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US5503875A
Expired / Lapsed
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Film forming method wherein a partial pressure of a reaction byproduct in a processing container is reduced temporarily
Assignee: Tokyo Electron Ltd
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Filing: 1994-03-17
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Granted: 1996-04-02
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Expires: 2014-03-17
Abstract
Abstract A film is formed on a substrate by supplying a plurality of processing gases into a processing container and forming the film on the substrate from the processing gases while exhausting a portion of the gases out of the processing container. Before a partial pressure of a byproduct in the processing container produced through chemical reaction of the processing gases reaches an equilibrium state, the partial pressure of the byproduct in the processing container is temporarily reduced by temporarily suppressing or stopping the supply of at least one of the processing gases into the processing container and exhausting gas from the processing container.
Inventors
- 👤 Masayuki Imai
- 👤 Toshiharu Nishimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:04
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4412; C23C16/455; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4584
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
106 words
A method for creating a film-formation processing atmosphere, comprising the steps of: providing a film on a substrate in a processing container by supplying a plurality of processing gases into the processing container and forming the film from the processing gases on a surface of the substrate while exhausting a portion of the gases out of the processing container at all times; and before a partial pressure of a byproduct in the processing container produced through a chemical reaction of the processing gases reaches an equilibrium state, performing a partial pressure reducing step which temporarily reduces the partial pressure of the byproduct in the processing container.
Claim 2
Independent Claim
106 words
A method for creating a film-formation processing atmosphere, comprising the steps of: providing a film on a substrate in a processing container by supplying a plurality of processing gases into the processing container and forming the film from the processing gases on a surface of the substrate while exhausting a portion of the gases out of the processing container at all times; and before a partial pressure of a byproduct in the processing container produced through a chemical reaction of the processing gases reaches an equilibrium state, performing a partial pressure reducing step which temporarily reduces the partial pressure of the byproduct in the processing container.
Claim 3
Dependent Claim
24 words
The method according to claim 1, wherein the partial pressure reducing step is intermittently performed until the film formation on the substrate is completed.
Claim 4
Dependent Claim
38 words
The method according to claim 1, wherein the partial pressure reducing step is performed by temporarily suppressing the supply of at least one of the processing gases into the processing container and exhausting gas from the processing container.
Claim 5
Dependent Claim
37 words
The method according to claim 3, wherein the suppression of the supply of at least one of the processing gases in the partial pressure reducing step includes stopping the supply of the at least one processing gas.
Claim 6
Dependent Claim
27 words
The method according to claim 1, wherein the supply of all the processing gases into the processing container is stopped temporarily, after the partial pressure reducing step.
References Cited (Backward Citations)
US4279947A
Cited
US4395438A
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US4699825A
Cited
US5037775A
Cited
US4992299A
Cited
US5308655A
Cited
US5201995A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-02 | 1999-10-02 | 2000-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-02 | 2003-10-02 | 2004-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-02 | 2007-10-02 | 2008-04-02 | $7700.00 | Window Closed / Lapsed |