Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
211 words
A positioning system for positioning an object in a predefined direction, the positioning system comprising: a microfabricated positioning assembly comprising: a stationary support structure; a moveable support structure movably coupled to the stationary support structure and moveable within a range of movement in the predefined direction with respect to the support structure; a positionable support structure positionable in the predefined direction; a stationary support structure clamp to clamp and unclamp the positionable support structure to and from the stationary support structure; a moveable support structure clamp to clamp and unclamp the positionable support structure to and from the moveable support structure; and a controller to control positioning of the positionable support structure in the predefined direction within a range of positioning that is larger than the range of movement of the moveable support structure by controlling (A) the stationary support structure clamp in clamping and unclamping the positionable support structure to and from the stationary support structure, (B) the moveable support structure clamp in clamping and unclamping the positionable support structure to and from the moveable support structure, and (C) the movement of the moveable support structure; the object being disposed on the positionable support structure so that the object is positionable in the predefined direction within the range of positioning.
Claim 2
Dependent Claim
211 words
A positioning system for positioning an object in a predefined direction, the positioning system comprising: a microfabricated positioning assembly comprising: a stationary support structure; a moveable support structure movably coupled to the stationary support structure and moveable within a range of movement in the predefined direction with respect to the support structure; a positionable support structure positionable in the predefined direction; a stationary support structure clamp to clamp and unclamp the positionable support structure to and from the stationary support structure; a moveable support structure clamp to clamp and unclamp the positionable support structure to and from the moveable support structure; and a controller to control positioning of the positionable support structure in the predefined direction within a range of positioning that is larger than the range of movement of the moveable support structure by controlling (A) the stationary support structure clamp in clamping and unclamping the positionable support structure to and from the stationary support structure, (B) the moveable support structure clamp in clamping and unclamping the positionable support structure to and from the moveable support structure, and (C) the movement of the moveable support structure; the object being disposed on the positionable support structure so that the object is positionable in the predefined direction within the range of positioning.
Claim 3
Dependent Claim
18 words
A positioning assembly as recited in claim 1 wherein the positionable structure is positioned at nanometer level increments.
Claim 4
Dependent Claim
18 words
A positioning assembly as recited in claim 2 wherein the range of movement is on a micrometer level.
Claim 5
Dependent Claim
18 words
A positioning assembly as recited in claim 3 wherein the range of positioning is on a millimeter level.
Claim 6
Dependent Claim
95 words
A positioning system as recited in claim 1 further comprising: an electrostatic comb drive to electrostatically movably couple the moveable structure to the stationary support structure, the electrostatic comb drive comprising: a stationary comb structure connected to the stationary support structure; and a moveable comb structure connected to the moveable support structure, the moveable comb structure electrostatically interacting with the stationary comb structure to move in the predefined direction with the moveable support structure; the controller controlling the movement of the moveable structure by controlling the electrostatic interaction of the stationary and moveable comb structures.
Claim 7
Dependent Claim
77 words
A positioning system as recited in claim 1 further comprising: a piezoelectric drive connected between the stationary and moveable support structures to movably couple the moveable support structure to the stationary support structure, the piezoelectric drive expanding and contracting in the predefined direction to move the moveable support structure in the predefined direction; the controller controlling the movement of the moveable support structure in the predefined direction by controlling the expansion and contraction of the piezoelectric drive.
Claim 8
Dependent Claim
105 words
A positioning system as recited in claim 1 further comprising: a heater drive to movably couple the moveable structure to the support structure, the heater drive comprising: a thermally expandable and contractible structure connected between the stationary and moveable support structures; and heater elements disposed on the thermally expandable and contractible structure to thermally expand and contract the thermally expandable and contractible structure in the predefined direction to move the moveable support structure in the predefined direction; the controller controlling the movement of the moveable support structure by controlling the thermal expansion and contraction of the thermally expandable and contractible structure by the heater elements.
Claim 9
Dependent Claim
24 words
A positioning assembly as recited in claim 1 wherein the support structure clamp and the moveable structure clamp are connected to the positionable structure.
Claim 10
Dependent Claim
73 words
A positioning assembly as recited in claim 8 wherein: the support structure includes support structure rails extending in the predefined direction; the stationary support structure clamp clamps and unclamps the positionable support structure to and from the stationary support structure rails; the moveable support structure includes rails extending in the predefined direction; and the moveable support structure clamp clamps and unclamps the positionable support structure to and from the moveable support structure rails.
Claim 11
Independent Claim
214 words
A method of positioning an object in a predefined direction, the method comprising the steps of: providing a microfabricated positioning assembly comprising: a stationary support structure; a moveable support structure movably coupled to the stationary support structure and moveable within a range of movement in the predefined direction with respect to the support structure; a positionable support structure positionable in the predefined direction; a stationary support structure clamp to clamp and unclamp the positionable support structure to and from the stationary support structure; a moveable support structure clamp to clamp and unclamp the positionable support structure to and from the moveable support structure; and positioning the positionable support structure in the predefined direction within a range of positioning that is larger than the range of movement of the moveable support structure, the positioning step including the steps of: controlling the stationary support structure clamp in clamping and unclamping the positionable support structure to and from the stationary support structure, controlling the moveable support structure clamp in clamping and unclamping the positionable support structure to and from the moveable support structure; and controlling the movement of the moveable support structure; wherein the object is disposed on the positionable support structure so that the object is positionable in the predefined direction within the range of positioning.
Claim 12
Independent Claim
214 words
A method of positioning an object in a predefined direction, the method comprising the steps of: providing a microfabricated positioning assembly comprising: a stationary support structure; a moveable support structure movably coupled to the stationary support structure and moveable within a range of movement in the predefined direction with respect to the support structure; a positionable support structure positionable in the predefined direction; a stationary support structure clamp to clamp and unclamp the positionable support structure to and from the stationary support structure; a moveable support structure clamp to clamp and unclamp the positionable support structure to and from the moveable support structure; and positioning the positionable support structure in the predefined direction within a range of positioning that is larger than the range of movement of the moveable support structure, the positioning step including the steps of: controlling the stationary support structure clamp in clamping and unclamping the positionable support structure to and from the stationary support structure, controlling the moveable support structure clamp in clamping and unclamping the positionable support structure to and from the moveable support structure; and controlling the movement of the moveable support structure; wherein the object is disposed on the positionable support structure so that the object is positionable in the predefined direction within the range of positioning.
Claim 13
Dependent Claim
17 words
A method as recited in claim 10 wherein the positionable structure is positioned at nanometer level increments.
Claim 14
Dependent Claim
17 words
A method as recited in claim 11 wherein the range of movement is on a micrometer level.
Claim 15
Dependent Claim
17 words
A method as recited in claim 12 wherein the range of positioning is on a millimeter level.
Claim 16
Dependent Claim
97 words
A method as recited in claim 10 further comprising the step of: providing an electrostatic comb drive to electrostatically movably couple the moveable structure to the stationary support structure, the electrostatic comb drive comprising: a stationary comb structure connected to the stationary support structure; and a moveable comb structure connected to the moveable support structure, the moveable comb structure electrostatically interacting with the stationary comb structure to move in the predefined direction with the moveable support structure; wherein the movement controlling step includes the step of controlling the electrostatic interaction of the stationary and moveable comb structures.
Claim 17
Dependent Claim
74 words
A method as recited in claim 10 further comprising the step of: providing a piezoelectric drive connected between the stationary and moveable support structures to movably couple the moveable support structure to the stationary support structure, the piezoelectric drive expanding and contracting in the predefined direction to move the moveable support structure in the predefined direction; wherein the movement controlling step includes the step of controlling the expansion and contraction of the piezoelectric drive.
Claim 18
Dependent Claim
105 words
A method as recited in claim 10 further comprising the step of: providing a heater drive to movably couple the moveable structure to the support structure, the heater drive comprising: a thermally expandable and contractible structure connected between the stationary and moveable support structures; and heater elements disposed on the thermally expandable and contractible structure to thermally expand and contract the thermally expandable and contractible structure in the predefined direction to move the moveable support structure in the predefined direction; the movement controlling step including the step of controlling the thermal expansion and contraction of the thermally expandable and contractible structure by the heater elements.
Claim 19
Dependent Claim
23 words
A method as recited in claim 10 wherein the support structure clamp and the moveable structure clamp are connected to the positionable structure.
Claim 20
Dependent Claim
98 words
A method as recited in claim 17 wherein: the support structure includes support structure rails extending in the predefined direction; the stationary support structure clamp controlling step includes the step of controlling the stationary support structure clamp to clamp and unclamp the positionable support structure to and from the stationary support structure rails; the moveable support structure includes rails extending in the predefined direction; and the moveable support structure clamp controlling step includes the step of controlling the moveable support structure clamp to clamp and unclamp the positionable support structure to and from the moveable support structure rails.