EP0413461A1
Expired / Lapsed
EP
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Polyimide thermal isolation mesa for a thermal imaging system
Assignee: Texas Instruments Inc
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Filing: 1990-07-31
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Granted: —
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Expires: 2010-07-31
Abstract
Abstract A mesa (31) is formed from polyimide (or a similar polymer material) to achieve a high thermal resistance. In an exemplary thermal imaging application, an array of thermal isolation mesa structures (30) are disposed on an integrated circuit substrate (20) for electrically connecting and bonding a corresponding focal plane array (5) of thermal sensors (10). Each mesa structure (30) includes a polyimide mesa (31) over which is formed a metal conductor (32) that extends from the top of the mesa down a mesa sidewall to an adjacent IC contact pad (22). When the focal plane array (5) is bonded to the corresponding array of thermal isolation mesa structures (30), a thermally isolated, but electrically conductive path is provided between the sensor signal electrode (16) of the thermal sensor (10) and the corresponding contact pad (22) of the integrated circuit substrate (20).
Inventors
- 👤 Edward G. Meissner
- 👤 Robert A. Owen
- 👤 Mary E. Cronin
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 12:13
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/811; H10F39/809; H10N; H10N15/00; H10N15/10
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
195 words
A thermal imaging system including an array of thermally insulating mesa structures, comprising: an array of thermal sensors, each for providing a sensor signal output representative of the amount of thermal radiation incident to the sensor; a circuit substrate having disposed on a substantially planar surface an array of signal contact pads for receiving the sensor signal outputs from the array of thermal sensors; an array of mesa structures, formed of a thermally insulating polymer material, projecting from the substantially planar surface of said circuit substrate, at least one being disposed adjacent each signal contact pad; and for each mesa structure disposed adjacent a signal contact pad, a contoured mesa conductor, extending from the top of the mesa down the sidewalls to cover the adjacent area of said circuit substrate including said corresponding signal contact pad, for providing a signal path between the top of said mesa structure and a respective contact pad; said thermal sensor array being disposed over said circuit substrate in contact with said array of thermally insulating mesa structures such that, for each thermal sensor, the sensor signal output is coupled through a respective mesa conductor to the associated contact pad.
Claim 2
Dependent Claim
195 words
A thermal imaging system including an array of thermally insulating mesa structures, comprising: an array of thermal sensors, each for providing a sensor signal output representative of the amount of thermal radiation incident to the sensor; a circuit substrate having disposed on a substantially planar surface an array of signal contact pads for receiving the sensor signal outputs from the array of thermal sensors; an array of mesa structures, formed of a thermally insulating polymer material, projecting from the substantially planar surface of said circuit substrate, at least one being disposed adjacent each signal contact pad; and for each mesa structure disposed adjacent a signal contact pad, a contoured mesa conductor, extending from the top of the mesa down the sidewalls to cover the adjacent area of said circuit substrate including said corresponding signal contact pad, for providing a signal path between the top of said mesa structure and a respective contact pad; said thermal sensor array being disposed over said circuit substrate in contact with said array of thermally insulating mesa structures such that, for each thermal sensor, the sensor signal output is coupled through a respective mesa conductor to the associated contact pad.
Claim 3
Dependent Claim
25 words
The system of Claim 1, wherein said array of thermal sensors comprises an array of individual thermal sensor elements, each including a thermal radiation absorber.
Claim 4
Dependent Claim
11 words
The system of Claim 1, wherein the polymer material comprises polyimide.
Claim 5
Dependent Claim
34 words
The system of Claim 3, wherein the polyimide is photosensitive such that said mesa structures can be formed by depositing a polyimide layer over said circuit substrate, and then exposing and developing the polyimide.
Claim 6
Dependent Claim
39 words
The system of Claim 1, wherein said mesa conductor is formed by inducing conductivity in the mesa itself by adding appropriated dopants, said mesa structure being configured to cover at least a portion of said adjacent signal contact pad.
Claim 7
Dependent Claim
17 words
The system of Claim 1, wherein said mesa conductor is flexibly deformable, thereby compensating for topological variations.
Claim 8
Dependent Claim
168 words
A thermal imaging system including an array of thermally insulating mesa structures, comprising: an array of thermal sensors, each for providing a sensor signal output representative of the amount of thermal radiation incident to the sensor; a circuit substrate having disposed on a substantially planar surface an array of signal contact pads for receiving the sensor signal outputs from the array of thermal sensors; an array of polyimide mesa structures, formed of photosensitive polyimide material, projecting from the substantially planar surface of said circuit substrate, at least one being disposed adjacent each signal contact pad; and for each mesa structure disposed adjacent a signal contact pad, a mesa conductor for providing a signal path between the top of said mesa structure and a respective contact pad; said thermal sensor array being disposed over said circuit substrate in contact with said array of thermally insulating mesa structures such that, for each thermal sensor, the sensor signal output is coupled through a respective mesa conductor to the associated contact pad.
Claim 9
Dependent Claim
168 words
A thermal imaging system including an array of thermally insulating mesa structures, comprising: an array of thermal sensors, each for providing a sensor signal output representative of the amount of thermal radiation incident to the sensor; a circuit substrate having disposed on a substantially planar surface an array of signal contact pads for receiving the sensor signal outputs from the array of thermal sensors; an array of polyimide mesa structures, formed of photosensitive polyimide material, projecting from the substantially planar surface of said circuit substrate, at least one being disposed adjacent each signal contact pad; and for each mesa structure disposed adjacent a signal contact pad, a mesa conductor for providing a signal path between the top of said mesa structure and a respective contact pad; said thermal sensor array being disposed over said circuit substrate in contact with said array of thermally insulating mesa structures such that, for each thermal sensor, the sensor signal output is coupled through a respective mesa conductor to the associated contact pad.
Claim 10
Dependent Claim
25 words
The system of Claim 7, wherein said array of thermal sensors comprises an array of individual thermal sensor elements, each including a thermal radiation absorber.
Claim 11
Dependent Claim
35 words
The system of Claim 7, wherein each mesa conductor comprises a strip of conductive material extending from the top of the mesa down a sidewall to said adjacent signal contact pad on said circuit substrate.
Claim 12
Dependent Claim
16 words
The system of Claim 9, wherein each thermally insulating mesa structure is configured with sloped sidewalls.
Claim 13
Dependent Claim
43 words
The system of Claim 1, wherein each mesa conductor comprises a contoured layer of conductive material extending from the top mesa down the sidewalls to cover the area of said circuit substrate adjacent said mesa structure, including to said adjacent signal contact pad.
Claim 14
Dependent Claim
39 words
The system of Claim 7, wherein said mesa conductor is formed by inducing conductivity in the mesa itself by adding appropriated dopants, said mesa structure being configured to cover at least a portion of said adjacent signal contact pad.
Claim 15
Dependent Claim
30 words
The system of Claim 7, wherein the photosensitive polyimide mesa structures can be formed by depositing a polyimide layer over said circuit substrate, and then exposing and developing the polyimide.
Claim 16
Dependent Claim
175 words
A thermal imaging system including an array of thermally insulating mesa structures, comprising: an array of thermal sensors, each for providing a sensor signal output representative of the amount of thermal radiation incident to the sensor; a circuit substrate having disposed on a substantially planar surface an array of signal contact pads for receiving the sensor signal outputs from the array of thermal sensors; an array of mesa structures, formed of a thermally insulating polymer material, projecting from the substantially planar surface of said circuit substrate, at least one being disposed adjacent to, and covering at least a portion of, each signal contact pad; and each mesa structure disposed a signal contact pad being doped conductive for providing a signal path between the top of said mesa structure and a respective contact pad; said thermal sensor array being disposed over said circuit substrate in contact with said array of thermally insulating mesa structures such that, for each thermal sensor, the sensor signal output is coupled through a respective mesa conductor to the associated contact pad.
Claim 17
Dependent Claim
175 words
A thermal imaging system including an array of thermally insulating mesa structures, comprising: an array of thermal sensors, each for providing a sensor signal output representative of the amount of thermal radiation incident to the sensor; a circuit substrate having disposed on a substantially planar surface an array of signal contact pads for receiving the sensor signal outputs from the array of thermal sensors; an array of mesa structures, formed of a thermally insulating polymer material, projecting from the substantially planar surface of said circuit substrate, at least one being disposed adjacent to, and covering at least a portion of, each signal contact pad; and each mesa structure disposed a signal contact pad being doped conductive for providing a signal path between the top of said mesa structure and a respective contact pad; said thermal sensor array being disposed over said circuit substrate in contact with said array of thermally insulating mesa structures such that, for each thermal sensor, the sensor signal output is coupled through a respective mesa conductor to the associated contact pad.
Claim 18
Dependent Claim
25 words
The system of Claim 14, wherein said array of thermal sensors comprises an array of individual thermal sensor elements, each including a thermal radiation absorber.
Claim 19
Dependent Claim
35 words
The system of Claim 14, wherein each mesa conductor comprises a strip of conductive material extending from the top of the mesa down a sidewall to said adjacent signal contact pad on said circuit substrate.
Claim 20
Dependent Claim
16 words
The system of Claim 14, wherein each thermally insulating mesa structure is configured with sloped sidewalls.
Claim 21
Dependent Claim
43 words
The system of Claim 14, wherein each mesa conductor comprises a contoured layer of conductive material extending from the top mesa down the sidewalls to cover the area of said circuit substrate adjacent said mesa structure, including to said adjacent signal contact pad.
Claim 22
Dependent Claim
11 words
The system of Claim 14, wherein the polymer material comprises polyimide.
Claim 23
Dependent Claim
34 words
The system of Claim 19, wherein the polyimide is photosensitive such that said mesa structures can be formed by depositing a polyimide layer over said circuit substrate, and then exposing and developing the polyimide.
Claim 24
Dependent Claim
17 words
The system of Claim 14, wherein said mesa structure is flexibly deformable, thereby compensating for topological variations.
References Cited (Backward Citations)
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