Patent US5710071A successfully refreshed from Google Patents.
US5710071A
Expired / Lapsed
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Process for underfilling a flip-chip semiconductor device
Assignee: NXP USA Inc
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Filing: 1995-12-04
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Granted: 1998-01-20
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Expires: 2015-12-04
Abstract
Abstract A flip-chip semiconductor device (70) is formed by mounting a semiconductor die (20) to a wiring substrate (30). The wiring substrate includes a hole (39). An underfill encapsulation material (52) is dispensed around an entire perimeter of the semiconductor die. The underfill encapsulation material then flows toward the center of the die, expelling any trapped air through hole (39) of the wiring substrate to avoid voiding. By providing a method which utilizes an entire perimeter dispense, manufacturing time of the underfilling step is significantly reduced. At the same time, a uniform fillet is formed and the formation of voids in the underfill encapsulation material is avoided due to the presence of hole (39) in the wiring substrate. Multiple die (100) can also be underfilled using a single dispensing operation in accordance with the invention.
Inventors
- 👤 Stanley C. Beddingfield
- 👤 Leo M. Higgins, III
- 👤 John C. Gentile
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 10:33
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/30; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/681; H10W72/071; H10W72/072; H10W72/073; H10W72/851; H10W72/853; H10W72/856; H10W72/874; H10W72/877; H10W72/879; H10W90/00; H10W90/701; H10W90/721; H10W90/724; H10W90/731; H10W90/734
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
174 words
A process for under filling a flip-chip semiconductor device: providing a wiring substrate having a hole formed therethrough; providing a semiconductor die having a plurality of bumps formed on an active surface thereof, a perimeter, and a center; mounting the semiconductor die on the wiring substrate in a flip-chip configuration such that the active surface is adjacent the wiring substrate and the plurality of bumps are connected to the wiring substrate, wherein upon mounting the semiconductor die the hole of the wiring substrate is located near the center of the semiconductor die, and wherein upon mounting a space is created between the active surface of the semiconductor die and the wiring substrate; and dispensing an under fill encapsulation material around an entirety of the perimeter of the semiconductor die; wherein after the step of dispensing, the underfill encapsulation material flows inward from the perimeter of the semiconductor die toward the hole in the wiring substrate, allowing air in the space between the semiconductor die and the wiring substrate to be expelled through the hole.
Claim 2
Dependent Claim
174 words
A process for under filling a flip-chip semiconductor device: providing a wiring substrate having a hole formed therethrough; providing a semiconductor die having a plurality of bumps formed on an active surface thereof, a perimeter, and a center; mounting the semiconductor die on the wiring substrate in a flip-chip configuration such that the active surface is adjacent the wiring substrate and the plurality of bumps are connected to the wiring substrate, wherein upon mounting the semiconductor die the hole of the wiring substrate is located near the center of the semiconductor die, and wherein upon mounting a space is created between the active surface of the semiconductor die and the wiring substrate; and dispensing an under fill encapsulation material around an entirety of the perimeter of the semiconductor die; wherein after the step of dispensing, the underfill encapsulation material flows inward from the perimeter of the semiconductor die toward the hole in the wiring substrate, allowing air in the space between the semiconductor die and the wiring substrate to be expelled through the hole.
Claim 3
Dependent Claim
34 words
The process of claim 1 wherein the step of dispensing occurs within a short enough time period to prevent the underfill encapsulation material from reaching the hole before completion of the step of dispensing.
Claim 4
Dependent Claim
45 words
The process of claim 1 wherein the step of dispensing occurs within a short enough time period to cause a flow time of the underfill encapsulation material toward the center of the semiconductor die to be substantially equal around the perimeter of the semiconductor die.
Claim 5
Dependent Claim
29 words
The process of claim 1 wherein the step of providing a wiring substrate comprises providing a wiring substrate wherein the hole has a width of less than 2 millimeters.
Claim 6
Dependent Claim
30 words
The process of claim 4 wherein the step of providing a wiring substrate comprises providing a wiring substrate having a circular hole having a diameter of less than 1 millimeter.
Claim 7
Dependent Claim
34 words
The process of claim 1 further comprising the step of providing a low pressure area beneath the wiring substrate and near the hole to assist flow of the underfill encapsulation material toward the hole.
Claim 8
Dependent Claim
26 words
The process of claim 1 wherein the step of dispensing is accomplished in less than 0.60 seconds per millimeter of the perimeter of the semiconductor die.
Claim 9
Dependent Claim
171 words
A process for underfilling a flip-chip semiconductor device comprising the steps of: providing a semiconductor die having four sides and a plurality of conductive bumps formed on an active surface thereof; providing a wiring substrate having a hole formed therethrough and having a plurality of conductive pads around the hole and formed on a surface of the wiring substrate; placing the semiconductor die on the wiring substrate such that the plurality of conductive bumps is in physical and electrical contact with the plurality of conductive pads and such that the hole underlies the semiconductor die; providing a dispensing needle; using the dispensing needle to dispense an underfill encapsulation material around the four sides of the semiconductor die; and allowing the underfill encapsulation material to flow between the semiconductor die and the wiring substrate toward the hole in the wiring substrate, after the underfill encapsulation material has been dispensed around all four sides of the semiconductor die, and without placing the semiconductor die and the wiring substrate in an enclosed vacuum chamber.
Claim 10
Dependent Claim
171 words
A process for underfilling a flip-chip semiconductor device comprising the steps of: providing a semiconductor die having four sides and a plurality of conductive bumps formed on an active surface thereof; providing a wiring substrate having a hole formed therethrough and having a plurality of conductive pads around the hole and formed on a surface of the wiring substrate; placing the semiconductor die on the wiring substrate such that the plurality of conductive bumps is in physical and electrical contact with the plurality of conductive pads and such that the hole underlies the semiconductor die; providing a dispensing needle; using the dispensing needle to dispense an underfill encapsulation material around the four sides of the semiconductor die; and allowing the underfill encapsulation material to flow between the semiconductor die and the wiring substrate toward the hole in the wiring substrate, after the underfill encapsulation material has been dispensed around all four sides of the semiconductor die, and without placing the semiconductor die and the wiring substrate in an enclosed vacuum chamber.
Claim 11
Dependent Claim
18 words
The process of claim 8 wherein the step of allowing is performed without any assistance by a vacuum.
Claim 12
Dependent Claim
29 words
The process of claim 8 wherein the step of providing a wiring substrate comprises providing a wiring substrate wherein the hole has a width of less than 2 millimeters.
Claim 13
Dependent Claim
27 words
The process of claim 8 wherein during the step of allowing the under fill encapsulation material flows at least partially into the hole in the wiring substrate.
Claim 14
Dependent Claim
39 words
The process of claim 8 wherein the step of using comprises using the dispensing needle to dispense an under fill encapsulation material around the four sides of the semiconductor die in under 0.60 seconds per millimeter of die perimeter.
Claim 15
Dependent Claim
48 words
The process of claim 8 wherein the step of providing a wiring substrate comprises providing a wiring substrate having a plurality of holes, and wherein the step of placing comprises placing the semiconductor die on the wiring substrate such that the semiconductor die overlies the plurality of holes.
Claim 16
Dependent Claim
60 words
The process of claim 13 wherein the step of placing comprises placing the semiconductor die on the wiring substrate such that a distance from any point along any side of the semiconductor die to a nearest hole is less than twice as great as a shortest distance between a point along a side of the semiconductor die and a hole.
Claim 17
Dependent Claim
102 words
A process for underfilling a flip chip semiconductor device comprising the steps of: providing a substrate having a hole formed therethrough; providing a plurality of semiconductor die; mounting the plurality of semiconductor die on the substrate to form a die array having a perimeter, wherein the hole of the substrate is located within the perimeter of the die array; dispensing an underfill encapsulation material around the perimeter of the die array; and allowing the underfill encapsulation material to underfill each die of the plurality of semiconductor die while pushing any air trapped beneath the plurality of semiconductor die out through the hole.
Claim 18
Dependent Claim
102 words
A process for underfilling a flip chip semiconductor device comprising the steps of: providing a substrate having a hole formed therethrough; providing a plurality of semiconductor die; mounting the plurality of semiconductor die on the substrate to form a die array having a perimeter, wherein the hole of the substrate is located within the perimeter of the die array; dispensing an underfill encapsulation material around the perimeter of the die array; and allowing the underfill encapsulation material to underfill each die of the plurality of semiconductor die while pushing any air trapped beneath the plurality of semiconductor die out through the hole.
Claim 19
Dependent Claim
25 words
The process of claim 15 further comprising the step of placing a lid over the plurality of semiconductor die prior to the step of dispensing.
Claim 20
Dependent Claim
35 words
The process of claim 15 wherein the step of mounting comprises mounting the plurality of semiconductor die on the substrate such that a space between two adjacent semiconductor die is less than 0.25 millimeters wide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-01-19 | 2001-07-21 | 2002-01-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-01-19 | 2005-07-21 | 2006-01-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-01-19 | 2009-07-21 | 2010-01-20 | $7700.00 | Window Closed / Lapsed |