US5712759A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sidewall capacitor with L-shaped dielectric
Assignee: International Business Machines Corp
•
Filing: 1995-12-22
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Granted: 1998-01-27
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Expires: 2015-12-22
Abstract
Abstract A capacitor structure with a generally L-shaped non-conductor having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor formed within the first opening; and a generally L-shaped conductor formed exterior to the generally L-shaped non-conductor.
Inventors
- 👤 Katherine Lynn Saenger
- 👤 James H. Comfort
- 👤 Alfred Grill
- 👤 David Edward Kotecki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:00
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692; H10D1/711; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
57 words
A capacitor structure, comprising: a generally L-shaped non-conductor as a dielectric having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor as a first electrode formed within the first opening; and a generally L-shaped conductor as a second electrode formed exterior to the generally L-shaped non-conductor.
Claim 2
Dependent Claim
57 words
A capacitor structure, comprising: a generally L-shaped non-conductor as a dielectric having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor as a first electrode formed within the first opening; and a generally L-shaped conductor as a second electrode formed exterior to the generally L-shaped non-conductor.
Claim 3
Dependent Claim
16 words
The capacitor of claim 1 wherein the generally L-shaped non-conductor is a high dielectric constant material.
Claim 4
Dependent Claim
23 words
The capacitor structure of claim 1 wherein the high dielectric constant material is a material with a dielectric constant greater than approximately 20.
Claim 5
Dependent Claim
29 words
The capacitor structure of claim 1 wherein the high dielectric constant material is a material selected from the group consisting of ferroelectrics, paraelectrics, relaxors, perovskites, layered perovskites, and pyrochlores.
Claim 6
Dependent Claim
16 words
The capacitor structure of claim 1 wherein the high dielectric constant material is (Ba,Sr)TiO 3 .
Claim 7
Dependent Claim
48 words
The capacitor structure of claim 1 wherein the generally U-shaped conductor and the generally L-shaped conductor are a material selected from the group consisting of noble metals, alloys of noble metals with noble or non-noble metals, metals whose oxides are conducting, electrically conducting oxides, and electrically conducting nitrides.
Claim 8
Dependent Claim
40 words
The capacitor structure of claim 1 wherein the generally L-shaped conductor and the generally U-shaped conductor are a material selected from the group consisting of Au, Pt, Pd, Ir, Rh, Ru, Mo, RuO2, IrO2, Re2O3, TiN, TaN, TaSiN, and WN.
Claim 9
Dependent Claim
27 words
The capacitor structure of claim 1 further comprising a fill material in the generally U-shaped conductor and generally L-shaped conductor such that the capacitor structure is planar.
Claim 10
Dependent Claim
12 words
The capacitor structure of claim 8 wherein the fill material is conductive.
Claim 11
Dependent Claim
63 words
The capacitor structure of claim 1 wherein the generally U-shaped conductor has a horizontal portion having a top surface and a bottom surface, the horizontal portion of the generally L-shaped non-conductor has a top surface and a bottom surface, and the bottom surface of the horizontal portion of the generally U-shaped conductor is coplanar with the bottom surface of the generally L-shaped non-conductor.
Claim 12
Dependent Claim
84 words
A capacitor or structure, comprising: a generally L-shaped non-conductor having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor formed within the first opening; a generally L-shaped conductor formed exterior to the generally L-shaped non-conductor; and at least one non-conductor below the generally U-shaped conductor and the generally L-shaped non-conductor, the at least one non-conductor having a second opening formed therein, at least part of the second opening positioned underneath the first opening.
Claim 13
Dependent Claim
84 words
A capacitor or structure, comprising: a generally L-shaped non-conductor having a horizontal portion and a vertical portion, the vertical portion defining a first opening formed therein; a generally U-shaped conductor formed within the first opening; a generally L-shaped conductor formed exterior to the generally L-shaped non-conductor; and at least one non-conductor below the generally U-shaped conductor and the generally L-shaped non-conductor, the at least one non-conductor having a second opening formed therein, at least part of the second opening positioned underneath the first opening.
Claim 14
Dependent Claim
33 words
The capacitor structure of claim 11 further comprising a conductive plug formed in the second opening, the conductive plug providing electrical contact between the generally U-shaped conductor and circuit elements in a substrate.
Claim 15
Dependent Claim
30 words
The capacitor structure of claim 12 further comprising a diffusion barrier between the conductive plug and the generally U-shaped conductor, the diffusion barrier substantially in register with the conductive plug.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-01-26 | 2001-07-28 | 2002-01-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-01-26 | 2005-07-28 | 2006-01-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-01-26 | 2009-07-28 | 2010-01-27 | $7700.00 | Window Closed / Lapsed |