US5401983A — Processes for lift-off of thin film materials or …

Claim 1

Independent Claim 117 words

A micromechanical device for providing efficient steerable optical coupling with integrated circuitry, comprising: a movable platform supported by legs on a substrate, said substrate having a substrate electrode, said platform having a bottom electrode, and wherein said platform is moved by applying a first electrical source between said substrate electrode and said bottom electrode; and a photonic device residing on said platform and movable therewith, said photonic device being created on a growth substrate remote from said movable platform and subsequently bonded to said movable platform, said photonic device having a top electrode thereon, said photonic device serving as a light interface when a second electrical source is applied between said top electrode and said bottom electrode.

Claim 2

Dependent Claim 117 words

A micromechanical device for providing efficient steerable optical coupling with integrated circuitry, comprising: a movable platform supported by legs on a substrate, said substrate having a substrate electrode, said platform having a bottom electrode, and wherein said platform is moved by applying a first electrical source between said substrate electrode and said bottom electrode; and a photonic device residing on said platform and movable therewith, said photonic device being created on a growth substrate remote from said movable platform and subsequently bonded to said movable platform, said photonic device having a top electrode thereon, said photonic device serving as a light interface when a second electrical source is applied between said top electrode and said bottom electrode.

Claim 3

Dependent Claim 77 words

A resonant cavity device, comprising: an active region having a first side and a second side; a first mirror layer situated adjacent to said first side, said first mirror layer being deposited after said active region is deposited on a first substrate; and a second mirror layer situated adjacent to said second side, said second mirror layer being deposited after the combination of said active region and said first mirror layer are bonded to a second substrate.

Claim 4

Dependent Claim 77 words

A resonant cavity device, comprising: an active region having a first side and a second side; a first mirror layer situated adjacent to said first side, said first mirror layer being deposited after said active region is deposited on a first substrate; and a second mirror layer situated adjacent to said second side, said second mirror layer being deposited after the combination of said active region and said first mirror layer are bonded to a second substrate.

Claim 5

Dependent Claim 29 words

The micromechanical device of claim 1, wherein said photonic device is created on a growth substrate remote from said movable platform and is subsequently placed onto said movable platform.

Claim 6

Dependent Claim 86 words

The micromechanical device of claim 1, wherein said photonic device is created and disposed on said platform by the following steps: depositing said photonic device onto a sacrificial layer situated on a growth substrate; coating said photonic device with a carrier layer; removing said sacrificial layer to release the combination of said photonic device and said carrier layer from said growth substrate; positioning said photonic device on a transfer medium; removing said carrier layer; and bonding said photonic device to said platform from said transfer medium.

Claim 7

Dependent Claim 15 words

The micromechanical device of claim 1, wherein said photonic device comprises thin film semiconductor layers.

Claim 8

Dependent Claim 23 words

The micromechanical device of claim 1, wherein said photonic device comprises In x Ga 1-x As y P 1-y where 0<x<1 and 0<y<1.

Claim 9

Dependent Claim 29 words

The micromechanical device of claim 1, wherein said substrate comprises silicon and wherein said photonic device comprises In x Ga 1-x As y P 1-y where 0<x<1 and 0<y<1.

Claim 10

Dependent Claim 15 words

The micromechanical device of claim 1, wherein said legs of said movable platform comprise polyimide.

Claim 11

Dependent Claim 24 words

The micromechanical device of claim 1, wherein said movable platform comprises a rectangular platform surface supported by legs at corners of the rectangular surface.

Claim 12

Dependent Claim 15 words

The micromechanical device of claim 1, wherein said photonic device is a resonant cavity device.

Claim 13

Dependent Claim 60 words

The micromechanical device of claim 9, further comprising a plurality of bottom electrodes situated on said substrate and capable of receiving charge from said first electrical source, whereby said bottom electrodes are selectively activated by said first electrical source so that said platform is selectively moved as the electric field between said bottom electrodes and said substrate electrode is changed.

Claim 14

Dependent Claim 74 words

A micromechanical device for interfacing light with an electronic circuit, comprising: a platform supported by legs on a substrate; means for moving said platform; and a photonic device residing on said platform and movable with said platform, said photonic device connected to a circuit and serving as a light interface to said circuit, said photonic device being created on a growth substrate remote from said movable platform and subsequently bonded to said movable platform.

Claim 15

Dependent Claim 74 words

A micromechanical device for interfacing light with an electronic circuit, comprising: a platform supported by legs on a substrate; means for moving said platform; and a photonic device residing on said platform and movable with said platform, said photonic device connected to a circuit and serving as a light interface to said circuit, said photonic device being created on a growth substrate remote from said movable platform and subsequently bonded to said movable platform.

Claim 16

Dependent Claim 15 words

The resonant cavity device of claim 2, wherein said active region comprises a diode configuration.

Claim 17

Dependent Claim 25 words

The resonant cavity device of claim 2, wherein said first mirror layer comprises In x Ga 1-x As y P 1-y where 0<x<1 and 0<y<1.

Claim 18

Dependent Claim 25 words

The resonant cavity device of claim 2, wherein said second mirror layer comprises In x Ga 1-x As y P 1-y where 0<x<1 and 0<y<1.

Claim 19

Dependent Claim 34 words

The resonant cavity device of claim 2, further comprising first and second metal layers disposed on said first and second mirror layers respectively and situated at opposing outer ends of said resonant cavity device.

Claim 20

Dependent Claim 14 words

The resonant cavity device of claim 2, wherein said active region emits a signal.

Claim 21

Dependent Claim 14 words

The resonant cavity device of claim 2, wherein said active region detects a signal.

Claim 22

Dependent Claim 14 words

The resonant cavity device of claim 2, wherein said active region modulates a signal.

Claim 23

Dependent Claim 105 words

A resonant cavity configuration, comprising: a host substrate; and a resonant cavity device bonded to said host substrate, said resonant cavity device comprising an active region having a first side and a second side, a first mirror layer situated adjacent to said first side, and a second mirror layer situated adjacent to said second side, said active region and said first mirror layer being formed on a remote growth substrate and subsequently bonded to said host substrate, said second mirror layer being formed on said active region after the combination of said active region and said first mirror layer are deposited on said host substrate.

Claim 24

Dependent Claim 105 words

A resonant cavity configuration, comprising: a host substrate; and a resonant cavity device bonded to said host substrate, said resonant cavity device comprising an active region having a first side and a second side, a first mirror layer situated adjacent to said first side, and a second mirror layer situated adjacent to said second side, said active region and said first mirror layer being formed on a remote growth substrate and subsequently bonded to said host substrate, said second mirror layer being formed on said active region after the combination of said active region and said first mirror layer are deposited on said host substrate.

Claim 25

Dependent Claim 25 words

The micromechanical device of claim 1, wherein said moveable platform comprises a generally square platform surface supported by legs at corners of said platform surface.

Claim 26

Dependent Claim 12 words

The micromechanical device of claim 1, wherein said substrate electrode comprises gold.

Claim 27

Dependent Claim 12 words

The micromechanical device of claim 1, wherein said bottom electrode comprises AuZn/Au.

Claim 28

Dependent Claim 13 words

The micromechanical device of claim 1, wherein said photonic device emits a signal.

Claim 29

Dependent Claim 13 words

The micromechanical device of claim 1, wherein said photonic device detects a signal.

Claim 30

Dependent Claim 13 words

The micromechanical device of claim 1, wherein said photonic device modulates a signal.

Claim 31

Dependent Claim 12 words

The micromechanical device of claim 4, wherein said sacrificial layer is AlAs.

Claim 32

Dependent Claim 12 words

The micromechanical device of claim 4, wherein said growth substrate is GaAs.

Claim 33

Dependent Claim 15 words

The micromechanical device of claim 4, wherein said carrier layer is Apiezon W black wax.

Claim 34

Dependent Claim 17 words

The micromechanical device of claim 4, wherein said sacrificial layer is removed by immersion in 10% HF.

Claim 35

Dependent Claim 16 words

The micromechanical device of claim 5, wherein said thin film semiconductor layers comprise a crystalline material.

Claim 36

Dependent Claim 25 words

The micromechanical device of claim 21, wherein said platform surface measures 360 micrometers by 360 micrometers and said legs have a width of 20 micrometers.

Claim 37

Dependent Claim 27 words

The micromechanical device of claim 21, wherein said square platform surface measures 200 micrometers by 200 micrometers and wherein said legs have a width of 40 micrometers.

Claim 38

Dependent Claim 16 words

The micromechanical device of claim 32, wherein said photonic device measures 250 micrometers by 250 micrometers.

Claim 39

Dependent Claim 16 words

The micromechanical device of claim 33, wherein said photonic device measures 100 micrometers by 100 micrometers.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1998-03-27	1998-09-26	1999-03-28	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2002-03-27	2002-09-26	2003-03-28	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2006-03-27	2006-09-26	2007-03-28	$7700.00	Window Closed / Lapsed

Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices

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