Patent US5604977A successfully refreshed from Google Patents.
US5604977A
Expired / Lapsed
US
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Method of fabricating focal plane array
Assignee: Texas Instruments Inc
•
Filing: 1995-06-07
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Granted: 1997-02-25
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Expires: 2015-06-07
Abstract
Abstract A thermal detection system (10) includes a focal plane array (12), a thermal isolation structure (14), and an integrated circuit substrate (16). Focal plane array (12) includes thermal sensors (28), each having an associated thermal sensitive element (30). Thermal sensitive element (30) is coupled with one side to infrared absorber and common electrode assembly (36) and on the opposite side to an associated contact pad (20) disposed on the integrated circuit substrate (16). Reticulation kerfs (52a, 52b) separate adjacent thermal sensitive elements (30a, 30b, 30c) by a distance at least half the average width (44, 46) of a single thermal sensitive element (30a, 30b, 30c). A continuous, non-reticulated optical coating (38) may be disposed over thermal sensitive elements (30a, 30b, 30c) to maximize absorption of thermal radiation incident to focal plane array (12).
Inventors
- 👤 James E. Robinson
- 👤 James F. Belcher
- 👤 Howard R. Beratan
- 👤 Steven N. Frank
- 👤 Charles M. Hanson
- 👤 Paul O. Johnson
- 👤 Robert J. S. Kyle
- 👤 Edward G. Meissner
- 👤 Robert A. Owen
- 👤 Gail D. Shelton
- 👤 William K. Walker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:50
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/10; G01J5/34; H; H10; H10N; H10N15/00; H10N15/10; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49126; Y10T29/4913; Y10T29/49144
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
123 words
A method for fabricating a focal plane array with a plurality of thermal sensors for providing a sensor signal output representative of the amount of thermal radiation incident to the focal plane array, comprising the steps of: forming a common electrode for supplying a voltage to the thermal sensors; forming an optical coating sensitive to infrared radiation on one side of the common electrode; forming a pyroelectric material on the side of the common electrode opposite the optical coating; and removing the pyroelectric material to form a plurality of thermal sensitive elements spatially separated by a plurality of reticulation kerfs, each reticulation kerf separating adjacent thermal sensitive elements by a distance at least half the average width of a single thermal sensitive element.
Claim 2
Independent Claim
123 words
A method for fabricating a focal plane array with a plurality of thermal sensors for providing a sensor signal output representative of the amount of thermal radiation incident to the focal plane array, comprising the steps of: forming a common electrode for supplying a voltage to the thermal sensors; forming an optical coating sensitive to infrared radiation on one side of the common electrode; forming a pyroelectric material on the side of the common electrode opposite the optical coating; and removing the pyroelectric material to form a plurality of thermal sensitive elements spatially separated by a plurality of reticulation kerfs, each reticulation kerf separating adjacent thermal sensitive elements by a distance at least half the average width of a single thermal sensitive element.
Claim 3
Dependent Claim
32 words
The method of claim 1, wherein the pyroelectric material is selected from the group consisting of barium strontium titanate, lead titanate, lead lanthanum titanate, lead zirconium titanate, and lead lanthanum zirconium titanate.
Claim 4
Dependent Claim
13 words
The method of claim 1, wherein the optical coating is formed from PARALENE.
Claim 5
Dependent Claim
13 words
The method of claim 1, wherein the common electrode is formed from nichrome.
Claim 6
Dependent Claim
20 words
The method of claim 1, wherein the optical coating is formed from a continuous, non-reticulated layer of thermal sensitive material.
Claim 7
Dependent Claim
21 words
The method of claim 1, further comprising the step of forming a thin, semi-transparent metal layer disposed over the optical coating.
Claim 8
Dependent Claim
18 words
The method of claim 1, wherein the step of removing the pyroelectric material is performed using laser reticulation.
Claim 9
Dependent Claim
39 words
The method of claim 1, wherein the step of removing the pyroelectric material is performed using an ion mill, and further comprising the steps of: forming a masking material disposed over the pyroelectric material; and patterning the masking material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-25 | 2000-08-26 | 2001-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-25 | 2004-08-26 | 2005-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-25 | 2008-08-26 | 2009-02-25 | $7700.00 | Window Closed / Lapsed |