US5319977A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Near field acoustic ultrasonic microscope system and method
Assignee: Leland Stanford Junior University
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Filing: 1991-06-20
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Granted: 1994-06-14
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Expires: 2011-06-20
Abstract
Abstract An acoustic microscope assembly for atomic level inspection of a target object includes a cantilever arm with a sharp tip on its lower surface and a zinc oxide piezoelectric thin film on its upper surface. High frequency excitation signals, having a frequency of at least 50 Megahertz, are applied to the piezoelectric thin film so as to generate high frequency acoustic signals that are transmitted through the sharp tip so as to impact on a target object. The assembly can either receive acoustic signals reflected by the target object, or it can receive acoustic signals that have propagated through the target object. One method of using this assembly is to apply a continuous wave signal to the piezoelectric thin film while scanning the target object, and measuring characteristics of the target object at various positions thereof by measuring the resonant frequency of the transmitted high frequency acoustic signals. Other methods include pulsed operation, and combining acoustic measurements with atomic force measurements and/or tunneling current measurements to characterize a target object. The acoustic microscope assembly can also be used for storing information on a substrate, by deforming the substrate at selected positions, and for reading such stored information by determining which positions on a substrate have been deformed.
Inventors
- 👤 Calvin F. Quate
- 👤 Butrus T. Khuri-Yakub
- 👤 Shinya Akamine
- 👤 Babur B. Hadimioglu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:29
CPC Classifications
G; G01; G01N; G01N29/00; G01N29/04; G01N29/06; G01N29/0654; G01N29/0681; G01H; G01H3/00; G01H3/10; G01H3/12; G01H3/125; G01Q; G01Q60/00; G01Q60/24; G01Q60/32; G01S; G01S15/00; G01S15/88; G01S15/89; G01S15/8906; G01S15/8934; G01S15/8945; G01N2291/00; G01N2291/02; G01N2291/028; G01N2291/02827; G01N2291/04; G01N2291/048; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
93 words
An acoustic microscope assembly, comprising: a cantilever arm having an upper surface and a lower surface; a sharp tip on the lower surface of said cantilever arm; a piezoelectric thin film on at least a portion of the upper surface of said cantilever arm; and high frequency excitation means, coupled to said piezoelectric thin film, for applying an excitation signal having a frequency of at least 50 Megahertz to said piezoelectric thin film so as to generate high frequency acoustic signals; wherein said high frequency acoustic signals are transmitted through said sharp tip.
Claim 2
Dependent Claim
93 words
An acoustic microscope assembly, comprising: a cantilever arm having an upper surface and a lower surface; a sharp tip on the lower surface of said cantilever arm; a piezoelectric thin film on at least a portion of the upper surface of said cantilever arm; and high frequency excitation means, coupled to said piezoelectric thin film, for applying an excitation signal having a frequency of at least 50 Megahertz to said piezoelectric thin film so as to generate high frequency acoustic signals; wherein said high frequency acoustic signals are transmitted through said sharp tip.
Claim 3
Dependent Claim
17 words
The acoustic microscope assembly of claim 1, wherein said piezoelectric thin film comprises a ZnO thin film.
Claim 4
Dependent Claim
21 words
The acoustic microscope assembly of claim 1, wherein said piezoelectric thin film is a ZnO thin film sandwiched between metal electrodes.
Claim 5
Dependent Claim
32 words
The acoustic microscope assembly of claim 1, further including acoustic signal receiving means for receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object.
Claim 6
Dependent Claim
39 words
The acoustic microscope assembly of claim 1, further including acoustic signal receiving means, coupled to said piezoelectric thin film, for receiving said high frequency acoustic signals after said high frequency acoustic signals have been reflected by a target object.
Claim 7
Dependent Claim
32 words
The acoustic microscope assembly of claim 1, further including acoustic signal receiving means for receiving said high frequency acoustic signals after said high frequency acoustic signals have propagated through a target object.
Claim 8
Dependent Claim
153 words
The acoustic microscope assembly of claim 1, said high frequency excitation means applying a continuous wave signal to said piezoelectric thin film so as to generate a continuous wave high frequency acoustic signal; said acoustic microscope assembly further including: acoustic signal receiving means for receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object; positioning means for positioning said sharp tip with respect to said target object; and control means, coupled to said high frequency excitation means, said acoustic signal receiving means and said positioning means, for moving said sharp tip so as to scan said target object, and for measuring characteristics of said target object at various positions thereof by varying the frequency of said high frequency excitation signal while monitoring said acoustic signals received by said acoustic signal receiving means so as to measure resonant frequency of said transmitted high frequency acoustic signals.
Claim 9
Dependent Claim
113 words
The acoustic microscope assembly of claim 1, further including: positioning means for positioning said sharp tip with respect to a target object so as to leave a gap between said sharp tip and said target object; RF field generator means for generating an RF electrical field in said gap between said sharp tip and said target object; acoustic signal receiving means for receiving RF acoustic signals caused by said RF electrical field in said gap; and target object analysis means, coupled to said high frequency excitation means and said acoustic signal receiving means, for measuring characteristics of said target object by monitoring said RF acoustic signals received by said acoustic signal receiving means.
Claim 10
Independent Claim
104 words
A method of performing acoustic microscopy, the steps of the method comprising: positioning, over a target object, a cantilever arm having an upper surface and a lower surface, said cantilever arm having a sharp tip on its lower surface and a piezoelectric thin film on at least a portion of its upper surface; applying to said piezelectric thin film an excitation signal having a frequency of at least 50 Megahertz so as to generate high frequency acoustic signals which are transmitted through said sharp tip; and receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object.
Claim 11
Independent Claim
104 words
A method of performing acoustic microscopy, the steps of the method comprising: positioning, over a target object, a cantilever arm having an upper surface and a lower surface, said cantilever arm having a sharp tip on its lower surface and a piezoelectric thin film on at least a portion of its upper surface; applying to said piezelectric thin film an excitation signal having a frequency of at least 50 Megahertz so as to generate high frequency acoustic signals which are transmitted through said sharp tip; and receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object.
Claim 12
Dependent Claim
15 words
The method of claim 9, wherein said piezoelectric thin film comprises a ZnO thin film.
Claim 13
Dependent Claim
29 words
The method of claim 9, wherein said receiving step includes receiving said high frequency acoustic signals after said high frequency acoustic signals have been reflected by a target object.
Claim 14
Dependent Claim
28 words
The method of claim 9, wherein said receiving step including receiving said high frequency acoustic signals after said high frequency acoustic signals have propagated through a target object.
Claim 15
Dependent Claim
85 words
The method of claim 9, wherein said applying step applies a continuous wave signal to said piezoelectric thin film so as to generate a continuous wave high frequency acoustic signal; said method further including: moving said sharp tip so as to scan said target object; and measuring characteristics of said target object at various positions thereof by varying the frequency of said high frequency excitation signal while monitoring said received acoustic signals so as to measure resonant frequency of said transmitted high frequency acoustic signals.
Claim 16
Independent Claim
123 words
A method of performing acoustic microscopy, the steps of the method comprising: positioning, over a target object, a probe having an upper surface and a lower surface, said probe having a sharp tip on its lower surface and a piezoelectric thin film on at least a portion of its upper surface; said probe being positioned with respect to said target object so as to leave a gap between said sharp tip and said target object; generating an RF electrical field in said gap between said sharp tip and said target object; receiving via said piezoelectric thin film RF acoustic signals caused by said RF electrical field in said gap; and measuring characteristics of said target object by measuring said received RF acoustic signals.
Claim 17
Independent Claim
123 words
A method of performing acoustic microscopy, the steps of the method comprising: positioning, over a target object, a probe having an upper surface and a lower surface, said probe having a sharp tip on its lower surface and a piezoelectric thin film on at least a portion of its upper surface; said probe being positioned with respect to said target object so as to leave a gap between said sharp tip and said target object; generating an RF electrical field in said gap between said sharp tip and said target object; receiving via said piezoelectric thin film RF acoustic signals caused by said RF electrical field in said gap; and measuring characteristics of said target object by measuring said received RF acoustic signals.
Claim 18
Independent Claim
108 words
A method of performing acoustic microscopy, the steps of the method comprising: attaching a piezoelectric thin film to a target object; positioning, over said target object, a probe having a sharp tip on its lower surface; said probe being positioned with respect to said target object so as to leave a gap between said sharp tip and said target object; generating an RF electrical field in said gap between said sharp tip and said target object; receiving via said piezoelectric thin film RF acoustic signals caused by said RF electrical field in said gap; and measuring characteristics of said target object by measuring said received RF acoustic signals.
Claim 19
Independent Claim
108 words
A method of performing acoustic microscopy, the steps of the method comprising: attaching a piezoelectric thin film to a target object; positioning, over said target object, a probe having a sharp tip on its lower surface; said probe being positioned with respect to said target object so as to leave a gap between said sharp tip and said target object; generating an RF electrical field in said gap between said sharp tip and said target object; receiving via said piezoelectric thin film RF acoustic signals caused by said RF electrical field in said gap; and measuring characteristics of said target object by measuring said received RF acoustic signals.
Claim 20
Dependent Claim
203 words
An acoustic microscope assembly, comprising: a probe having an upper surface and a lower surface; a sharp tip on the lower surface of said probe; a piezoelectric thin film on at least a portion of the upper surface of said probe; high frequency excitation means, coupled to said piezoelectric thin film, for applying an excitation signal having a frequency of at least 50 Megahertz to said piezoelectric thin film so as to generate high frequency acoustic signals; wherein said high frequency acoustic signals are transmitted through said sharp tip; acoustic signal receiving means for receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object; positioning means for positioning said sharp tip with respect to said target object; and control means, coupled to said high frequency excitation means, said acoustic signal receiving means and said positioning means, for moving said sharp tip so as to scan said target object, and for measuring characteristics of said target object at various positions thereof by varying the frequency of said high frequency excitation signal while monitoring said acoustic signals received by said acoustic signal receiving means so as to measure resonant frequency of said transmitted high frequency acoustic signals.
Claim 21
Dependent Claim
203 words
An acoustic microscope assembly, comprising: a probe having an upper surface and a lower surface; a sharp tip on the lower surface of said probe; a piezoelectric thin film on at least a portion of the upper surface of said probe; high frequency excitation means, coupled to said piezoelectric thin film, for applying an excitation signal having a frequency of at least 50 Megahertz to said piezoelectric thin film so as to generate high frequency acoustic signals; wherein said high frequency acoustic signals are transmitted through said sharp tip; acoustic signal receiving means for receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object; positioning means for positioning said sharp tip with respect to said target object; and control means, coupled to said high frequency excitation means, said acoustic signal receiving means and said positioning means, for moving said sharp tip so as to scan said target object, and for measuring characteristics of said target object at various positions thereof by varying the frequency of said high frequency excitation signal while monitoring said acoustic signals received by said acoustic signal receiving means so as to measure resonant frequency of said transmitted high frequency acoustic signals.
Claim 22
Dependent Claim
17 words
The acoustic microscope assembly of claim 16, wherein said piezoelectric thin film comprises a ZnO thin film.
Claim 23
Dependent Claim
39 words
The acoustic microscope assembly of claim 16, further including acoustic signal receiving means, coupled to said piezoelectric thin film, for receiving said high frequency acoustic signals after said high frequency acoustic signals have been reflected by a target object.
Claim 24
Dependent Claim
32 words
The acoustic microscope assembly of claim 16, further including acoustic signal receiving means for receiving said high frequency acoustic signals after said high frequency acoustic signals have propagated through a target object.
Claim 25
Dependent Claim
229 words
An acoustic microscope assembly comprising: a probe having an upper surface and a lower surface; a sharp tip on the lower surface of said probe; a piezoelectric thin film on at least a portion of the upper surface of said probe; high frequency excitation means, coupled to said piezoelectric thin film, for applying an excitation signal having a frequency of at least 50 Megahertz to said piezoelectric thin film so as to generate high frequency acoustic signals; said high frequency excitation means applying a continuous wave signal to said piezoelectric thin film so as to generate a continuous wave high frequency acoustic signal; wherein said high frequency acoustic signals are transmitted through said sharp tip; acoustic signal receiving means for receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object; positioning means for positioning said sharp tip with respect to said target object; and control means, coupled to said high frequency excitation means, said acoustic signal receiving means and said positioning means, for moving said sharp tip so as to scan said target object, and for measuring characteristics of said target object at various positions thereof by varying the frequency of said high frequency excitation signal while monitoring said acoustic signals received by said acoustic signal receiving means so as to measure resonant frequency of said transmitted high frequency acoustic signals.
Claim 26
Dependent Claim
229 words
An acoustic microscope assembly comprising: a probe having an upper surface and a lower surface; a sharp tip on the lower surface of said probe; a piezoelectric thin film on at least a portion of the upper surface of said probe; high frequency excitation means, coupled to said piezoelectric thin film, for applying an excitation signal having a frequency of at least 50 Megahertz to said piezoelectric thin film so as to generate high frequency acoustic signals; said high frequency excitation means applying a continuous wave signal to said piezoelectric thin film so as to generate a continuous wave high frequency acoustic signal; wherein said high frequency acoustic signals are transmitted through said sharp tip; acoustic signal receiving means for receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object; positioning means for positioning said sharp tip with respect to said target object; and control means, coupled to said high frequency excitation means, said acoustic signal receiving means and said positioning means, for moving said sharp tip so as to scan said target object, and for measuring characteristics of said target object at various positions thereof by varying the frequency of said high frequency excitation signal while monitoring said acoustic signals received by said acoustic signal receiving means so as to measure resonant frequency of said transmitted high frequency acoustic signals.
Claim 27
Independent Claim
158 words
A method of performing acoustic microscopy, the steps of the method comprising: positioning, over a target object, a probe having an upper surface and a lower surface, said probe having a sharp tip on its lower surface and a piezoelectric thin film on at least a portion of its upper surface; applying to said piezoelectric thin film on excitation signal having a frequency of at least 50 Megahertz so as to generate high frequency acoustic signals which are transmitted through said sharp tip; moving said sharp tip so as to scan said target object; measuring characteristics of said target object at various positions thereof by varying the frequency of said high frequency excitation signal while monitoring said acoustic signals received by said acoustic signal receiving means so as to measure resonant frequency of said transmitted high frequency acoustic signals; and receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object.
Claim 28
Independent Claim
158 words
A method of performing acoustic microscopy, the steps of the method comprising: positioning, over a target object, a probe having an upper surface and a lower surface, said probe having a sharp tip on its lower surface and a piezoelectric thin film on at least a portion of its upper surface; applying to said piezoelectric thin film on excitation signal having a frequency of at least 50 Megahertz so as to generate high frequency acoustic signals which are transmitted through said sharp tip; moving said sharp tip so as to scan said target object; measuring characteristics of said target object at various positions thereof by varying the frequency of said high frequency excitation signal while monitoring said acoustic signals received by said acoustic signal receiving means so as to measure resonant frequency of said transmitted high frequency acoustic signals; and receiving said high frequency acoustic signals after said high frequency acoustic signals have interacted with a target object.
Claim 29
Dependent Claim
30 words
The method of claim 21, wherein said applying step applies a continuous wave signal to said piezoelectric thin film so as to generate a continuous wave high frequency acoustic signal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-06-13 | 1997-12-13 | 1998-06-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-06-13 | 2001-12-13 | 2002-06-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-06-13 | 2005-12-13 | 2006-06-14 | $7700.00 | Window Closed / Lapsed |