metal spacers are adjacent to edges of the gate insulator beneath the sidewall insulators. The metal spacers are formed by depositing a metal layer over the substrate then applying an anisotropic etch. In one embodiment, the metal spacers contact lightly and heavily doped drain and source regions, thereby increasing the conductivity between the heavily doped drain and source regions and the channel underlying the gate electrode. The metal spacers can also provide low resistance drain and source contacts.
Inventors
- 👤 Mark I. Gardner
- 👤 Robert Dawson
- 👤 H. Jim Fulford, Jr.
- 👤 Frederick N. Hause
- 👤 Mark W. Michael
- 👤 Bradley T. Moore
- 👤 Derick J. Wristers
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:20
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D64/00; H10D64/01; H10D64/021
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
120 words
A method of forming an IGFET with metal spacers, comprising the steps of: forming a gate insulator on a semiconductor substrate; forming a non-floating gate electrode on the gate insulator; completely forming a drain and a source in the substrate; forming sidewall insulators adjacent to opposing edges of the gate electrode; and then depositing a conductive metal layer over the substrate and applying an anisotropic etch to the conductive metal layer to form metal spacers on the substrate and adjacent to the sidewall insulators, wherein the metal spacers contact first portions of the drain and the source and are electrically isolated from the gate electrode, and second portions of the drain and the source outside the metal spacers are exposed.
Claim 2
Independent Claim
120 words
A method of forming an IGFET with metal spacers, comprising the steps of: forming a gate insulator on a semiconductor substrate; forming a non-floating gate electrode on the gate insulator; completely forming a drain and a source in the substrate; forming sidewall insulators adjacent to opposing edges of the gate electrode; and then depositing a conductive metal layer over the substrate and applying an anisotropic etch to the conductive metal layer to form metal spacers on the substrate and adjacent to the sidewall insulators, wherein the metal spacers contact first portions of the drain and the source and are electrically isolated from the gate electrode, and second portions of the drain and the source outside the metal spacers are exposed.
Claim 3
Dependent Claim
27 words
The method of claim 1, wherein the metal spacers have heights that are substantially the same as combined heights of the gate electrode and the gate insulator.
Claim 4
Dependent Claim
31 words
The method of claim 1, wherein forming the drain and the source includes implanting dopants into the substrate and then applying a high temperature anneal to drive-in and activate the dopants.
Claim 5
Dependent Claim
28 words
The method of claim 1, including implanting the drain and the source into the substrate using the gate electrode as an implant mask before forming the sidewall insulators.
Claim 6
Dependent Claim
27 words
The method of claim 1, including implanting the drain and the source into the substrate using the gate electrode and the sidewall insulators as an implant mask.
Claim 7
Dependent Claim
44 words
The method of claim 1, wherein forming the drain and the source includes implanting heavily doped drain and source regions using the gate electrode and the sidewall insulators as an implant mask, and the metal spacers contact the heavily doped drain and source regions.
Claim 8
Dependent Claim
87 words
The method of claim 6, wherein forming the drain and the source includes implanting lightly doped drain and source regions using the gate electrode as an implant mask, the sidewall insulators are vertically spaced from the substrate, and the metal spacers contact the lightly doped and heavily doped drain and source regions to increase a lateral conductivity across the lightly doped drain and source regions thereby decreasing a resistance between the heavily doped drain and source regions and a channel in the substrate underlying the gate electrode.
Claim 9
Dependent Claim
22 words
The method of claim 6, including etching a portion of the sidewall insulators after implanting the heavily doped drain and source regions.
Claim 10
Dependent Claim
21 words
The method of claim 1, wherein the sidewall insulators extend to the substrate and cover opposing edges of the gate insulator.
Claim 11
Dependent Claim
30 words
The method of claim 1, wherein the sidewall insulators are vertically spaced from the substrate, and the metal spacers contact portions of the drain and source underlying the sidewall insulators.
Claim 12
Dependent Claim
16 words
The method of claim 10, wherein the metal spacers contact opposing edges of the gate insulator.
Claim 13
Dependent Claim
17 words
The method of claim 1, including forming the drain and the source before forming the sidewall insulators.
Claim 14
Dependent Claim
17 words
The method of claim 1, including forming the drain and the source after forming the sidewall insulators.
Claim 15
Dependent Claim
52 words
The method of claim 1, further comprising forming disposable spacers on the substrate and adjacent to the sidewall insulators, implanting regions of the drain and the source using the disposable spacers, the sidewall insulators and the gate electrode as an implant mask, removing the disposable spacers, and then forming the metal spacers.
Claim 16
Independent Claim
241 words
A method of forming an IGFET with metal spacers, comprising the following steps in the sequence set forth: forming a gate insulator on a semiconductor substrate; forming a non-floating gate electrode with first and second opposing vertical edges on the gate insulator; implanting lightly doped drain and source regions in the substrate using the gate electrode as a mask; forming first and second sidewall insulators on the first and second edges, respectively, of the gate electrode, wherein the sidewall insulators are vertically spaced from the substrate; implanting heavily doped drain and source regions using the first and second sidewall insulators and the gate electrode as an implant mask; applying a high temperature anneal to drive-in and activate the lightly doped and heavily doped drain and source regions, thereby completely forming a drain and a source; depositing a blanket layer of a conductive metal over the substrate; and applying an anisotropic etch to the blanket layer of conductive metal to form first and second metal spacers adjacent to the first and second sidewall insulators, respectively, and on the drain and the source, respectively, wherein the first and second metal spacers are spaced from and electrically isolated from the gate electrode, the first and second metal spacers are in contact with and electrically coupled to first portions of the heavily doped drain and source regions, respectively, and second portions of the heavily doped drain and source regions outside the metal spacers are exposed.
Claim 17
Independent Claim
241 words
A method of forming an IGFET with metal spacers, comprising the following steps in the sequence set forth: forming a gate insulator on a semiconductor substrate; forming a non-floating gate electrode with first and second opposing vertical edges on the gate insulator; implanting lightly doped drain and source regions in the substrate using the gate electrode as a mask; forming first and second sidewall insulators on the first and second edges, respectively, of the gate electrode, wherein the sidewall insulators are vertically spaced from the substrate; implanting heavily doped drain and source regions using the first and second sidewall insulators and the gate electrode as an implant mask; applying a high temperature anneal to drive-in and activate the lightly doped and heavily doped drain and source regions, thereby completely forming a drain and a source; depositing a blanket layer of a conductive metal over the substrate; and applying an anisotropic etch to the blanket layer of conductive metal to form first and second metal spacers adjacent to the first and second sidewall insulators, respectively, and on the drain and the source, respectively, wherein the first and second metal spacers are spaced from and electrically isolated from the gate electrode, the first and second metal spacers are in contact with and electrically coupled to first portions of the heavily doped drain and source regions, respectively, and second portions of the heavily doped drain and source regions outside the metal spacers are exposed.
Claim 18
Dependent Claim
28 words
The method of claim 15, wherein the first and second metal spacers are in contact with and electrically coupled to the lightly doped drain and source regions, respectively.
Claim 19
Dependent Claim
29 words
The method of claim 16, wherein the first and second metal spacers contact the lightly doped drain and source regions, respectively, beneath the first and second sidewall insulators, respectively.
Claim 20
Dependent Claim
59 words
The method of claim 16, wherein the first metal spacer increases a lateral conductivity of the lightly doped drain region and provides a low resistance contact to the heavily doped drain region, and the second metal spacer increases a lateral conductivity of the lightly doped source region and provides a low resistance contact to the heavily doped source region.
Claim 21
Dependent Claim
50 words
The method of claim 15, wherein the gate electrode is polysilicon, the gate insulator is silicon dioxide, the sidewall insulators are selected from the group consisting of silicon dioxide and silicon nitride, and the metal spacers are selected from the group consisting of aluminum, titanium, tungsten, cobalt, and combinations thereof.
Claim 22
Independent Claim
157 words
A method of forming a MOSFET with metal spacers, comprising the steps of: forming a gate oxide on a semiconductor substrate of first conductivity type; forming a non-floating polysilicon gate electrode on the gate oxide; implanting a dopant of second conductivity type into the substrate and applying a high temperature anneal to drive-in and activate the second dopant thereby completely forming a drain and a source in the substrate; forming sidewall insulators on the edges of the polysilicon electrode; and thereafter depositing a conductive metal layer over the substrate, wherein the metal layer contacts the sidewall insulators; and applying an anisotropic etch such that the metal layer forms metal spacers with substantially a same thickness as the polysilicon gate electrode and the gate oxide combined, wherein the metal spacers contact the sidewall insulators and first portions of the drain and the source, and second portions of the drain and the source outside the metal spacers are exposed.
Claim 23
Independent Claim
157 words
A method of forming a MOSFET with metal spacers, comprising the steps of: forming a gate oxide on a semiconductor substrate of first conductivity type; forming a non-floating polysilicon gate electrode on the gate oxide; implanting a dopant of second conductivity type into the substrate and applying a high temperature anneal to drive-in and activate the second dopant thereby completely forming a drain and a source in the substrate; forming sidewall insulators on the edges of the polysilicon electrode; and thereafter depositing a conductive metal layer over the substrate, wherein the metal layer contacts the sidewall insulators; and applying an anisotropic etch such that the metal layer forms metal spacers with substantially a same thickness as the polysilicon gate electrode and the gate oxide combined, wherein the metal spacers contact the sidewall insulators and first portions of the drain and the source, and second portions of the drain and the source outside the metal spacers are exposed.
Claim 24
Dependent Claim
32 words
The method of claim 20, including implanting heavily doped drain and source regions using the sidewall insulators and the polysilicon gate electrode as an implant mask before applying the high temperature anneal.
Claim 25
Dependent Claim
14 words
The method of claim 20, wherein the metal spacers provide drain and source contacts.
Claim 26
Dependent Claim
23 words
The method of claim 20, wherein the metal spacers are selected from the group consisting of aluminum, titanium, tungsten, cobalt, and combinations thereof.
Claim 27
Dependent Claim
25 words
The method of claim 20, wherein the first conductivity type is N-type, the second conductivity type is P-type, and the MOSFET is a P-channel device.
Claim 28
Dependent Claim
25 words
The method of claim 20, wherein the first conductivity type is P-type, the second conductivity type is N-type, and the MOSFET is an N-channel device.
Claim 29
Independent Claim
130 words
A method of forming an IGFET with metal spacers, comprising the steps of: forming a gate insulator on a semiconductor substrate; forming a non-floating gate electrode on the gate insulator; forming sidewall insulators adjacent to opposing edges of the gate electrode; completely forming a drain and a source in the substrate, including applying a high-temperature anneal to drive-in and activate the drain and the source; and then depositing a blanket layer of conductive metal over the substrate and applying an anisotropic etch to the blanket layer of conductive metal to form metal spacers that contact the sidewall insulators, contact first portions of the drain and the source and are electrically isolated from the gate electrode, wherein second portions of the drain and the source outside the metal spacers are exposed.
Claim 30
Independent Claim
130 words
A method of forming an IGFET with metal spacers, comprising the steps of: forming a gate insulator on a semiconductor substrate; forming a non-floating gate electrode on the gate insulator; forming sidewall insulators adjacent to opposing edges of the gate electrode; completely forming a drain and a source in the substrate, including applying a high-temperature anneal to drive-in and activate the drain and the source; and then depositing a blanket layer of conductive metal over the substrate and applying an anisotropic etch to the blanket layer of conductive metal to form metal spacers that contact the sidewall insulators, contact first portions of the drain and the source and are electrically isolated from the gate electrode, wherein second portions of the drain and the source outside the metal spacers are exposed.
Claim 31
Dependent Claim
50 words
The method of claim 26, wherein the drain includes a heavily doped drain region, the source includes a heavily doped source region, the blanket layer of conductive metal is deposited on the heavily doped drain and source regions, and the metal spacers contact the heavily doped drain and source regions.
Claim 32
Dependent Claim
22 words
The method of claim 26, wherein the metal spacers have bottom surfaces substantially aligned with a bottom surface of the gate insulator.
Claim 33
Dependent Claim
22 words
The method of claim 26, wherein the metal spacers have top surfaces substantially aligned with a top surface of the gate electrode.
Claim 34
Dependent Claim
39 words
The method of claim 26, wherein the metal spacers have bottom surfaces substantially aligned with a bottom surface of the gate insulator, and the metal spacers have top surfaces substantially aligned with a top surface of the gate electrode.
Claim 35
Dependent Claim
31 words
The method of claim 26, wherein the blanket layer of conductive metal contacts substantially all of outer edges of the sidewall insulators between top and bottom surfaces of the sidewall insulators.
Claim 36
Dependent Claim
25 words
The method of claim 26, wherein the metal spacers include curved edges that are not adjacent to the sidewall insulators, the drain and the source.
Claim 37
Dependent Claim
23 words
The method of claim 26, wherein opposing edges of the gate insulator are substantially aligned with the opposing edges of the gate electrode.
Claim 38
Dependent Claim
14 words
The method of claim 26, wherein the anisotropic etch is a reactive ion etch.
Claim 39
Dependent Claim
11 words
The method of claim 26, wherein the metal spacers are aluminum.
Claim 40
Dependent Claim
19 words
The method of claim 26, wherein the metal spacers do not provide contacts for the drain and the source.
Claim 41
Dependent Claim
24 words
The method of claim 26, including forming salicide contacts on the second portions of the drain and the source after forming the metal spacers.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |