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US5488200A Expired / Lapsed US ⏱️ 0.0 years remaining

Interconnect structure with replaced semiconductor chips

Assignee: Ultratech Inc
•
Filing: 1994-06-08
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Granted: 1996-01-30
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Expires: 2014-06-08
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Abstract

Abstract A face-down bonded semiconductor chip 4 encapsulated with a resin 14 is removed from the substrate 2 with a cutting end mill 26. The resin 14 and bump electrodes 6 remaining on the substrate 2 are then cut with a finishing end mill to a height of about one half of the original height to planarize the surface. Another chip 4A having bump electrodes 6A is aligned with the bump electrodes 6 on the substrate 2, and bonded face down on the substrate. Finally, resin 14A is flowed into the gap between the chip 4A and the substrate 2 and around the chip 4A to encapsulate the chip.

Inventors

  • 👤 Yutaka Tsukada

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 07:19
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/071; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W72/072; H10W72/07231; H10W72/07236; H10W72/07251; H10W72/20; H10W72/251; H10W72/252; H10W72/851; H10W72/853; H10W72/856; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913; Y10T29/49144; Y10T29/49815; Y10T29/49821

Claims Analysis

Total Claims: 35
Claim 1
Independent Claim 117 words
An interconnect structure, comprising: a first substrate with a surface; a pattern of multiple conductive pads defining an area on the surface of the first substrate; conductive bumps with first ends positioned on the conductive pads, and second ends of the bumps defined by a second surface approximately parallel to and above the surface of the first substrate and which defines the flat, distal ends of the bumps wherein the second surface is mountable to an electronic device having additional conductive bumps; and a first layer of an encapsulant filing around the bumps in the volume defined by the area of the pattern of conductive pads and between the first substrate surface and the defining second surface.
Claim 2
Dependent Claim 117 words
An interconnect structure, comprising: a first substrate with a surface; a pattern of multiple conductive pads defining an area on the surface of the first substrate; conductive bumps with first ends positioned on the conductive pads, and second ends of the bumps defined by a second surface approximately parallel to and above the surface of the first substrate and which defines the flat, distal ends of the bumps wherein the second surface is mountable to an electronic device having additional conductive bumps; and a first layer of an encapsulant filing around the bumps in the volume defined by the area of the pattern of conductive pads and between the first substrate surface and the defining second surface.
Claim 3
Dependent Claim 17 words
The structure of claim 1 in which the first ends of the solder bumps are approximately hemispherical.
Claim 4
Dependent Claim 37 words
The structure of claim 1 in which the conductive bumps include a high temperature solder; and which further comprises joints of low temperature solder connecting between the conductive pads and the first ends of the conductive bumps.
Claim 5
Dependent Claim 22 words
The structure of claim 1, in which the pads are copper and the conductive bumps are Pb rich with 3-5% Sn solder.
Claim 6
Dependent Claim 21 words
The structure of claim 1, in which the bumps are bonded to the pads by joints of approximately eutectic Pb/Sn solder.
Claim 7
Dependent Claim 67 words
The structure of claim 1, in which: the pads are copper and at positions defined by a rectangular or square grid; the interconnect structure includes an epoxy - fiberglass board; the bumps are Pb rich solder with about 3-5% Sn; the encapsulant includes epoxy, and further comprising: first joints of about eutectic Pb/Sn solder connecting between the conductive pads and the spherical ends of the solder bumps;
Claim 8
Dependent Claim 19 words
The structure of claim 1 in which the conductive bumps are of a different material than the conductive pads.
Claim 9
Dependent Claim 40 words
The structure of claim 1 in which the conductive bumps are a high melting temperature solder with a flat bottom which conforms to connects with the conductive pads and a shape indicating formation by reflow soldering directly to the pads.
Claim 10
Dependent Claim 157 words
An interconnect structure comprising: a first substrate with a surface; a pattern of multiple conductive pads defining an area on the surface of the first substrate; conductive bumps with first ends positioned on the conductive pads, the bumps truncated by a surface approximately parallel to and above the surface of the first substrate surface and which defines the flat, distal ends of the bumps; a first layer of an encapsulant filing around the bumps in the volume defined by the area of the pattern of conductive pads and between the first substrate surface and the truncating surface; a second substrate having terminals projecting toward the first substrate with distal ends approximately touching the flat, distal ends of the bumps; and joints of a first material having a melting temperature below the glass transition temperature of the first layer of encapsulant and connecting between the distal ends of the terminals and the flat distal ends of the bumps.
Claim 11
Dependent Claim 157 words
An interconnect structure comprising: a first substrate with a surface; a pattern of multiple conductive pads defining an area on the surface of the first substrate; conductive bumps with first ends positioned on the conductive pads, the bumps truncated by a surface approximately parallel to and above the surface of the first substrate surface and which defines the flat, distal ends of the bumps; a first layer of an encapsulant filing around the bumps in the volume defined by the area of the pattern of conductive pads and between the first substrate surface and the truncating surface; a second substrate having terminals projecting toward the first substrate with distal ends approximately touching the flat, distal ends of the bumps; and joints of a first material having a melting temperature below the glass transition temperature of the first layer of encapsulant and connecting between the distal ends of the terminals and the flat distal ends of the bumps.
Claim 12
Dependent Claim 16 words
The structure of claim 9 in which, the distal ends of the terminals are approximately hemispherical.
Claim 13
Dependent Claim 33 words
The structure of claim 9 further comprising: a second layer of an encapsulant between the first layer of encapsulant and the substrate which seals around the terminals and bottom of the second substrate.
Claim 14
Dependent Claim 41 words
The structure of claim 9 in which the bumps and terminals have a melting temperature sufficiently above the melting temperature of the first material, for joining the terminals to the bumps without significantly changing the shape of the bumps and terminals.
Claim 15
Dependent Claim 33 words
The structure of claim 12 in which the bumps and terminals are a high melting temperature Pb rich solder with 3 to 5% Sn, and the first material is eutectic Pb/Sn based solder.
Claim 16
Dependent Claim 14 words
The structure of claim 9 in which the second substrate is an IC chip.
Claim 17
Dependent Claim 154 words
The structure of claim 9, in which the pads are copper and located at positions defined by a rectangular or square grid, the interconnect structure includes an epoxy - fiberglass board, the bumps are Pb rich solder with about 3-5% Sn, the encapsulant includes epoxy, and further comprising: first joints of about eutectic Pb/Sn solder connecting between the conductive pads and the spherical ends of the solder bumps; an IC chip having terminals of Pb rich solder with about 3-5% Sn projecting downward, with distal ends of terminals approximately touching the flat, distal ends of the solder bumps; second joints of approximately eutectic Pb/Sn solder connecting between the distal ends of the solder terminals and the flat distal ends of the solder bumps; and a second layer of epoxy encapsulant between the first layer of encapsulant and the IC chip which seals around the solder terminals, second joints and bottom of the IC chip.
Claim 18
Dependent Claim 40 words
The structure of claim 9 in which both the conductive bumps and the terminals include a high temperature solder; and which further comprises joints of low temperature solder connecting between the conductive bumps and the distal ends of the terminals.
Claim 19
Dependent Claim 22 words
The structure of claim 9, in which the pads are copper and the conductive bumps are Pb rich with 3-5% Sn solder.
Claim 20
Dependent Claim 23 words
The structure of claim 9, in which the solder bumps are bonded to the copper pads by joints of approximately eutectic Pb/Sn solder.
Claim 21
Dependent Claim 19 words
The structure of claim 9 in which the conductive bumps are of a different material than the conductive pads.
Claim 22
Dependent Claim 87 words
An interconnect structure resulting from a method for replacing a substrate bonded to the interconnect structure by bump electrodes with the space between the substrate and the structure being filled with an encapsulant, comprising the steps of: mechanically removing the substrate from the structure; planarizing the surface of the encapsulant and the bump electrodes remaining on the structure, to form a surface of encapsulant with flat bump electrodes; and bonding another substrate to the planarized bump electrodes on the structure through the use of other bump electrodes.
Claim 23
Dependent Claim 87 words
An interconnect structure resulting from a method for replacing a substrate bonded to the interconnect structure by bump electrodes with the space between the substrate and the structure being filled with an encapsulant, comprising the steps of: mechanically removing the substrate from the structure; planarizing the surface of the encapsulant and the bump electrodes remaining on the structure, to form a surface of encapsulant with flat bump electrodes; and bonding another substrate to the planarized bump electrodes on the structure through the use of other bump electrodes.
Claim 24
Dependent Claim 26 words
The structure of claim 20, further comprising: joints of low temperature solder connecting between distal ends of the other bump electrodes and the flat bump electrodes.
Claim 25
Dependent Claim 18 words
The structure of claim 20 in which, the distal ends of the other bump electrodes are approximately hemispherical.
Claim 26
Dependent Claim 28 words
The structure of claim 20 further comprising: a second layer of encapsulant between the first layer of encapsulant and the substrate which seals around the other bump electrodes.
Claim 27
Dependent Claim 69 words
An interconnect structure resulting from a method for removing a substrate bonded to the interconnect structure by bump electrodes with the space between the bottom surface of said substrate and the structure being filled with an encapsulant, comprising the steps: mechanically removing the substrate from the structure; planarizing the exposed surface of the encapsulant and bump electrodes remaining on the surface of the structure, to form flat bump electrodes.
Claim 28
Dependent Claim 69 words
An interconnect structure resulting from a method for removing a substrate bonded to the interconnect structure by bump electrodes with the space between the bottom surface of said substrate and the structure being filled with an encapsulant, comprising the steps: mechanically removing the substrate from the structure; planarizing the exposed surface of the encapsulant and bump electrodes remaining on the surface of the structure, to form flat bump electrodes.
Claim 29
Dependent Claim 77 words
The structure of claim 24 in which: the bump electrodes include a high melting temperature material; the lower end of the bump electrodes are approximately hemispherical; and in which the structure further comprises: pads of a high melting temperature metal on the substrate surface; a joining material connecting the bump electrodes to the pads, with a sufficiently low melting or transition temperature that the shapes of the pads and bump electrodes are not altered by their joining.
Claim 30
Dependent Claim 35 words
The structure of claim 24 which further comprises: pads on the surface of the substrate to which the bump electrodes are joined; and in which the bottoms of the bump electrodes conform to the pads.
Claim 31
Independent Claim 57 words
A method of producing an interconnect structure, comprising the steps of: mechanically removing a substrate bonded to the interconnect structure by first bump electrodes with a space between the structure and substrate being filled with an encapsulant; and planarizing the surface of the encapsulant and first bump electrodes remaining on the structure, to form flat bump electrodes.
Claim 32
Independent Claim 57 words
A method of producing an interconnect structure, comprising the steps of: mechanically removing a substrate bonded to the interconnect structure by first bump electrodes with a space between the structure and substrate being filled with an encapsulant; and planarizing the surface of the encapsulant and first bump electrodes remaining on the structure, to form flat bump electrodes.
Claim 33
Dependent Claim 26 words
The method claim 27 further comprising the step: bonding another substrate to the planarized bump electrodes on the structure, through the use of second bump electrodes.
Claim 34
Dependent Claim 62 words
The method of claim 28 in which the step of bonding another substrate to the structure includes the steps of: depositing a low temperature joining material between the first and the second bump electrodes which is wettable to both electrodes; and heating to join the first and second bump electrodes at a sufficiently low temperature that the bump electrodes are not melted.
Claim 35
Dependent Claim 42 words
The method of claim 29 in which the first and second bump electrodes are Pb rich solder with about 3 to 5% Sn; distal ends of the second bump electrodes are about hemispherical; and the joining material is approximately eutectic Pb/Sn solder.

References Cited (Backward Citations)

JPS5848932A Cited
JPS62276837A Cited
US4942140A Cited
US5250848A Cited
US5233504A Cited
US5329423A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-01-29 1999-07-31 2000-01-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-01-29 2003-07-31 2004-01-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-01-29 2007-07-31 2008-01-30 $7700.00 Window Closed / Lapsed

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