Abstract A thermal oxidation method for producing a semiconductor device having a capacitor insulating film structure capable of making a thin film having a small leakage current and small temperature dependence of the leakage current. In the insulating film, a silicon nitride film with a small electron mobility and a silicon oxide film with a small hole mobility are alternately laminated in order of the nitride film/oxide film/nitride film/oxide film from a lower electrode side. A current component such as electrons flowing in this insulating film structure is limited by the layer with the smaller mobility to reduce the leakage current. An oxide film thickness of approximately several Å can thus be strictly controlled. By forming the silicon nitride film between the high dielectric oxide film and the electrode, the reaction of the silicon electrode and the high dielectric oxide film can be prevented.
A method of producing a semiconductor device including an insulating film having at least a silicon nitride film, the method comprising the steps of: forming a silicon nitride film on a substrate; and performing an oxidation treatment of the substrate having the silicon nitride film in an oxygen atmosphere positively excluding hydrogen and water to form a thin oxide film on the silicon nitride film, wherein the silicon nitride film forming step and the thin oxide film forming step are alternately performed at least two times to obtain a four-layer insulating film.
Claim 2
Independent Claim
92 words
A method of producing a semiconductor device including an insulating film having at least a silicon nitride film, the method comprising the steps of: forming a silicon nitride film on a substrate; and performing an oxidation treatment of the substrate having the silicon nitride film in an oxygen atmosphere positively excluding hydrogen and water to form a thin oxide film on the silicon nitride film, wherein the silicon nitride film forming step and the thin oxide film forming step are alternately performed at least two times to obtain a four-layer insulating film.