Patent US5728278A successfully refreshed from Google Patents.
US5728278A
Expired / Lapsed
US
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Plasma processing apparatus
Assignee: Canon Inc
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Filing: 1994-11-14
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Granted: 1998-03-17
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Expires: 2014-11-14
Abstract
Abstract A plasma processing apparatus has a vacuum container which contains a pair of electrodes for causing a discharge for generating a plasma, and a shielding plate for separating a plasma processing region including a space between the electrodes from a region in contact with the inner wall of the vacuum container in such a manner that both the regions communicate with each other. The apparatus includes a means for causing a pressure difference between the plasma processing region and the region in contact with the inner wall of the vacuum container.
Inventors
- 👤 Nobuyuki Okamura
- 👤 Atsushi Yamagami
- 👤 Tadahiro Ohmi
- 👤 Haruhiro Harry Goto
- 👤 Tadashi Shibata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:12
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/56; C23C14/564; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244; H01J37/34; H01J37/3402
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
206 words
A plasma processing apparatus having a vacuum container which comprises a cathode electrode and an anode electrode arranged in opposition to each other for causing a discharge for generating a plasma, and a shielding plate provided at outside of said electrodes for separating a plasma processing region including a space between said electrodes wherein said vacuum container has a first space defined by said shielding plate and said electrodes for forming said plasma processing region, and a second space defined by said shielding plate outside of the first space and an inner wall of said vacuum container, and said first and second spaces communicate with each other through a gap formed between said electrode and said shielding plate; and wherein a pressure regulating mechanism for regulating a continuity of a section connecting said first and second spaces, and an exhaust unit connecting section for exhausting said first and second spaces through said second space are provided, in order to form a pressure difference between said first and second spaces, so that a ratio (P s1 /P S2 ) of a pressure (P S1 ) in said first space to a pressure (P S2 ) in said second space falls within a range of 5 to 100.
Claim 2
Dependent Claim
206 words
A plasma processing apparatus having a vacuum container which comprises a cathode electrode and an anode electrode arranged in opposition to each other for causing a discharge for generating a plasma, and a shielding plate provided at outside of said electrodes for separating a plasma processing region including a space between said electrodes wherein said vacuum container has a first space defined by said shielding plate and said electrodes for forming said plasma processing region, and a second space defined by said shielding plate outside of the first space and an inner wall of said vacuum container, and said first and second spaces communicate with each other through a gap formed between said electrode and said shielding plate; and wherein a pressure regulating mechanism for regulating a continuity of a section connecting said first and second spaces, and an exhaust unit connecting section for exhausting said first and second spaces through said second space are provided, in order to form a pressure difference between said first and second spaces, so that a ratio (P s1 /P S2 ) of a pressure (P S1 ) in said first space to a pressure (P S2 ) in said second space falls within a range of 5 to 100.
Claim 3
Dependent Claim
17 words
An apparatus according to claim 1, further comprising means for applying a voltage to said shielding plate.
Claim 4
Dependent Claim
27 words
An apparatus according to claim 2, wherein, a power source is a D.C. power source, and is connected to said shielding plate through a low pass filter.
Claim 5
Dependent Claim
29 words
An apparatus according to claim 1, further comprising a magnetic field generating means arranged at a side opposite to a side of said first space of said cathode electrode.
Claim 6
Dependent Claim
26 words
An apparatus according to claim 1, wherein said pressure regulating mechanism comprises a regulation valve for regulating a communicating state between said first and second spaces.
Claim 7
Dependent Claim
19 words
An apparatus according to claim 1, wherein said pressure regulating mechanism includes a mechanism for moving said shielding plate.
Claim 8
Dependent Claim
20 words
An apparatus according to claim 6, wherein said pressure regulating mechanism has a mechanism for movably supporting said shielding plate.
Claim 9
Dependent Claim
17 words
An apparatus according to claim 6, wherein said shielding plate has a mechanism for moving part thereof.
Claim 10
Dependent Claim
20 words
An apparatus according to claim 8, wherein said mechanism for moving moves to form an opening at said shielding plate.
Claim 11
Dependent Claim
17 words
An apparatus according to claim 1, wherein a load lock chamber is connected to said vacuum container.
Claim 12
Dependent Claim
15 words
An apparatus according to claim 1, wherein said plasma processing apparatus is used for sputtering.
Claim 13
Dependent Claim
17 words
An apparatus according to claim 1, wherein a gas introducing inlet is provided in said first space.
Claim 14
Dependent Claim
20 words
An apparatus according to claim 1, further comprising a pressure meter for measuring pressure in said first and second spaces.
Claim 15
Dependent Claim
21 words
An apparatus according to claim 1, wherein said exhaust unit connecting section is connecting an exhaust unit through a conductance valve.
Claim 16
Dependent Claim
35 words
An apparatus according to claim 1, wherein said shielding plate has a length longer than a distance between said cathode electrode and anode electrode in a direction from said cathode electrode toward said anode electrode.
Claim 17
Dependent Claim
19 words
An apparatus according to claim 1, further comprising a pressure regulating valve for regulating a size of the gap.
Claim 18
Dependent Claim
14 words
An apparatus according to claim 16, wherein said valve is movable using a bellows.
Claim 19
Dependent Claim
167 words
A plasma processing apparatus comprising: anode and cathode electrodes arranged at opposite sides; a shielding plate arranged at a periphery of a space sandwiched by said cathode and anode electrodes arranged at opposite sides, having a length longer than a distance between said electrodes, and spaced from said electrodes by a gap; a vacuum container containing therein said anode and cathode electrodes and said shielding plate, wherein said vacuum container has a first space forming a plasma processing region defined by said shielding plate and said cathode and anode electrodes arranged at opposite sides, and a second space defined by said shielding plate and an inner wall of said vacuum container, and said first and second spaces communicate with each other through said gap; a pressure regulating mechanisms for regulating an aperture or length of said gap; an exhaust unit connecting section connected to said second space for exhausting said first and second spaces; and a gas introducing section for introducing a gas into said first space.
Claim 20
Dependent Claim
167 words
A plasma processing apparatus comprising: anode and cathode electrodes arranged at opposite sides; a shielding plate arranged at a periphery of a space sandwiched by said cathode and anode electrodes arranged at opposite sides, having a length longer than a distance between said electrodes, and spaced from said electrodes by a gap; a vacuum container containing therein said anode and cathode electrodes and said shielding plate, wherein said vacuum container has a first space forming a plasma processing region defined by said shielding plate and said cathode and anode electrodes arranged at opposite sides, and a second space defined by said shielding plate and an inner wall of said vacuum container, and said first and second spaces communicate with each other through said gap; a pressure regulating mechanisms for regulating an aperture or length of said gap; an exhaust unit connecting section connected to said second space for exhausting said first and second spaces; and a gas introducing section for introducing a gas into said first space.
Claim 21
Dependent Claim
51 words
An apparatus according to claim 18, further comprising a pressure meter for measuring a pressure to regulate a ratio (P S1 /P S2 ) of a pressure (P S1 ) in said first space to a pressure (P S2 ) in said second space within a range of 5 to 100.
Claim 22
Dependent Claim
19 words
An apparatus according to claim 18, further comprising a power source for applying a voltage to said shield plate.
Claim 23
Dependent Claim
15 words
An apparatus according to claim 20, wherein said power source is a D.C. power source.
Claim 24
Dependent Claim
22 words
An apparatus according to claim 21, wherein, said D.C. power source is connected to said shielding plate through a low pass filter.
Claim 25
Dependent Claim
29 words
An apparatus according to claim 18, further comprising a magnetic field generating means arranged at a side opposite to a side of said first space of said cathode electrode.
Claim 26
Dependent Claim
26 words
An apparatus according to claim 18, wherein said pressure regulating mechanism has a regulation valve for regulating the communicating state between said first and second spaces.
Claim 27
Dependent Claim
25 words
An apparatus according to claim 18, wherein said pressure regulating mechanism has a mechanism capable of moving at least a part of said shielding plate.
Claim 28
Dependent Claim
23 words
An apparatus according to claim 25, wherein said pressure regulating mechanism has a mechanism for movably supporting said shielding plate by a bellows.
Claim 29
Dependent Claim
17 words
An apparatus according to claim 25, wherein said shielding plate has a mechanism for moving part thereof.
Claim 30
Dependent Claim
21 words
an apparatus according to claim 18, wherein said exhaust unit connecting section is connecting an exhaust unit through a conductance valve.
Claim 31
Dependent Claim
174 words
A plasma processing apparatus comprising: anode and cathode electrodes arranged at opposite sides; a shielding plate with an aperture arranged at a periphery of a space sandwiched by said cathode and anode electrodes arranged at opposite sides, having a length longer than a distance between said electrodes, and spaced from said electrodes by a gap; a vacuum container containing therein said anode and cathode electrodes and said shielding plate, wherein said vacuum container has a first space forming a plasma processing region defined by said shielding plate and said cathode and anode electrodes arranged at opposite sides, and second space defined by said shielding plate and an inner wall of said vacuum container, and said first and second spaces communicate with each other through said gap; a pressure regulating mechanism having a member for regulating a size of the aperture of said shielding plate; an exhaust unit connecting section connected to said second space for exhausting said first and second spaces; and a gas introducing section for introducing a gas into said first space.
Claim 32
Dependent Claim
174 words
A plasma processing apparatus comprising: anode and cathode electrodes arranged at opposite sides; a shielding plate with an aperture arranged at a periphery of a space sandwiched by said cathode and anode electrodes arranged at opposite sides, having a length longer than a distance between said electrodes, and spaced from said electrodes by a gap; a vacuum container containing therein said anode and cathode electrodes and said shielding plate, wherein said vacuum container has a first space forming a plasma processing region defined by said shielding plate and said cathode and anode electrodes arranged at opposite sides, and second space defined by said shielding plate and an inner wall of said vacuum container, and said first and second spaces communicate with each other through said gap; a pressure regulating mechanism having a member for regulating a size of the aperture of said shielding plate; an exhaust unit connecting section connected to said second space for exhausting said first and second spaces; and a gas introducing section for introducing a gas into said first space.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-16 | 2001-09-15 | 2002-03-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-16 | 2005-09-15 | 2006-03-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-16 | 2009-09-15 | 2010-03-17 | $7700.00 | Window Closed / Lapsed |