Patent US5677574A successfully refreshed from Google Patents.
US5677574A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Airbridge wiring structure for MMIC
Assignee: Mitsubishi Electric Corp
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Filing: 1996-04-09
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Granted: 1997-10-14
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Expires: 2016-04-09
Abstract
Abstract An airbridge wiring structure includes a substrate having a surface; a first wiring layer disposed on the surface of the substrate; and a second wiring layer disposed partially on the surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the airbridge wiring layer includes at least one longitudinal groove.
Inventors
- 👤 Takayuki Hisaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:02
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/46; H10W20/01; H10W20/071; H10W20/072; H10W20/41; H10W20/43; H10W20/432; H10W20/482; H10W20/483; H10W70/00; H10W70/60; H10W70/62; H10W70/65
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
77 words
An airbridge wiring structure comprising: a substrate having a surface; a first wiring layer disposed on the surface of the substrate; and a second wiring layer disposed partially on the surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the first wiring layer is thinner opposite the airbridge wiring layer than elsewhere.
Claim 2
Dependent Claim
77 words
An airbridge wiring structure comprising: a substrate having a surface; a first wiring layer disposed on the surface of the substrate; and a second wiring layer disposed partially on the surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the first wiring layer is thinner opposite the airbridge wiring layer than elsewhere.
Claim 3
Dependent Claim
20 words
The airbridge wiring structure of claim 1 comprising an insulating layer disposed between the first wiring layer and the substrate.
Claim 4
Dependent Claim
22 words
The airbridge wiring structure of claim 1 wherein the first wiring layer is disposed at a position lower than the insulating layer.
Claim 5
Dependent Claim
29 words
The airbridge wiring structure of claim 1 wherein the airbridge wiring layer is gold in which copper ions are implanted for increasing the strength of the airbridge wiring layer.
Claim 6
Dependent Claim
28 words
The airbridge wiring structure of claim 1 wherein the airbridge wiring layer is laminated with a metal film for increasing the mechanical strength of the airbridge wiring layer.
Claim 7
Dependent Claim
13 words
The airbridge wiring structure of claim 5 wherein the metal film is tantalum.
Claim 8
Dependent Claim
104 words
An airbridge wiring structure comprising: a substrate having a first surface; a first wiring layer disposed on the first surface of the substrate; and a second wiring layer disposed partially on the first surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the substrate includes a recess in which the first surface is a bottom surface of the recess, and the substrate includes a second surface outside the recess, the recess providing protection to the air bridge wiring structure.
Claim 9
Dependent Claim
104 words
An airbridge wiring structure comprising: a substrate having a first surface; a first wiring layer disposed on the first surface of the substrate; and a second wiring layer disposed partially on the first surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the substrate includes a recess in which the first surface is a bottom surface of the recess, and the substrate includes a second surface outside the recess, the recess providing protection to the air bridge wiring structure.
Claim 10
Dependent Claim
20 words
The airbridge wiring structure of claim 7 comprising an insulating layer disposed between the first wiring layer and the substrate.
Claim 11
Dependent Claim
29 words
The airbridge wiring structure of claim 7 wherein the airbridge wiring layer is gold in which copper ions are implanted for increasing the strength of the airbridge wiring layer.
Claim 12
Dependent Claim
28 words
The airbridge wiring structure of claim 7 wherein the airbridge wiring layer is laminated with a metal film for increasing the mechanical strength of the airbridge wiring layer.
Claim 13
Dependent Claim
13 words
The airbridge wiring structure of claim 10 wherein the metal film is tantalum.
Claim 14
Dependent Claim
80 words
An airbridge wiring structure comprising: a substrate having a surface; a first wiring layer disposed on the surface of the substrate; and a second wiring layer disposed partially on the surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the airbridge wiring layer includes at least one longitudinal groove transverse to the first wiring layer.
Claim 15
Dependent Claim
80 words
An airbridge wiring structure comprising: a substrate having a surface; a first wiring layer disposed on the surface of the substrate; and a second wiring layer disposed partially on the surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the airbridge wiring layer includes at least one longitudinal groove transverse to the first wiring layer.
Claim 16
Dependent Claim
20 words
The airbridge wiring structure of claim 12 comprising an insulating layer disposed between the first wiring layer and the substrate.
Claim 17
Dependent Claim
18 words
The airbridge wiring structure of claim 12 wherein the groove includes an opening directed away from the substrate.
Claim 18
Dependent Claim
17 words
The airbridge wiring structure of claim 12 wherein the groove includes an opening directed toward the substrate.
Claim 19
Dependent Claim
18 words
The airbridge wiring structure of claim 12 wherein the airbridge wiring layer includes a plurality of longitudinal grooves.
Claim 20
Dependent Claim
18 words
The airbridge wiring structure of claim 12 wherein the airbridge wiring layer includes two oppositely directed longitudinal grooves.
Claim 21
Dependent Claim
29 words
The airbridge wiring structure of claim 12 wherein the airbridge wiring layer is gold in which copper ions are implanted for increasing the strength of the airbridge wiring layer.
Claim 22
Dependent Claim
28 words
The airbridge wiring structure of claim 12 wherein the airbridge wiring layer is laminated with a metal film for increasing the mechanical strength of the airbridge wiring layer.
Claim 23
Dependent Claim
13 words
The airbridge wiring structure of claim 19 wherein the metal film is tantalum.
Claim 24
Dependent Claim
78 words
An airbridge wiring structure comprising: a substrate having a surface; a first wiring layer disposed on the surface of the substrate; and a second wiring layer disposed partially on the surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the airbridge wiring layer includes a plurality of holes opposite the first wiring layer.
Claim 25
Dependent Claim
78 words
An airbridge wiring structure comprising: a substrate having a surface; a first wiring layer disposed on the surface of the substrate; and a second wiring layer disposed partially on the surface of the substrate and including an airbridge wiring layer crossing the first wiring layer, the first and second wiring layers being electrically insulated from each other and separated by an air gap wherein the airbridge wiring layer includes a plurality of holes opposite the first wiring layer.
Claim 26
Dependent Claim
29 words
The airbridge wiring structure of claim 21 wherein the airbridge wiring layer is gold in which copper ions are implanted for increasing the strength of the airbridge wiring layer.
Claim 27
Dependent Claim
28 words
The airbridge wiring structure of claim 21 wherein the airbridge wiring layer is laminated with a metal film for increasing the mechanical strength of the airbridge wiring layer.
Claim 28
Dependent Claim
13 words
The airbridge wiring structure of claim 22 wherein the metal film is tantalum.
Claim 29
Dependent Claim
101 words
An airbridge wiring structure comprising: a substrate having a surface; a single electrically conducting region within a portion of and at the surface of the substrate and a first wiring layer having two parts disposed on the surface of the substrate, the two parts being electrically connected through the single electrically conducting region; and a second wiring layer partially disposed on the surface of the substrate and including an airbridge wiring layer crossing the single electrically conducting region wherein the single electrically conducting region and the airbridge wiring layer are electrically insulated from each other and separated by an air gap.
Claim 30
Dependent Claim
101 words
An airbridge wiring structure comprising: a substrate having a surface; a single electrically conducting region within a portion of and at the surface of the substrate and a first wiring layer having two parts disposed on the surface of the substrate, the two parts being electrically connected through the single electrically conducting region; and a second wiring layer partially disposed on the surface of the substrate and including an airbridge wiring layer crossing the single electrically conducting region wherein the single electrically conducting region and the airbridge wiring layer are electrically insulated from each other and separated by an air gap.
Claim 31
Dependent Claim
29 words
The airbridge wiring structure of claim 25 wherein the airbridge wiring layer is gold in which copper ions are implanted for increasing the strength of the airbridge wiring layer.
Claim 32
Dependent Claim
28 words
The airbridge wiring structure of claim 25 wherein the airbridge wiring layer is laminated with a metal film for increasing the mechanical strength of the airbridge wiring layer.
Claim 33
Dependent Claim
13 words
The airbridge wiring structure of claim 27 wherein the metal film is tantalum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-10-13 | 2001-04-14 | 2001-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-13 | 2005-04-14 | 2005-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-13 | 2009-04-14 | 2009-10-14 | $7700.00 | Window Closed / Lapsed |