Ceramic substrate for implantable medical devices

Claim 1

A substrate for use in implantable medical device applications, comprising: (a) at least three stacked, laminated and trimmed ceramic layers formed from green tape, wherein at least one of the at least three ceramic layers is an internal layer, and wherein two of the at least three ceramic layers are first and second external layers, the first external layer forming an external upper surface of the substrate, the second external layer forming an external lower surface of the substrate; (b) at least one internal via formed in the at least one internal layer, the internal via being formed from an internal via paste, the internal via paste comprising tungsten, molybdenum, ruthenium, rhodium, osmium, iridium, palladium, titanium, platinum, an alloy, or mixture or combination thereof, a pre-milled ceramic powder and a paste medium containing a binder; (c) at least one external via formed in at least one of the external layers, the external via being formed from an external via paste, the external via paste having no tungsten, molybdenum or silver therein, the external via paste comprising ceramic powder and at least one metal selected from the group consisting of palladium, platinum, osmium, iridium, technetium, rhenium, rhodium and ruthenium, and alloys, mixtures and combinations thereof; (d) at least one internal metallization circuitry pattern disposed on at least one of an upper surface and a lower surface of at least one internal layer and formed from an internal paste; wherein the unfired stacked, laminated and trimmed ceramic layers are fired in the ordered steps of: (i) firing at high temperatures in a reducing atmosphere; (ii) firing at low temperatures in an inert atmosphere, and (iii) firing at low temperatures in an air atmosphere, to form the substrate.