US5314840A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming an antifuse element with electrical or optical programming
Assignee: International Business Machines Corp
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Filing: 1992-12-18
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Granted: 1994-05-24
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Expires: 2012-12-18
Abstract
Abstract A programmable antifuse element comprising adjacent bodies of germanium and aluminum or aluminum alloy form forming a low resistance connection of good mechanical and thermal properties when heated to a temperature where alloying of the aluminum and germanium occurs. Heating for the purpose of programming the antifuse element can be done by electrical resistance heating in the germanium, which may be doped to achieve a desired resistance value, or by laser irradiation. Due to the high resistance of intrinsic or lightly doped germanium, a resistance change ratio of greater than 10,000:1 is achieved.
Inventors
- 👤 Dominic J. Schepis
- 👤 Kris V. Srikrishnan
- 👤 Seshardi Subbanna
- 👤 Manu J. Tijwani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 03:32
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491; H10W20/492; H10W20/01; H10W20/031; H10W20/064; H10W20/065; H10W20/067; H10W20/068; Y; Y10; Y10S; Y10S438/00; Y10S438/933
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
66 words
A method of fabricating a programmable connection including the steps of depositing a body containing aluminum, depositing a body of germanium adjacent said body of aluminum, and selectively heating at least a portion of each of said bodies of germanium and aluminum to a temperature in excess of approximately 420° C. to cause diffusion of said portion of each of said bodies of germanium and aluminum.
Claim 2
Independent Claim
66 words
A method of fabricating a programmable connection including the steps of depositing a body containing aluminum, depositing a body of germanium adjacent said body of aluminum, and selectively heating at least a portion of each of said bodies of germanium and aluminum to a temperature in excess of approximately 420° C. to cause diffusion of said portion of each of said bodies of germanium and aluminum.
Claim 3
Dependent Claim
18 words
A method as recited in claim 1, wherein said heating step is performed with a carbon dioxide laser.
Claim 4
Dependent Claim
39 words
A method as recited in claim 1, including the further step of forming a via and wherein said step of depositing said body of germanium and said step of depositing said body containing aluminum form bodies within said via.
Claim 5
Dependent Claim
17 words
A method as recited in claim 1, including the further step of depositing a body of tungsten.
Claim 6
Dependent Claim
39 words
A method as recited in claim 1, including the further step of forming a via and wherein said step of depositing said body of germanium and said step of depositing said body containing aluminum form bodies within said via.
Claim 7
Dependent Claim
17 words
A method as recited in claim 5, including the further step of depositing a body of tungsten.
Claim 8
Independent Claim
73 words
A method of fabricating a programmable connection including the steps of depositing a body containing aluminum, depositing a body of germanium adjacent said body of aluminum, doping said body of germanium to reach a resistance value range suitable for electrical resistance heating, and selectively alloying at least a portion of said body of germanium with at least a portion of said body containing aluminum by electrical resistance heating of said body of germanium.
Claim 9
Independent Claim
73 words
A method of fabricating a programmable connection including the steps of depositing a body containing aluminum, depositing a body of germanium adjacent said body of aluminum, doping said body of germanium to reach a resistance value range suitable for electrical resistance heating, and selectively alloying at least a portion of said body of germanium with at least a portion of said body containing aluminum by electrical resistance heating of said body of germanium.
Claim 10
Dependent Claim
17 words
A method as recited in claim 7, including the further step of depositing a body of tungsten.
Claim 11
Dependent Claim
39 words
A method as recited in claim 7, including the further step of forming a via and wherein said step of depositing said body of germanium and said step of depositing said body containing aluminum form bodies within said via.
Claim 12
Dependent Claim
17 words
A method as recited in claim 9, including the further step of depositing a body of tungsten.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-23 | 1997-11-22 | 1998-05-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-23 | 2001-11-22 | 2002-05-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-23 | 2005-11-22 | 2006-05-24 | $7700.00 | Window Closed / Lapsed |