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Patent US5686337A successfully refreshed from Google Patents.
US5686337A
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US
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Method for fabricating stacked capacitors in a DRAM cell
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1996-01-11
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Granted: 1997-11-11
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Expires: 2016-01-11
Abstract
Abstract A one mask/four etch step process to form an curved storage node for an advanced DRAM cell capacitor. A first undoped oxide layer and a second doped oxide layer are formed over associated field effect transistors on the substrate surface. Next, a photoresist pattern having an opening over the node (source) is formed over the second oxide layer. In the first etch step, the second oxide layer is isotropically etched through the opening. The isotropic etch selectively etches the second doped oxide layer thereby forming an arced electrode hole in the second oxide layer. Then in the second etch step, the first oxide layer is anisotropically etched to form the node contact hole. A first conductive layer is formed over resultant surface. A polarization layer is formed covering bottom portions of the first conductive layer but exposing the tops of the first conductive layer. In the third etch step, the exposed tops of the first conductive layer are etched off thereby defining curved bottom storage electrodes. The fourth etch removes the planarization layer and parts of the second oxide. Lastly, a dielectric layer and top plate electrode are formed over the bottom storage electrode. The novel process of this invention produces a capacitor using less masking and etch steps than conventional processes and allows closer spacing between capacitors.
Inventors
- 👤 Chao-Ming Koh
- 👤 Rong-Wu Chien
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:54
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10B12/30; H10B12/31; H10B12/318
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
310 words
A method of fabricating a capacitor of a semiconductor memory device on a substrate; said substrate having a device area with a source region formed therein, comprising the steps of: a) forming a first insulation layer over said device area; b) forming a first dielectric layer over said first insulation layer; c) forming a first photoresist pattern over said first dielectric layer, said first photoresist pattern having a first opening over said source; d) isotropically etching said first dielectric layer through said first opening; said isotropic etch forming an electrode hole defined by projections of said first dielectric layer; the isotropic etch removing at least all of said first dielectric layer under said first opening and exposing said first insulation layer; said isotropic etch having an etch rate ratio greater than 5:1 between said first dielectric layer and first insulation layer; said projections having a top surface; e) forming a contact hole through said first insulation layer exposing said source; f) removing said first photoresist pattern; g) forming a first conductive layer over the resulting formed in step (e) structure; said first conductive layer being electrically connected with said source; h) forming a first planarization layer covering said first conductive layer; i) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; j) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said first dielectric layer between said storage electrodes; k) blanket etching said first planarization layer to remove all of said first planarization layer and to remove portions of the exposed first dielectric layer; said blanket etch selectively etching said first planarization layer over said first dielectric layer; and l) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 2
Independent Claim
310 words
A method of fabricating a capacitor of a semiconductor memory device on a substrate; said substrate having a device area with a source region formed therein, comprising the steps of: a) forming a first insulation layer over said device area; b) forming a first dielectric layer over said first insulation layer; c) forming a first photoresist pattern over said first dielectric layer, said first photoresist pattern having a first opening over said source; d) isotropically etching said first dielectric layer through said first opening; said isotropic etch forming an electrode hole defined by projections of said first dielectric layer; the isotropic etch removing at least all of said first dielectric layer under said first opening and exposing said first insulation layer; said isotropic etch having an etch rate ratio greater than 5:1 between said first dielectric layer and first insulation layer; said projections having a top surface; e) forming a contact hole through said first insulation layer exposing said source; f) removing said first photoresist pattern; g) forming a first conductive layer over the resulting formed in step (e) structure; said first conductive layer being electrically connected with said source; h) forming a first planarization layer covering said first conductive layer; i) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; j) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said first dielectric layer between said storage electrodes; k) blanket etching said first planarization layer to remove all of said first planarization layer and to remove portions of the exposed first dielectric layer; said blanket etch selectively etching said first planarization layer over said first dielectric layer; and l) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 3
Dependent Claim
33 words
The method of claim 1 which further includes after step (c), anisotropically etching upper portions of said first dielectric layer through said first opening forming a hole partially through said first dielectric layer.
Claim 4
Dependent Claim
50 words
The method of claim 1 which further includes after step (c), anisotropically etching upper portions of said first dielectric layer through said first opening forming a starter hole partially through said first dielectric layer; said starter hole having a depth in the range of between about 2000 and 3000 Å.
Claim 5
Dependent Claim
27 words
The method of claim 1 wherein said first insulation layer is formed of a material selected from the group consisting of: undoped silicon oxide and silicon nitride.
Claim 6
Dependent Claim
23 words
The method of claim 1 wherein said first insulation layer has a thickness in the range of between about 1000 to 2000 Å.
Claim 7
Dependent Claim
44 words
The method of claim 1 wherein said first dielectric layer is formed of a material selected from the group consisting of: phosphosilicate glass, and borophosphosilicate glass; and said first dielectric layer has a thickness in the range of between about 1000 to 2000 Å.
Claim 8
Dependent Claim
35 words
The method of claim 1 wherein said first dielectric layer is planarized by a method selected from the group consisting of: a chemical mechanical polishing method, a glass flow treatment, and an etch back method.
Claim 9
Dependent Claim
30 words
The method of claim 1 wherein said isotropic etch in step (d) is performed with a dilute HF wet etch for an etch time between about 5 to 10 minutes.
Claim 10
Dependent Claim
55 words
The method of claim 1 wherein said isotropic etch in step (d) is an isotropic etch having a higher etch rate of said first dielectric layer than said first insulation layer; and said isotropic etch has an etch rate ratio between about 5:1 to 20:1 between said first dielectric layer and said first insulating layer.
Claim 11
Dependent Claim
69 words
The method of claim 1 wherein said first conductive layer is formed of a material selected from the group consisting of: polysilicon and a polycide; and is doped with an impurity selected from the group consisting of: phosphorus, arsenic and has an impurity concentration in the range of between about 1E20 to 1E21 atoms/cm 3 and has a thickness in the range of between about 500 to 2000 Å.
Claim 12
Dependent Claim
24 words
The method of claim 1 wherein said first planarization layer is formed of a material selected from the group consisting of: spin-on-glass and photoresist.
Claim 13
Dependent Claim
57 words
The method of claim 1 wherein said capacitor dielectric layer is composed of a material selected from the group consisting of: a three layer structure of silicon oxide-silicon nitride-silicon oxide (ONO), Ta 2 O 5 , and silicon nitride; and said capacitor dielectric layer has a thickness in the range of between about 50 to 60 Å.
Claim 14
Dependent Claim
50 words
The method of claim 1 wherein said substrate further includes a peripheral circuit area and further includes after step (j), forming a peripheral circuit resist mask covering said peripheral circuit area; said peripheral circuit resist mask being an etch barrier; and after step (k) removing said peripheral circuit resist mask.
Claim 15
Dependent Claim
22 words
The method of claim 1 wherein said top electrode has a thickness in the range of between about 500 to 2000 Å.
Claim 16
Dependent Claim
19 words
The method of claim 1 further includes after step (l): forming a second insulation layer over the resulting structure.
Claim 17
Independent Claim
411 words
A method of fabricating a dynamic random access memory (DRAM) cell having a capacitor on a substrate, comprising the steps of: a) forming a MOS (metal oxide semiconductor) device having source and drain regions, adjacent to a field oxide region, in said substrate; b) forming a first oxide layer composed of an undoped silicon oxide over said MOS device; c) forming a second oxide layer composed of a doped silicon oxide over said first oxide layer; said first oxide layer and said second oxide layer having different etch characteristics; d) forming a first photoresist pattern having a first opening over said source; and anisotropically etching upper portions of said second oxide layer through said first openings forming a starter hole partially through said second oxide layer; said starter hole having a depth in the range of between about 2000 and 3000 Å; e) isotropically etching said second oxide layer through said first opening; said isotropic etch having an etch rate ratio between about 5:1 and 20:1 between said second oxide layer and said first oxide layer; said isotropic etch forming an electrode hole defined by projections of said second oxide layer and said first insulation layer; the isotropic etch removing at least all of said first dielectric layer under said first opening and exposing said first dielectric layer; said projections having a top surface; f) forming a contact hole through said first oxide layer exposing said at least portions of source; g) removing said first photoresist pattern; h) forming a first conductive layer over the resulting structure; said first conductive layer being electrically connected with said source; i) forming a first planarization layer composed of spin on glass covering said first conductive layer; j) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; k) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said second oxide layer between said storage electrodes; l) blanket etching said first planarization layer to remove all of said first planarization layer and to remove portions of said second oxide layer; said blanket etch selectively etching said first planarization layer over said second oxide layer; said blanket etch has an etch selectivity greater than 5:1 for said first planarization layer over said second oxide layer; and m) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 18
Independent Claim
411 words
A method of fabricating a dynamic random access memory (DRAM) cell having a capacitor on a substrate, comprising the steps of: a) forming a MOS (metal oxide semiconductor) device having source and drain regions, adjacent to a field oxide region, in said substrate; b) forming a first oxide layer composed of an undoped silicon oxide over said MOS device; c) forming a second oxide layer composed of a doped silicon oxide over said first oxide layer; said first oxide layer and said second oxide layer having different etch characteristics; d) forming a first photoresist pattern having a first opening over said source; and anisotropically etching upper portions of said second oxide layer through said first openings forming a starter hole partially through said second oxide layer; said starter hole having a depth in the range of between about 2000 and 3000 Å; e) isotropically etching said second oxide layer through said first opening; said isotropic etch having an etch rate ratio between about 5:1 and 20:1 between said second oxide layer and said first oxide layer; said isotropic etch forming an electrode hole defined by projections of said second oxide layer and said first insulation layer; the isotropic etch removing at least all of said first dielectric layer under said first opening and exposing said first dielectric layer; said projections having a top surface; f) forming a contact hole through said first oxide layer exposing said at least portions of source; g) removing said first photoresist pattern; h) forming a first conductive layer over the resulting structure; said first conductive layer being electrically connected with said source; i) forming a first planarization layer composed of spin on glass covering said first conductive layer; j) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; k) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said second oxide layer between said storage electrodes; l) blanket etching said first planarization layer to remove all of said first planarization layer and to remove portions of said second oxide layer; said blanket etch selectively etching said first planarization layer over said second oxide layer; said blanket etch has an etch selectivity greater than 5:1 for said first planarization layer over said second oxide layer; and m) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 19
Dependent Claim
23 words
The method of claim 16 wherein said first oxide layer has a thickness in the range of between about 1000 to 2000 Å.
Claim 20
Dependent Claim
44 words
The method of claim 16 wherein said second oxide layer is formed of a material selected from the group consisting of: phosphosilicate glass, and borophosphosilicate glass; and said second oxide layer has a thickness in the range of between about 1000 to 2000 Å.
Claim 21
Dependent Claim
35 words
The method of claim 16 wherein said second oxide layer is planarized by a method selected from the group consisting of: a chemical mechanical polishing method, a glass flow treatment, and an etch back method.
Claim 22
Dependent Claim
30 words
The method of claim 16 wherein said isotropic etch in step (d) is performed with a dilute HF wet etch for an etch time between about 5 to 10 minutes.
Claim 23
Dependent Claim
69 words
The method of claim 16 wherein said first conductive layer is formed of a material selected from the group consisting of: polysilicon and a polycide; and is doped with an impurity selected from the group consisting of: phosphorus, arsenic and has an impurity concentration in the range of between about 1E20 to 1E21 atoms/cm 3 and has a thickness in the range of between about 500 to 2000 Å.
Claim 24
Dependent Claim
14 words
The method of claim 16 wherein said first planarization layer is formed of photoresist.
Claim 25
Dependent Claim
52 words
The method of claim 16 wherein the blanket etch in step (l) has a higher etch rate of said first planarization layer than said second oxide layer; and said blanket isotropic etch has an etch rate ratio between about 5:1 to 20:1 between said first planarization layer and said second oxide layer.
Claim 26
Dependent Claim
50 words
The method of claim 16 wherein said substrate further includes a peripheral circuit area and further includes after step (k), forming a peripheral circuit resist mask covering said peripheral circuit area; said peripheral circuit resist mask being an etch barrier; and after step (l) removing said peripheral circuit resist mask.
Claim 27
Dependent Claim
51 words
The method of claim 16 wherein said capacitor dielectric layer is composed of a material selected from the group consisting of: silicon oxide-silicon nitride-silicon oxide (ONO), Ta 2 O 5 , and silicon nitride; said conformal dielectric layer has a thickness in the range of between about 50 to 60 Å.
Claim 28
Dependent Claim
22 words
The method of claim 16 wherein said top electrode has a thickness in the range of between about 500 to 2000 Å.
Claim 29
Independent Claim
412 words
A method of fabricating a dynamic random access memory (DRAM) cell having a capacitor on a substrate, said substrate including peripheral circuits areas; comprising the steps of: a) forming a MOS (metal oxide semiconductor) device having source and drain regions, adjacent to a field oxide region, in said substrate; b) forming a first oxide layer composed of an undoped silicon oxide over said MOS device; c) forming a second oxide layer composed of a doped silicon oxide over said first oxide layer; said first oxide layer and said second oxide layer having different etch characteristics; d) forming a first photoresist pattern over said second oxide layer, said first photoresist pattern having a first opening over said source; e) anisotropically etching upper portions of said second oxide layer through said first opening forming a starter hole partially through said second oxide layer; f) isotropically etching said second oxide layer through said first opening; said isotropic etch having an etch rate ratio greater than 5:1 between said second oxide layer and said first oxide layer; said isotropic etch forming an electrode hole defined by projections of said second oxide layer; said projections having a top surface; g) forming a contact hole through said first oxide layer exposing said source; h) removing said first photoresist pattern; i) forming a first conductive layer over the resulting formed in step g) structure; said first conductive layer being electrically connected with said source; j) forming a first planarization layer composed of spin on glass covering said first conductive layer; k) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; l) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said second oxide layer between said storage electrodes; m) forming a peripheral circuit resist mask covering said peripheral circuit area; said peripheral circuit resist mask being an etch barrier; n) blanket etching said first planarization layer through said peripheral circuit resist mask to remove said first planarization layer and to remove portions of said second oxide layer; said blanket etch selectively etching said first planarization layer over said second oxide layer; said blanket etch has an etch selectivity greater than 5:1 for said first planarization layer over said second oxide layer; removing said peripheral circuit resist mask; and p) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 30
Independent Claim
412 words
A method of fabricating a dynamic random access memory (DRAM) cell having a capacitor on a substrate, said substrate including peripheral circuits areas; comprising the steps of: a) forming a MOS (metal oxide semiconductor) device having source and drain regions, adjacent to a field oxide region, in said substrate; b) forming a first oxide layer composed of an undoped silicon oxide over said MOS device; c) forming a second oxide layer composed of a doped silicon oxide over said first oxide layer; said first oxide layer and said second oxide layer having different etch characteristics; d) forming a first photoresist pattern over said second oxide layer, said first photoresist pattern having a first opening over said source; e) anisotropically etching upper portions of said second oxide layer through said first opening forming a starter hole partially through said second oxide layer; f) isotropically etching said second oxide layer through said first opening; said isotropic etch having an etch rate ratio greater than 5:1 between said second oxide layer and said first oxide layer; said isotropic etch forming an electrode hole defined by projections of said second oxide layer; said projections having a top surface; g) forming a contact hole through said first oxide layer exposing said source; h) removing said first photoresist pattern; i) forming a first conductive layer over the resulting formed in step g) structure; said first conductive layer being electrically connected with said source; j) forming a first planarization layer composed of spin on glass covering said first conductive layer; k) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; l) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said second oxide layer between said storage electrodes; m) forming a peripheral circuit resist mask covering said peripheral circuit area; said peripheral circuit resist mask being an etch barrier; n) blanket etching said first planarization layer through said peripheral circuit resist mask to remove said first planarization layer and to remove portions of said second oxide layer; said blanket etch selectively etching said first planarization layer over said second oxide layer; said blanket etch has an etch selectivity greater than 5:1 for said first planarization layer over said second oxide layer; removing said peripheral circuit resist mask; and p) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 31
Independent Claim
329 words
A method of fabricating a capacitor of a semiconductor memory device on a substrate; comprising the steps of: a) providing a substrate said substrate having a device area with a source region formed therein said substrate; said substrate having a peripheral circuit area; b) forming a first insulation layer over said device area; c) forming a first dielectric layer over said first insulation layer; d) forming a first photoresist pattern over said first dielectric layer, said first photoresist pattern having a first opening over said source; e) isotropically etching said first dielectric layer through said first opening; said isotropic etch forming an electrode hole defined by projections of said first dielectric layer; said isotropic etch having an etch rate ratio greater than 5:1 between said first dielectric layer and first insulation layer; said projections having a top surface; f) forming a contact hole through said first insulation layer exposing said source; g) removing said first photoresist pattern; h) forming a first conductive layer over the resulting formed in step f) structure; said first conductive layer being electrically connected with said source; i) forming a first planarization layer covering said first conductive layer; j) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; k) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said first dielectric layer between said storage electrodes; l) forming a peripheral circuit resist mask covering said peripheral circuit area; said peripheral circuit resist mask being an etch barrier; m) blanket etching said first planarization layers to remove all of said first planarization layer and to remove portions of the exposed first dielectric layer; said blanket etch selectively etching said first planarization layer over said first dielectric layer; and removing said peripheral circuit resist mask and o) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 32
Independent Claim
329 words
A method of fabricating a capacitor of a semiconductor memory device on a substrate; comprising the steps of: a) providing a substrate said substrate having a device area with a source region formed therein said substrate; said substrate having a peripheral circuit area; b) forming a first insulation layer over said device area; c) forming a first dielectric layer over said first insulation layer; d) forming a first photoresist pattern over said first dielectric layer, said first photoresist pattern having a first opening over said source; e) isotropically etching said first dielectric layer through said first opening; said isotropic etch forming an electrode hole defined by projections of said first dielectric layer; said isotropic etch having an etch rate ratio greater than 5:1 between said first dielectric layer and first insulation layer; said projections having a top surface; f) forming a contact hole through said first insulation layer exposing said source; g) removing said first photoresist pattern; h) forming a first conductive layer over the resulting formed in step f) structure; said first conductive layer being electrically connected with said source; i) forming a first planarization layer covering said first conductive layer; j) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; k) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said first dielectric layer between said storage electrodes; l) forming a peripheral circuit resist mask covering said peripheral circuit area; said peripheral circuit resist mask being an etch barrier; m) blanket etching said first planarization layers to remove all of said first planarization layer and to remove portions of the exposed first dielectric layer; said blanket etch selectively etching said first planarization layer over said first dielectric layer; and removing said peripheral circuit resist mask and o) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 33
Independent Claim
384 words
A method of fabricating a dynamic random access memory (DRAM) cell having a capacitor on a substrate, comprising the steps of: a) providing a substrate having a peripheral circuit area; b) forming a MOS (metal oxide semiconductor) device having source and drain regions, adjacent to a field oxide region, in said substrate; c) forming a first oxide layer composed of an undoped silicon oxide over said MOS device; d) forming a second oxide layer composed of a doped silicon oxide over said first oxide layer; said first oxide layer and said second oxide layer having different etch characteristics; e) forming a first photoresist pattern over said second oxide layer, said first photoresist pattern having a first opening over said source; f) isotropically etching said second oxide layer through said first opening; said isotropic etch having an etch rate ratio greater than 5:1 between said second oxide layer and said first oxide layer; said isotropic etch forming an electrode hole defined by projections of said second oxide layer; said projections having a top surface; g) forming a contact hole through said first oxide layer exposing said source; h) removing said first photoresist pattern; i) forming a first conductive layer over the resulting structure; said first conductive layer being electrically connected with said source; j) forming a first planarization layer composed of spin on glass covering said first conductive layer; k) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; l) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said second oxide layer between said storage electrodes; m) forming a peripheral circuit resist mask covering said peripheral circuit area; said peripheral circuit resist mask being an etch barrier; n) blanket etching said first planarization layer to remove all of said first planarization layer and to remove portions of said second oxide layer; said blanket etch selectively etching said first planarization layer over said second oxide layer; said blanket etch has an etch selectivity greater than 5:1 for said first planarization layer over said second oxide layer; o) removing said peripheral circuit resist mask; and p) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
Claim 34
Independent Claim
384 words
A method of fabricating a dynamic random access memory (DRAM) cell having a capacitor on a substrate, comprising the steps of: a) providing a substrate having a peripheral circuit area; b) forming a MOS (metal oxide semiconductor) device having source and drain regions, adjacent to a field oxide region, in said substrate; c) forming a first oxide layer composed of an undoped silicon oxide over said MOS device; d) forming a second oxide layer composed of a doped silicon oxide over said first oxide layer; said first oxide layer and said second oxide layer having different etch characteristics; e) forming a first photoresist pattern over said second oxide layer, said first photoresist pattern having a first opening over said source; f) isotropically etching said second oxide layer through said first opening; said isotropic etch having an etch rate ratio greater than 5:1 between said second oxide layer and said first oxide layer; said isotropic etch forming an electrode hole defined by projections of said second oxide layer; said projections having a top surface; g) forming a contact hole through said first oxide layer exposing said source; h) removing said first photoresist pattern; i) forming a first conductive layer over the resulting structure; said first conductive layer being electrically connected with said source; j) forming a first planarization layer composed of spin on glass covering said first conductive layer; k) etching back said first planarization layer to expose at least portions of said first conductive layer covering said top surface of said projections; l) selectively etching the exposed portions of said first conductive layer thereby separating said first conductive layer into storage electrodes and exposing said second oxide layer between said storage electrodes; m) forming a peripheral circuit resist mask covering said peripheral circuit area; said peripheral circuit resist mask being an etch barrier; n) blanket etching said first planarization layer to remove all of said first planarization layer and to remove portions of said second oxide layer; said blanket etch selectively etching said first planarization layer over said second oxide layer; said blanket etch has an etch selectivity greater than 5:1 for said first planarization layer over said second oxide layer; o) removing said peripheral circuit resist mask; and p) forming a capacitor dielectric layer and a top plate electrode covering said storage electrodes.
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