Patent US5482559A successfully refreshed from Google Patents.
← Back to Patent Explorer
US5482559A Expired / Lapsed US ⏱️ 0.0 years remaining

Heat treatment boat

Assignee: Tokyo Electron Ltd
•
Filing: 1995-04-28
•
Granted: 1996-01-09
•
Expires: 2015-04-28
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A heat treatment boat for mounting a number of disc-shaped objects to be treated at a vertical interval for heat treatment thereof in a vertical heat treatment furnace comprises arcuate or ring-shaped support members provided on support rods at a vertical interval for supporting the objects to be treated in surface contact with the undersides of peripheral parts of the objects to be treated. The heat treatment boat is disposed on a ring-shaped intermediate member of high radiant heat absorption disposed on a heat insulating cylinder. The heat treatment boat comprises support rods which are planted on an annular support member circumferentially in accordance with a contour of the objects to be treated and whose upper ends are secured to an annular fixation member. The heat treatment boat of such constitution can reduce occurrences of slips in the disc-shaped objects when heat treated.

Inventors

  • 👤 Masayuki Imai
  • 👤 Takeshi Kurebayashi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 02:29
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/14; H; H10; H10P; H10P72/00; H10P72/10; H10P72/12; H10P72/127

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 82 words
A heat treatment boat disposed on a heat insulating unit of a heat insulating material, and mounting a number of disc-shaped objects to be treated at a vertical interval on a plurality of erected support rods for heat treatment in a vertical heat treatment furnace, the heat treatment boat comprising: an annular support member for supporting the lower ends of the support rods; and an annular fixation member for positioning the upper ends of the support rods with respect to each other.
Claim 2
Dependent Claim 82 words
A heat treatment boat disposed on a heat insulating unit of a heat insulating material, and mounting a number of disc-shaped objects to be treated at a vertical interval on a plurality of erected support rods for heat treatment in a vertical heat treatment furnace, the heat treatment boat comprising: an annular support member for supporting the lower ends of the support rods; and an annular fixation member for positioning the upper ends of the support rods with respect to each other.
Claim 3
Dependent Claim 37 words
The heat treatment boat according to claim 1, wherein a heat conduction restricting region is supported by a plurality of islands of narrow and small cross section between the heat insulating unit and the heat treatment boat.
Claim 4
Dependent Claim 42 words
The heat treatment boat according to claim 1, wherein a heat conduction restricting region supported by a plurality of islands of narrow and small section cross between the heat insulating unit and a cap body for closing the throat of the furnace.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-01-08 1999-07-10 2000-01-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-01-08 2003-07-10 2004-01-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-01-08 2007-07-10 2008-01-09 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag