Patent US5773330A successfully refreshed from Google Patents.
US5773330A
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US
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Semiconductor device and method for fabricating the same
Assignee: SK Hynix Inc
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Filing: 1996-06-27
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Granted: 1998-06-30
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Expires: 2016-06-27
Abstract
Abstract A semiconductor device and a method for fabricating the same, wherein a thick side wall oxide film or polysilicon film is formed on the edge portion of the second silicon substrate. At the side wall of the oxide film or polysilicon film, the thickness of an active semiconductor substrate at its edge portion increases, thereby obtaining an increased threshold voltage at the edge portion. That is, the formation of the side wall oxide film is carried out to prevent a gate oxide film of the semiconductor device from being directly formed on each side wall of the active silicon substrate. As a result, it is possible to prevent a degradation in electrical characteristic due to a degradation in threshold voltage caused by a reduced thickness of the active semiconductor substrate at its edge portion.
Inventors
- 👤 Chan Kwang Park
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 07:54
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D86/00; H10D86/201; H10D30/01; H10D30/021; H10D30/031; H10D30/0321; H10D30/0323; H10D30/67; H10D30/6704; H10D86/01; H10P; H10P10/00; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/019; H10W10/021; H10W10/10; H10W10/20
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
180 words
A method for fabricating a semiconductor device having a silicon-on-insulator structure, comprising the steps of: depositing a first silicon oxide film over a first silicon substrate and then depositing a silicon substrate layer over the first silicon oxide film; patterning the silicon substrate layer, thereby forming a second silicon substrate which has a trapezoidal cross-sectional structure and is disposed on the first silicon oxide film at an active region; forming a side wall insulating film doped with impurity ions having a conduction type different from that of the second silicon substrate on each side wall of the second silicon substrate; forming a doped region in the side wall insulating film in such a manner that the impurity ions doped in the side wall insulating film are diffused into the side wall of the second silicon substrate; sequentially forming a gate oxide film and a gate electrode on a portion of the second silicon substrate; and implanting impurity ions in a high concentration in portions of the second substrate not overlapping with the gate electrode, thereby forming source/drain impurity diffusion regions.
Claim 2
Independent Claim
180 words
A method for fabricating a semiconductor device having a silicon-on-insulator structure, comprising the steps of: depositing a first silicon oxide film over a first silicon substrate and then depositing a silicon substrate layer over the first silicon oxide film; patterning the silicon substrate layer, thereby forming a second silicon substrate which has a trapezoidal cross-sectional structure and is disposed on the first silicon oxide film at an active region; forming a side wall insulating film doped with impurity ions having a conduction type different from that of the second silicon substrate on each side wall of the second silicon substrate; forming a doped region in the side wall insulating film in such a manner that the impurity ions doped in the side wall insulating film are diffused into the side wall of the second silicon substrate; sequentially forming a gate oxide film and a gate electrode on a portion of the second silicon substrate; and implanting impurity ions in a high concentration in portions of the second substrate not overlapping with the gate electrode, thereby forming source/drain impurity diffusion regions.
Claim 3
Dependent Claim
29 words
The method in accordance with claim 1, wherein the forming the doped region step comprises annealing and is performed at a temperature ranging from 800° C. to 1,100° C.
Claim 4
Dependent Claim
49 words
The method in accordance with claim 1, wherein the doped region is formed by diffusing the impurity ions doped in the side wall insulating film into the side wall of the second silicon substrate by a subsequent high-temperature treatment required in the formation of the source/drain impurity diffusion regions.
Claim 5
Independent Claim
169 words
A method for fabricating a semiconductor device having a silicon-on-insulator structure, comprising the steps of: depositing a first silicon oxide film over a first silicon substrate and then depositing a silicon substrate layer over the first silicon oxide film; patterning the silicon substrate layer, thereby forming a second silicon substrate which has a trapezoidal cross-sectional structure and is disposed on the first silicon oxide film at an active region; depositing an insulating film and a polysilicon layer doped with impurity ions over the resulting structure obtained after the formation of the second silicon substrate; anisotropically etching the polysilicon layer and the insulating film, thereby forming side wall oxide films and side wall polysilicon layers respectively formed on opposite side walls of the second silicon substrate; sequentially forming a gate oxide film and a gate electrode on a portion of the second silicon substrate; and implanting impurity ions in a high concentration in portions of the second substrate not overlapping with the gate electrode, thereby forming source/drain impurity diffusion regions.
Claim 6
Independent Claim
169 words
A method for fabricating a semiconductor device having a silicon-on-insulator structure, comprising the steps of: depositing a first silicon oxide film over a first silicon substrate and then depositing a silicon substrate layer over the first silicon oxide film; patterning the silicon substrate layer, thereby forming a second silicon substrate which has a trapezoidal cross-sectional structure and is disposed on the first silicon oxide film at an active region; depositing an insulating film and a polysilicon layer doped with impurity ions over the resulting structure obtained after the formation of the second silicon substrate; anisotropically etching the polysilicon layer and the insulating film, thereby forming side wall oxide films and side wall polysilicon layers respectively formed on opposite side walls of the second silicon substrate; sequentially forming a gate oxide film and a gate electrode on a portion of the second silicon substrate; and implanting impurity ions in a high concentration in portions of the second substrate not overlapping with the gate electrode, thereby forming source/drain impurity diffusion regions.
Claim 7
Dependent Claim
34 words
The method in accordance with claim 4, wherein the side wall polysilicon layers are made of a material doped with impurity ions having a conduction type opposite to that of the second silicon substrate.
Claim 8
Independent Claim
174 words
A method for fabricating a semiconductor device having a silicon-on-insulator structure, comprising the steps of: depositing a first silicon oxide film over a first silicon substrate and then depositing a silicon substrate layer over the first silicon oxide film; patterning the silicon substrate layer, thereby forming a second silicon substrate which has a trapezoidal cross-sectional structure and is disposed on the first silicon oxide film at an active region; depositing an insulating film and an undoped polysilicon layer over the resulting structure obtained after the formation of the second silicon substrate and then implanting impuirty ions into the undoped polysilicon layer; anisotropically etching the polysilicon layer and the insulating film, thereby forming side wall oxide films and side wall polysilicon layers respectively formed on opposite side walls of the second silicon substrate; sequentially forming a gate oxide film and a gate electrode on a portion of the second silicon substrate; and implanting impurity ions in a high concentration in portions of the substrate not overlapping with the gate electrode, thereby forming source/drain impurity regions.
Claim 9
Independent Claim
174 words
A method for fabricating a semiconductor device having a silicon-on-insulator structure, comprising the steps of: depositing a first silicon oxide film over a first silicon substrate and then depositing a silicon substrate layer over the first silicon oxide film; patterning the silicon substrate layer, thereby forming a second silicon substrate which has a trapezoidal cross-sectional structure and is disposed on the first silicon oxide film at an active region; depositing an insulating film and an undoped polysilicon layer over the resulting structure obtained after the formation of the second silicon substrate and then implanting impuirty ions into the undoped polysilicon layer; anisotropically etching the polysilicon layer and the insulating film, thereby forming side wall oxide films and side wall polysilicon layers respectively formed on opposite side walls of the second silicon substrate; sequentially forming a gate oxide film and a gate electrode on a portion of the second silicon substrate; and implanting impurity ions in a high concentration in portions of the substrate not overlapping with the gate electrode, thereby forming source/drain impurity regions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2001-06-29 | 2001-12-29 | 2002-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-29 | 2005-12-29 | 2006-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-29 | 2009-12-29 | 2010-06-30 | $7700.00 | Window Closed / Lapsed |