Gas feeding method in preparation of glass soot

Abstract

Abstract PURPOSE:To enable the easy and stable control of the feed of raw material gas for the preparation of glass soot, by heating and directly vaporizing the raw material, and sending the raw material gas to the combustion burner. CONSTITUTION:The solution of GeCl4 and that of SiCl4 are stored in the vessels 20 and 21 as the raw materials, respectively. The vessels 20 and 21 are furnished with the feed pipes 22 and 23 at their bottoms to feed the GeCl4 solution, etc. contained therein, and the feed pipes 22 and 23 are provided with the pumps 24 and 25 to suck the GeCl4 solution and SiCl4 solution, respectively. The GeCl solution and SiCl4 solution are pumped with the pumps 24 and 25 through the feed pipes 22 and 23 to the heating chambers 26 and 27, and dropped to the upper surfaces of the heaters 28 and 29 heated at definite temperatures. The GeCl4 solution and SiCl4 solution and are evaporated immediately on dripping to the heaters, and fill in respective chambers. The evaporated raw material gases are sent to the combustion burner through the outlets 13, 14 and the feed pipes.

Inventors

• 👤 Kazunori Senda
• 👤 千田　和憲
• 👤 Tsunehisa Kyodo
• 👤 倫久 京藤
• 👤 Toru Kuwabara
• 👤 透 桑原
• 👤 Hisao Sato
• 👤 久雄 佐藤
• 👤 Hiroshi Yokota
• 👤 弘 横田
• 👤 Minoru Watanabe
• 👤 稔 渡辺

Bibliographic Details