US5606263A
Expired / Lapsed
US
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Probe method for measuring part to be measured by use thereof and electrical circuit member
Assignee: Canon Inc
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Filing: 1996-03-22
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Granted: 1997-02-25
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Expires: 2016-03-22
Abstract
Abstract An electrical circuit member comprises an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material and a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material and also having the ends of said electroconductive member exposed on both surfaces of said holding member; and an electrical circuit part, said electrical circuit part having connecting portions to be connected to said electroconductive member or said wiring pattern exposed on both surfaces of said holding member, and being connected to at least one surface of said holding member.
Inventors
- 👤 Tetsuo Yoshizawa
- 👤 Masaaki Imaizumi
- 👤 Hideyuki Nishida
- 👤 Hiroshi Kondo
- 👤 Takashi Sakaki
- 👤 Yasuteru Ichida
- 👤 Masaki Konishi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:26
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
161 words
An electrical circuit member comprising: an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material, a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material, a first end of each said electroconductive member being exposed on a first surface of said holding member and a second end of each electroconductive member being exposed on a second surface of each electroconductive member; an electrical circuit substrate, said electrical circuit substrate having connecting portions to be electrically connected to said first ends exposed on said first surface of said holding member, and said electrical circuit substrate being mechanically connected to said first surface of said holding member; and means for vibrating said second ends of said electroconductive members, wherein said electrical connecting member directly contacts the electrical circuit substrate and the electrical circuit substrate directly contacts the vibrating means.
Claim 2
Dependent Claim
161 words
An electrical circuit member comprising: an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material, a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material, a first end of each said electroconductive member being exposed on a first surface of said holding member and a second end of each electroconductive member being exposed on a second surface of each electroconductive member; an electrical circuit substrate, said electrical circuit substrate having connecting portions to be electrically connected to said first ends exposed on said first surface of said holding member, and said electrical circuit substrate being mechanically connected to said first surface of said holding member; and means for vibrating said second ends of said electroconductive members, wherein said electrical connecting member directly contacts the electrical circuit substrate and the electrical circuit substrate directly contacts the vibrating means.
Claim 3
Dependent Claim
25 words
An electrical circuit member according to claim 1, wherein said electrical connecting member and said electrical circuit substrate are arranged to form a probe card.
Claim 4
Dependent Claim
32 words
An electrical circuit member according to claim 1, wherein the first end of said electroconductive member and the connecting portion of said electrical circuit substrate are connected through metallization and/or alloy formation.
Claim 5
Dependent Claim
24 words
An electrical circuit member according to claim 1, wherein said electrical circuit substrate is a semiconductor element, a circuit element or a lead frame.
Claim 6
Dependent Claim
47 words
An electrical circuit member according to claim 1, wherein the first end and/or the second end of said electroconductive member constituting said electrical connecting member connected to the connecting portion of said electrical circuit substrate are protruded from the first and/or second surface of said holding member.
Claim 7
Dependent Claim
153 words
A probe card comprising: an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material, a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material, a first end of each electroconductive member being exposed on a first surface of said holding member and a second end of each electroconductive member protruded on a second surface of said holding member; an electrical circuit substrate, said electrical circuit substrate having connecting portions to be electrically connected to the first ends of said electroconductive members and said electrical circuit substrate being mechanically connected to said first surface of said holding member; and means for vibrating said second ends of said electroconductive members, wherein said electrical connecting member directly contacts the electrical circuit substrate and the electrical circuit substrate directly contacts the vibrating means.
Claim 8
Dependent Claim
153 words
A probe card comprising: an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material, a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material, a first end of each electroconductive member being exposed on a first surface of said holding member and a second end of each electroconductive member protruded on a second surface of said holding member; an electrical circuit substrate, said electrical circuit substrate having connecting portions to be electrically connected to the first ends of said electroconductive members and said electrical circuit substrate being mechanically connected to said first surface of said holding member; and means for vibrating said second ends of said electroconductive members, wherein said electrical connecting member directly contacts the electrical circuit substrate and the electrical circuit substrate directly contacts the vibrating means.
Claim 9
Dependent Claim
31 words
A probe card according to claim 6, wherein the first end of said electroconductive member and the connecting portions of said electrical circuit substrate are connected through metallization and/or alloy formation.
Claim 10
Dependent Claim
23 words
A probe card according to claim 6, wherein said electrical circuit substrate is a semiconductor element, a circuit element or a lead frame.
Claim 11
Dependent Claim
168 words
A measuring method for measuring electrical characteristics of a semiconductor element, comprising the steps of: providing an electrical circuit member comprising: an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material, a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material, a first end of each electroconductive member being exposed on a first surface of said holding member and a second end of each electroconductive member being exposed on a second surface of said holding member; and an electrical circuit substrate, said electrical circuit substrate having connecting portions to be electrically connected to said first ends exposed on said first surface of said holding member, and said electrical circuit substrate being mechanically connected to said first surface of said holding member; electrically connecting said semiconductor element to said second ends exposed on said second surface of said holding member; and vibrating said electroconductive members.
Claim 12
Dependent Claim
168 words
A measuring method for measuring electrical characteristics of a semiconductor element, comprising the steps of: providing an electrical circuit member comprising: an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material, a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material, a first end of each electroconductive member being exposed on a first surface of said holding member and a second end of each electroconductive member being exposed on a second surface of said holding member; and an electrical circuit substrate, said electrical circuit substrate having connecting portions to be electrically connected to said first ends exposed on said first surface of said holding member, and said electrical circuit substrate being mechanically connected to said first surface of said holding member; electrically connecting said semiconductor element to said second ends exposed on said second surface of said holding member; and vibrating said electroconductive members.
Claim 13
Dependent Claim
156 words
A measuring method for measuring electrical characteristics of a semiconductor element, comprising the steps of: providing a probe card comprising: an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material, a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material, a first end of each electroconductive member being exposed on a first surface of said holding member and a second end of each electroconductive member protruded on a second surface of said holding member; and an electrical circuit substrate, said electrical circuit substrate having connecting portions to be electrically connected to the first ends of said electroconductive members and said electrical circuit substrate being mechanically connected to said first surface of said holding member; electrically connecting said semiconductor element to the second ends of said electroconductive members; and vibrating said electroconductive members.
Claim 14
Dependent Claim
156 words
A measuring method for measuring electrical characteristics of a semiconductor element, comprising the steps of: providing a probe card comprising: an electrical connecting member, said electrical connecting member having a holding member comprising an electrically insulating material, a plurality of electroconductive members embedded at predetermined intervals within said holding member, each of said plurality of electroconductive members being insulated with said electrically insulating material, a first end of each electroconductive member being exposed on a first surface of said holding member and a second end of each electroconductive member protruded on a second surface of said holding member; and an electrical circuit substrate, said electrical circuit substrate having connecting portions to be electrically connected to the first ends of said electroconductive members and said electrical circuit substrate being mechanically connected to said first surface of said holding member; electrically connecting said semiconductor element to the second ends of said electroconductive members; and vibrating said electroconductive members.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-25 | 2000-08-26 | 2001-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-25 | 2004-08-26 | 2005-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-25 | 2008-08-26 | 2009-02-25 | $7700.00 | Window Closed / Lapsed |