US5550404A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrically programmable antifuse having stair aperture
Assignee: Microsemi SoC Corp
•
Filing: 1994-08-10
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Granted: 1996-08-27
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Expires: 2014-08-10
Abstract
Abstract An antifuse comprises a lower electrode and an upper electrode separated by an interlayer dielectric. An antifuse cell opening is disposed in the interlayer dielectric. The antifuse cell opening comprises at least two steps, wherein a first portion thereof has a first area and a second portion thereof disposed above the first portion has a second area larger than said first area. Additional portions may be provided above the second portion having successively larger areas if the thickness of the interlayer dielectric warrants their inclusion.
Inventors
- 👤 Yeouchung Yen
- 👤 Shih-Oh Chen
- 👤 Hung-Kwei Hu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:51
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
119 words
An antifuse including: a lower electrode; an interlayer dielectric layer disposed over said lower electrode, said interlayer dielectric layer including an antifuse cell opening formed therein, said antifuse cell opening having a first area in a lower portion of said interlayer dielectric layer, and a second area larger than said first area, said second area defined by a first step in an upper portion of said interlayer dielectric layer, said first area exposing a portion of said lower electrode; a layer of antifuse material disposed in said antifuse cell opening and in contact with said lower electrode and said interlayer dielectric layer; and an upper electrode in contact with an entire upper surface of said layer of antifuse material.
Claim 2
Dependent Claim
119 words
An antifuse including: a lower electrode; an interlayer dielectric layer disposed over said lower electrode, said interlayer dielectric layer including an antifuse cell opening formed therein, said antifuse cell opening having a first area in a lower portion of said interlayer dielectric layer, and a second area larger than said first area, said second area defined by a first step in an upper portion of said interlayer dielectric layer, said first area exposing a portion of said lower electrode; a layer of antifuse material disposed in said antifuse cell opening and in contact with said lower electrode and said interlayer dielectric layer; and an upper electrode in contact with an entire upper surface of said layer of antifuse material.
Claim 3
Dependent Claim
38 words
The antifuse of claim 1 wherein said antifuse cell opening further includes a third area larger than said second area, said third area defined by a second step over a third thickness disposed immediately above said second thickness.
Claim 4
Dependent Claim
26 words
The antifuse of claim 1 wherein said lower electrode comprises a diffused region in a semiconductor substrate and said upper electrode comprises a layer of polysilicon.
Claim 5
Dependent Claim
29 words
The antifuse of claim 1 wherein said lower electrode comprises a diffused region in a semiconductor substrate and said upper electrode comprises a portion of a metal interconnect line.
Claim 6
Dependent Claim
34 words
The antifuse of claim 1 wherein said lower electrode comprises a portion of a first metal interconnect line in a microcircuit and said upper electrode comprises a portion of a second metal interconnect line.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-27 | 2000-02-26 | 2000-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-27 | 2004-02-26 | 2004-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-27 | 2008-02-26 | 2008-08-27 | $7700.00 | Window Closed / Lapsed |