Method for forming a high density EEPROM cell array with improved access time

Claim 1

A method of fabricating an electrically-erasable, programmable read-only-memory (EEPROM) array having segment select transistors, the method comprising: providing a semiconductor material having a plurality of adjacent segment select regions and a plurality of adjacent array regions arranged so that one array region is located between and adjoins each pair of adjacent segment select regions; forming a plurality of spaced-part strips of first field oxide on the semiconductor material so that a portion of each strip is formed in each segment select region and in each array region, each pair of adjacent strips of first field oxide in each array region defining an active device region therebetween; forming a plurality of bit lines in the semiconductor material in each pair of adjacent segment select regions and the adjoining array region located therebetween so that a pair of bit lines are formed between each pair of adjacent strips of first field oxide, and so that one bit line is formed adjacent to each strip of first field oxide; forming a layer of second field oxide on the semiconductor material over each bit line; defining a plurality of spaced-apart first channel regions in each active device region; forming a layer of first gate dielectric material on the semiconductor material, the layer of first gate dielectric material having a plurality of tunnel openings in each array region which are positioned so that each tunnel opening overlies a portion of one first channel region; forming a layer of tunnel dielectric material in each tunnel opening of the layer of first gate dielectric material; forming a layer of first conductive material over the layer of first gate dielectric material and the layer of tunnel dielectric material; forming a layer of intermediate dielectric material over the layer of first conductive material; etching the layer of intermediate dielectric material and the layer of first conductive material to define a plurality of strips of dielectric/conductive material in each array region so that each strip of dielectric/conductive material is formed over one active device region; removing the layer of first gate dielectric from each of the segment select regions; defining a plurality of second channel regions in each segment select region; forming a layer of second gate dielectric material over the semiconductor material in each of the segment select regions; forming a layer of second conductive material over each segment select region and over each array region; etching the layer of second conductive material to form segment select lines in each segment select region, and to form word lines in each array region; etching the layer of intermediate dielectric material and the layer of first conductive material to form a plurality of floating gate memory cells in each array region; and forming a drain region and a source region on opposite sides of each segment select line in each segment select region so that each bit line is contacted by a source region.

Claim 2

A method of fabricating an electrically-erasable, programmable read-only-memory (EEPROM) array having segment select transistors, the method comprising: providing a semiconductor material having a plurality of adjacent segment select regions and a plurality of adjacent array regions arranged so that one array region is located between and adjoins each pair of adjacent segment select regions; forming a plurality of spaced-part strips of first field oxide on the semiconductor material so that a portion of each strip is formed in each segment select region and in each array region, each pair of adjacent strips of first field oxide in each array region defining an active device region therebetween; forming a plurality of bit lines in the semiconductor material in each pair of adjacent segment select regions and the adjoining array region located therebetween so that a pair of bit lines are formed between each pair of adjacent strips of first field oxide, and so that one bit line is formed adjacent to each strip of first field oxide; forming a layer of second field oxide on the semiconductor material over each bit line; defining a plurality of spaced-apart first channel regions in each active device region; forming a layer of first gate dielectric material on the semiconductor material, the layer of first gate dielectric material having a plurality of tunnel openings in each array region which are positioned so that each tunnel opening overlies a portion of one first channel region; forming a layer of tunnel dielectric material in each tunnel opening of the layer of first gate dielectric material; forming a layer of first conductive material over the layer of first gate dielectric material and the layer of tunnel dielectric material; forming a layer of intermediate dielectric material over the layer of first conductive material; etching the layer of intermediate dielectric material and the layer of first conductive material to define a plurality of strips of dielectric/conductive material in each array region so that each strip of dielectric/conductive material is formed over one active device region; removing the layer of first gate dielectric from each of the segment select regions; defining a plurality of second channel regions in each segment select region; forming a layer of second gate dielectric material over the semiconductor material in each of the segment select regions; forming a layer of second conductive material over each segment select region and over each array region; etching the layer of second conductive material to form segment select lines in each segment select region, and to form word lines in each array region; etching the layer of intermediate dielectric material and the layer of first conductive material to form a plurality of floating gate memory cells in each array region; and forming a drain region and a source region on opposite sides of each segment select line in each segment select region so that each bit line is contacted by a source region.