US5876503A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiple vaporizer reagent supply system for chemical vapor deposition utilizing dissimilar precursor compositions
Assignee: Entegris Inc
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Filing: 1996-11-27
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Granted: 1999-03-02
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Expires: 2016-11-27
Abstract
Abstract A system for the deposition of a multicomponent material layer on a substrate from respective liquid precursors for components of the multicomponent material layer, comprising: a vapor deposition zone; and multiple vaporizer units, each of which is joined (i) to at least one source of liquid precursor for supplying at least one liquid precursor thereto, and (ii) in vapor flow communication with the vapor deposition zone arranged to retain the substrate therein, for deposition on the substrate of vapor phase species from precursor vapor formed by vaporization of liquid precursors in the vaporizer units of the system.
Inventors
- 👤 Jeffrey Roeder
- 👤 Peter C. Van Buskirk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:27
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/409; C23C16/44; C23C16/448; C23C16/4485
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
203 words
A system for the deposition of a multicomponent material layer on a substrate from at least two liquid precursors wherein at least two of the liquid precursors have unequal liquid delivery requirements selected from Group 2 of the following two groups: (a) Group 1: solubility requirements, solvent requirements, chemical interaction requirements; (b) Group 2: temperature of vaporization requirements, method of vaporization requirements, temperature of gas feedline requirements, pressure and ambient carrier gas requirements; said system comprising: (a) a vapor deposition zone arranged to retain the substrate therein; and (b) at least two vaporizer units each of which is joined: (i) to at least one liquid precursor source for supplying at least one liquid precursor to a vaporizer unit; and (ii) by a gas feedline to the vapor deposition zone for supplying at least one vaporized precursor thereto; wherein any two precursors having unequal delivery requirements from Group 1 but not from Group 2 are contained in separate precursor sources; and wherein any two precursors having unequal delivery requirements from Group 2 only, or from both Group 1 and Group 2, are deliverable by separate liquid precursor sources wherein each such separate source is individually joined in fluid connection with a separate flash vaporizer.
Claim 2
Independent Claim
203 words
A system for the deposition of a multicomponent material layer on a substrate from at least two liquid precursors wherein at least two of the liquid precursors have unequal liquid delivery requirements selected from Group 2 of the following two groups: (a) Group 1: solubility requirements, solvent requirements, chemical interaction requirements; (b) Group 2: temperature of vaporization requirements, method of vaporization requirements, temperature of gas feedline requirements, pressure and ambient carrier gas requirements; said system comprising: (a) a vapor deposition zone arranged to retain the substrate therein; and (b) at least two vaporizer units each of which is joined: (i) to at least one liquid precursor source for supplying at least one liquid precursor to a vaporizer unit; and (ii) by a gas feedline to the vapor deposition zone for supplying at least one vaporized precursor thereto; wherein any two precursors having unequal delivery requirements from Group 1 but not from Group 2 are contained in separate precursor sources; and wherein any two precursors having unequal delivery requirements from Group 2 only, or from both Group 1 and Group 2, are deliverable by separate liquid precursor sources wherein each such separate source is individually joined in fluid connection with a separate flash vaporizer.
Claim 3
Dependent Claim
24 words
A system according to claim 1, wherein each of the multiple vaporizer units contains a heatable vaporizer element for vaporization of the liquid precursor.
Claim 4
Dependent Claim
23 words
A system according to claim 1, wherein at least one of said multiple vaporizer units has multiple sources of liquid precursors joined thereto.
Claim 5
Dependent Claim
25 words
A system according to claim 3, wherein a mixing manifold is interposed between the multiple sources of liquid precursors and the vaporizer unit joined thereto.
Claim 6
Dependent Claim
23 words
A system according to claim 4, wherein a pump is disposed between the mixing manifold and the vaporizer unit receiving precursor liquid therefrom.
Claim 7
Dependent Claim
25 words
A system according to claim 1, wherein a pump is disposed between a source of liquid precursor and the vaporizer unit receiving precursor liquid therefrom.
Claim 8
Dependent Claim
25 words
A system according to claim 1, wherein a pump is disposed between each source of liquid precursor and the vaporizer unit receiving precursor liquid therefrom.
Claim 9
Independent Claim
194 words
A system for the deposition of a multicomponent material layer on a substrate, said system comprising: at least one liquid precursor source for at least one but less than all components of the multicomponent material layer; at least another liquid precursor source for another component of the multicomponent material layer; a first vaporizer unit joined in flow communication with the at least one liquid precursor source for at least one but less than all components of the multicomponent material layer; a second vaporizer unit joined in flow communication with the at least another liquid precursor source for another component of the multicomponent material layer; a vapor deposition unit; and the first and second vaporizer units being joined in vapor flow communication with the vapor deposition unit, whereby the vapor deposition unit receives (i) vapor of at least one liquid precursor source for at least one but less than all components of the multicomponent material layer from the first vaporizer unit, and (ii) vapor of at least another liquid precursor source for another component of the multicomponent material layer, for deposition of the multicomponent material layer on a substrate disposed in the vapor deposition unit.
Claim 10
Independent Claim
194 words
A system for the deposition of a multicomponent material layer on a substrate, said system comprising: at least one liquid precursor source for at least one but less than all components of the multicomponent material layer; at least another liquid precursor source for another component of the multicomponent material layer; a first vaporizer unit joined in flow communication with the at least one liquid precursor source for at least one but less than all components of the multicomponent material layer; a second vaporizer unit joined in flow communication with the at least another liquid precursor source for another component of the multicomponent material layer; a vapor deposition unit; and the first and second vaporizer units being joined in vapor flow communication with the vapor deposition unit, whereby the vapor deposition unit receives (i) vapor of at least one liquid precursor source for at least one but less than all components of the multicomponent material layer from the first vaporizer unit, and (ii) vapor of at least another liquid precursor source for another component of the multicomponent material layer, for deposition of the multicomponent material layer on a substrate disposed in the vapor deposition unit.
Claim 11
Independent Claim
209 words
A method for depositing of a multicomponent material layer on a substrate from at least two liquid precursors wherein at least two of the liquid precursors have unequal liquid delivery requirements selected from Group 2 of the following two groups: (a) Group 1: solubility requirements, solvent requirements, chemical interaction requirements; (b) Group 2: temperature of vaporization requirements, method of vaporization requirements, temperature of gas feedline requirements, pressure and ambient carrier gas requirements; comprising: (a) providing any two precursors having unequal delivery requirements from Group 1 or Group 2 in separate precursor sources; (b) flowing any two or more precursors having unequal delivery requirements from Group 1 but not from Group 2 to a single vaporization zone, and vaporizing such precursors to form a precursor; (c) flowing any two or more precursors having unequal delivery requirements selected from Group 2, or from both Group 1 and Group 2, from separate precursor sources to individual separate vaporization zones, wherein each such separate precursor source is individually joined in fluid connection with a separate vaporization zone, and vaporizing such precursors to form an equivalent number of precursor vapors; (d) flowing all vapors from (b) and (c) above to a vapor deposition zone and depositing the multiple component material layer on the substrate.
Claim 12
Independent Claim
209 words
A method for depositing of a multicomponent material layer on a substrate from at least two liquid precursors wherein at least two of the liquid precursors have unequal liquid delivery requirements selected from Group 2 of the following two groups: (a) Group 1: solubility requirements, solvent requirements, chemical interaction requirements; (b) Group 2: temperature of vaporization requirements, method of vaporization requirements, temperature of gas feedline requirements, pressure and ambient carrier gas requirements; comprising: (a) providing any two precursors having unequal delivery requirements from Group 1 or Group 2 in separate precursor sources; (b) flowing any two or more precursors having unequal delivery requirements from Group 1 but not from Group 2 to a single vaporization zone, and vaporizing such precursors to form a precursor; (c) flowing any two or more precursors having unequal delivery requirements selected from Group 2, or from both Group 1 and Group 2, from separate precursor sources to individual separate vaporization zones, wherein each such separate precursor source is individually joined in fluid connection with a separate vaporization zone, and vaporizing such precursors to form an equivalent number of precursor vapors; (d) flowing all vapors from (b) and (c) above to a vapor deposition zone and depositing the multiple component material layer on the substrate.
Claim 13
Dependent Claim
24 words
A process according to claim 9, wherein said steps are repetitively carried out to form a multi-layer, multiple component material layer on the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |