US5530290A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Large scale IC personalization method employing air dielectric structure for extended conductor
Assignee: International Business Machines Corp
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Filing: 1994-04-11
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Granted: 1996-06-25
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Expires: 2014-04-11
Abstract
Abstract Fabrication methods for forming a network of walls concurrently with the formation of studs for interconnecting plural device layers of a large scale integrated circuit device permits aggressive reduction of the average dielectric constant of air dielectric structures. Wall sections may be positioned to laterally support high aspect ratio connecting studs with a network of open or closed polygons. Wall patterns may also be open from layer to layer to allow formation of large scale air dielectric structures over a plurality of layers in a single material removal step. A wide range of shear strengths and reductions of average dielectric constant can be achieved even within a single device layer of a large scale integrated circuit and exploited to meet circuit design and device fabrication process requirements.
Inventors
- 👤 John M. Aitken
- 👤 Klaus D. Beyer
- 👤 Billy L. Crowder
- 👤 Stephen E. Greco
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:12
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/072; H10W20/40; H10W20/45; H10W20/46; H10W20/495
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
124 words
An air dielectric structure including a conductor in a first conductor layer, said conductor being supported in spaced relation from a second conductor layer at intervals, said intervals being in a direction parallel to said second conductor layer, said conductor being supported at a position spaced from said second conductor layer by at least a conductive stud and at least one wall segment, at least one said wall segment and any conductive stud being separated by said intervals at locations along a length of said conductor where said conductor is supported in a spaced relationship from said second conductor layer and a portion of at least another wall segment being integrated with and comprising means for laterally supporting said at least one conductive stud.
Claim 2
Dependent Claim
124 words
An air dielectric structure including a conductor in a first conductor layer, said conductor being supported in spaced relation from a second conductor layer at intervals, said intervals being in a direction parallel to said second conductor layer, said conductor being supported at a position spaced from said second conductor layer by at least a conductive stud and at least one wall segment, at least one said wall segment and any conductive stud being separated by said intervals at locations along a length of said conductor where said conductor is supported in a spaced relationship from said second conductor layer and a portion of at least another wall segment being integrated with and comprising means for laterally supporting said at least one conductive stud.
Claim 3
Dependent Claim
27 words
An air dielectric structure as recited in claim 1, further including at least one wall segment positioned with an end laterally supporting at least one conductive stud.
Claim 4
Dependent Claim
24 words
An air dielectric structure as recited in claim 2, wherein a plurality of said wall segments are positioned to form a network of polygons.
Claim 5
Dependent Claim
23 words
An air dielectric structure as recited in claim 3, wherein at least one polygon in said network of polygons is a closed polygon.
Claim 6
Dependent Claim
24 words
An air dielectric structure as recited in claim 1, wherein a plurality of said wall segments are positioned to form a network of polygons.
Claim 7
Dependent Claim
23 words
An air dielectric structure as recited in claim 5, wherein at least one polygon in said network of polygons is a closed polygon.
Claim 8
Dependent Claim
49 words
An air dielectric structure as recited in claim 1, wherein at least one conductor of said second conductive layer is formed on a surface and at least one wall segment of reduced height is formed on a portion of said at least one conductor of said second conductive layer.
Claim 9
Dependent Claim
35 words
An air dielectric structure as recited in claim 7, wherein said at least one wall segment of reduced height is of greater thickness than at least one other wall segment of said air dielectric structure.
Claim 10
Dependent Claim
49 words
An air dielectric structure as recited in claim 2, wherein at least one conductor of said second conductive layer is formed on a surface and at least one wall segment of reduced height is formed on a portion of said at least one conductor of said second conductive layer.
Claim 11
Dependent Claim
35 words
An air dielectric structure as recited in claim 9, wherein said at least one wall segment of reduced height is of greater thickness than at least one other wall segment of said air dielectric structure.
Claim 12
Dependent Claim
49 words
An air dielectric structure as recited in claim 5, wherein at least one conductor of said second conductive layer is formed on a surface and at least one wall segment of reduced height is formed on a portion of said at least one conductor of said second conductive layer.
Claim 13
Dependent Claim
35 words
An air dielectric structure as recited in claim 11, wherein said at least one wall segment of reduced height is of greater thickness than at least one other wall segment of said air dielectric structure.
Claim 14
Dependent Claim
32 words
An air dielectric structure as recited in claim 1, wherein said first conductive layer is formed on a surface spaced from said second conductive layer by said at least one wall segment.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-25 | 1999-12-25 | 2000-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-25 | 2003-12-25 | 2004-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-25 | 2007-12-25 | 2008-06-25 | $7700.00 | Window Closed / Lapsed |