US5397920A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light transmissive, electrically-conductive, oxide film and methods of production
Assignee: 3M Co
•
Filing: 1994-03-24
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Granted: 1995-03-14
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Expires: 2014-03-24
Abstract
Abstract A light transmissive, electrically conductive oxide comprising tin and a Group II element is doped with a Group III element and with one or more of hydrogen or fluorine. The oxide may be deposited by sputtering at a temperature in the range from 25 DEG to 350 DEG C., or by chemical vapor deposition at temperatures in the range from 80 DEG to 400 DEG C.
Inventors
- 👤 Nang T. Tran
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 12:32
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/20; H10F77/244; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/13439; H10F71/00; H10F71/138; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
38 words
A light transmissive, electrically-conductive oxide film comprising tin and a Group II element, said oxide film being doped with a Group III element and with a dopant selected from the group consisting of hydrogen, fluorine, and mixtures thereof.
Claim 2
Dependent Claim
38 words
A light transmissive, electrically-conductive oxide film comprising tin and a Group II element, said oxide film being doped with a Group III element and with a dopant selected from the group consisting of hydrogen, fluorine, and mixtures thereof.
Claim 3
Dependent Claim
27 words
The light transmissive, electrically-conductive oxide film of claim 1 wherein the Group III element is chosen from the group consisting of Al and B, or mixtures thereof.
Claim 4
Dependent Claim
96 words
A detector device comprising: a) a film comprising energy-sensitive material which generates an electrical signal upon exposure to electromagnetic radiation; b) a light transmissive, electrically-conductive layer in electrical contact with a side of said film; and c) connecting means in electrical contact with said light transmissive, electrically-conductive layer for connecting the device to an external circuit; wherein said light transmissive, electrically-conductive layer comprises an oxide comprising tin and a Group II element, said oxide being doped with a Group III element and with a dopant chosen from the group consisting of hydrogen, fluorine, and mixtures thereof.
Claim 5
Dependent Claim
96 words
A detector device comprising: a) a film comprising energy-sensitive material which generates an electrical signal upon exposure to electromagnetic radiation; b) a light transmissive, electrically-conductive layer in electrical contact with a side of said film; and c) connecting means in electrical contact with said light transmissive, electrically-conductive layer for connecting the device to an external circuit; wherein said light transmissive, electrically-conductive layer comprises an oxide comprising tin and a Group II element, said oxide being doped with a Group III element and with a dopant chosen from the group consisting of hydrogen, fluorine, and mixtures thereof.
Claim 6
Dependent Claim
15 words
The detector device of claim 3 wherein the energy-sensitive material is sensitive to visible light.
Claim 7
Dependent Claim
15 words
The detector device of claim 3 wherein the energy-sensitive material is sensitive to radiation energy.
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