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US5485032A Expired / Lapsed US ⏱️ 0.0 years remaining

Antifuse element with electrical or optical programming

Assignee: International Business Machines Corp
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Filing: 1994-12-08
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Granted: 1996-01-16
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Expires: 2014-12-08
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Abstract

Abstract A programmable antifuse element comprising adjacent bodies of germanium and aluminum or aluminum allow form a low resistance connection of good mechanical and thermal properties when heated to a temperature where alloying of the aluminum and germanium occurs. Heating for the purpose of programming the antifuse element can be done by electrical resistance heating in the-germanium, which may be doped to achieve a desired resistance value, or by laser irradiation. Due to the high resistance of intrinsic or lightly doped germanium, a resistance change ratio of greater than 10,000:1 is achieved.

Inventors

  • 👤 Dominic J. Schepis
  • 👤 Kris V. Srikrishnan
  • 👤 Seshadri Subbanna
  • 👤 Manu J. Tejwani

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 22:07
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491; H10W20/492; H10W20/01; H10W20/031; H10W20/064; H10W20/065; H10W20/067; H10W20/068; Y; Y10; Y10S; Y10S438/00; Y10S438/933

Claims Analysis

Total Claims: 21
Claim 1
Independent Claim 53 words
An integrated circuit including at least two conductors, and a programmable connector means for selectively alloying aluminum with germanium extending between said at least two conductors, said programmable connector means including a body of germanium adjacent a body containing aluminum and forming a source of aluminum for alloying with said body of germanium.
Claim 2
Dependent Claim 53 words
An integrated circuit including at least two conductors, and a programmable connector means for selectively alloying aluminum with germanium extending between said at least two conductors, said programmable connector means including a body of germanium adjacent a body containing aluminum and forming a source of aluminum for alloying with said body of germanium.
Claim 3
Dependent Claim 67 words
An antifuse element comprising at least two conductors, and a programmable means for selectively alloying aluminum with germanium extending between said at least two conductors, said programmable means including at least one body containing aluminum and a body containing germanium adjacent said at least one body of aluminum, at least one said body containing aluminum forming a source of aluminum for alloying with said body of germanium.
Claim 4
Dependent Claim 67 words
An antifuse element comprising at least two conductors, and a programmable means for selectively alloying aluminum with germanium extending between said at least two conductors, said programmable means including at least one body containing aluminum and a body containing germanium adjacent said at least one body of aluminum, at least one said body containing aluminum forming a source of aluminum for alloying with said body of germanium.
Claim 5
Dependent Claim 16 words
An antifuse element as recited in claim 2, wherein said body of germanium is lightly doped.
Claim 6
Dependent Claim 27 words
An antifuse element as recited in claim 2, wherein said body of germanium is formed as a stud by deposition in a via in an insulative layer.
Claim 7
Dependent Claim 18 words
An antifuse element as recited in claim 4, further including a layer of tungsten deposited in said via.
Claim 8
Dependent Claim 18 words
An antifuse element as recited in claim 4, further including a layer of aluminum deposited in said via.
Claim 9
Dependent Claim 19 words
An antifuse element as recited in claim 2, wherein said at least one body containing aluminum is a connector.
Claim 10
Dependent Claim 16 words
An integrated circuit as recited in claim 1, wherein said body of germanium is lightly doped.
Claim 11
Dependent Claim 27 words
An integrated circuit as recited in claim 1, wherein said body of germanium is formed as a stud by deposition in a via in an insulative layer.
Claim 12
Dependent Claim 18 words
An integrated circuit as recited in claim 9, further including a layer of tungsten deposited in said via.
Claim 13
Dependent Claim 18 words
An integrated circuit as recited in claim 9, further including a layer of aluminum deposited in said via.
Claim 14
Dependent Claim 16 words
An integrated circuit as recited in claim 1, wherein said body containing aluminum is a connector.
Claim 15
Dependent Claim 55 words
An antifuse element comprising at least two conductors, a programmable connector means for selectively alloying aluminum with germanium in a via extending between said at least two conductors, said programmable connector means including a body of germanium adjacent a body containing aluminum and forming a source of aluminum for alloying with said body of germanium.
Claim 16
Dependent Claim 55 words
An antifuse element comprising at least two conductors, a programmable connector means for selectively alloying aluminum with germanium in a via extending between said at least two conductors, said programmable connector means including a body of germanium adjacent a body containing aluminum and forming a source of aluminum for alloying with said body of germanium.
Claim 17
Dependent Claim 16 words
An antifuse element as recited in claim 13, wherein said body of germanium is lightly doped.
Claim 18
Dependent Claim 27 words
An antifuse element as recited in claim 13, wherein said body of germanium is formed as a stud by deposition in said via in an insulative layer.
Claim 19
Dependent Claim 18 words
An antifuse element as recited in claim 15, further including a layer of tungsten deposited in said via.
Claim 20
Dependent Claim 18 words
An antifuse element as recited in claim 15, further including a layer of aluminum deposited in said via.
Claim 21
Dependent Claim 16 words
An antifuse element as recited in claim 13, wherein said body containing aluminum is a connector.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-01-15 1999-07-17 2000-01-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-01-15 2003-07-17 2004-01-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-01-15 2007-07-17 2008-01-16 $7700.00 Window Closed / Lapsed

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