Patent US5712759A successfully refreshed from Google Patents.
US5712759A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sidewall capacitor with L-shaped dielectric
Assignee: International Business Machines Corp
•
Filing: 1995-12-22
•
Granted: 1998-01-27
•
Expires: 2015-12-22
Abstract
Abstract A capacitor structure with a generally L-shaped non-conductor having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor formed within the first opening; and a generally L-shaped conductor formed exterior to the generally L-shaped non-conductor.
Inventors
- 👤 Katherine Lynn Saenger
- 👤 James H. Comfort
- 👤 Alfred Grill
- 👤 David Edward Kotecki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:58
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692; H10D1/711; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
57 words
A capacitor structure, comprising: a generally L-shaped non-conductor as a dielectric having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor as a first electrode formed within the first opening; and a generally L-shaped conductor as a second electrode formed exterior to the generally L-shaped non-conductor.
Claim 2
Dependent Claim
57 words
A capacitor structure, comprising: a generally L-shaped non-conductor as a dielectric having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor as a first electrode formed within the first opening; and a generally L-shaped conductor as a second electrode formed exterior to the generally L-shaped non-conductor.
Claim 3
Dependent Claim
16 words
The capacitor of claim 1 wherein the generally L-shaped non-conductor is a high dielectric constant material.
Claim 4
Dependent Claim
23 words
The capacitor structure of claim 1 wherein the high dielectric constant material is a material with a dielectric constant greater than approximately 20.
Claim 5
Dependent Claim
29 words
The capacitor structure of claim 1 wherein the high dielectric constant material is a material selected from the group consisting of ferroelectrics, paraelectrics, relaxors, perovskites, layered perovskites, and pyrochlores.
Claim 6
Dependent Claim
16 words
The capacitor structure of claim 1 wherein the high dielectric constant material is (Ba,Sr)TiO 3 .
Claim 7
Dependent Claim
48 words
The capacitor structure of claim 1 wherein the generally U-shaped conductor and the generally L-shaped conductor are a material selected from the group consisting of noble metals, alloys of noble metals with noble or non-noble metals, metals whose oxides are conducting, electrically conducting oxides, and electrically conducting nitrides.
Claim 8
Dependent Claim
40 words
The capacitor structure of claim 1 wherein the generally L-shaped conductor and the generally U-shaped conductor are a material selected from the group consisting of Au, Pt, Pd, Ir, Rh, Ru, Mo, RuO2, IrO2, Re2O3, TiN, TaN, TaSiN, and WN.
Claim 9
Dependent Claim
27 words
The capacitor structure of claim 1 further comprising a fill material in the generally U-shaped conductor and generally L-shaped conductor such that the capacitor structure is planar.
Claim 10
Dependent Claim
12 words
The capacitor structure of claim 8 wherein the fill material is conductive.
Claim 11
Dependent Claim
63 words
The capacitor structure of claim 1 wherein the generally U-shaped conductor has a horizontal portion having a top surface and a bottom surface, the horizontal portion of the generally L-shaped non-conductor has a top surface and a bottom surface, and the bottom surface of the horizontal portion of the generally U-shaped conductor is coplanar with the bottom surface of the generally L-shaped non-conductor.
Claim 12
Dependent Claim
84 words
A capacitor or structure, comprising: a generally L-shaped non-conductor having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor formed within the first opening; a generally L-shaped conductor formed exterior to the generally L-shaped non-conductor; and at least one non-conductor below the generally U-shaped conductor and the generally L-shaped non-conductor, the at least one non-conductor having a second opening formed therein, at least part of the second opening positioned underneath the first opening.
Claim 13
Dependent Claim
84 words
A capacitor or structure, comprising: a generally L-shaped non-conductor having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor formed within the first opening; a generally L-shaped conductor formed exterior to the generally L-shaped non-conductor; and at least one non-conductor below the generally U-shaped conductor and the generally L-shaped non-conductor, the at least one non-conductor having a second opening formed therein, at least part of the second opening positioned underneath the first opening.
Claim 14
Dependent Claim
33 words
The capacitor structure of claim 11 further comprising a conductive plug formed in the second opening, the conductive plug providing electrical contact between the generally U-shaped conductor and circuit elements in a substrate.
Claim 15
Dependent Claim
30 words
The capacitor structure of claim 12 further comprising a diffusion barrier between the conductive plug and the generally U-shaped conductor, the diffusion barrier substantially in register with the conductive plug.
References Cited (Backward Citations)
US4591738A
Cited
JPS62190869A
Cited
US5189503A
Cited
US4954927A
Cited
JPH0311761A
Cited
US5192704A
Cited
US5081559A
Cited
US5365096A
Cited
US5384729A
Cited
US5397748A
Cited
US5382817A
Cited
US5313089A
Cited
US5405796A
Cited
JPH05343615A
Cited
US5438012A
Cited
US5208725A
Cited
US5371700A
Cited
US5335138A
Cited
US5392189A
Cited
US5366920A
Cited
US5442213A
Cited
US5436477A
Cited
US5383088A
Cited
JPH0794599A
Cited
US5498889A
Cited
JP3011761U
Cited
US5416042A
Cited
US5438011A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-01-26 | 2001-07-28 | 2002-01-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-01-26 | 2005-07-28 | 2006-01-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-01-26 | 2009-07-28 | 2010-01-27 | $7700.00 | Window Closed / Lapsed |