US4990286A
Expired / Lapsed
US
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Zinc oxyfluoride transparent conductor
Assignee: Harvard University
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Filing: 1989-03-17
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Granted: 1991-02-05
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Expires: 2009-03-17
Abstract
Abstract Transparent, electrically conductive and infrared-reflective films of zinc oxyfluoride are produced by chemical vapor deposition from vapor mixtures of zinc, oxygen and fluorine-containing compounds. The substitution of fluorine for some of the oxygen in zinc oxide results in dramatic increases in the electrical conductivity. For example, diethyl zinc, ethyl alcohol and hexafluoropropene vapors are reacted over a glass surface at 400° C. to form a visibly transparent, electrically conductive, infrared reflective and ultraviolet absorptive film of zinc oxyfluoride. Such films are useful in liquid crystal display devices, solar cells, electrochromic absorbers and reflectors, energy-conserving heat mirrors, and antistatic coatings.
Inventors
- 👤 Roy G. Gordon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 12:49
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/30; H10F77/306; H10F77/311; H10F77/315; C; C01; C01G; C01G9/00; C01G9/04; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/407; G; G02; G02F; G02F1/00; G02F1/01; G02F1/0102; H01; H01B; H01B1/00; H01B1/06; H01B1/08; H05; H05B; H05B33/00; H05B33/12; H05B33/26; H05B33/28; H10F10/00; H10F10/10; H10F10/12; H10F71/00; H10F71/138; G02F1/15; G02F1/153; G02F1/1533; G02F2001/1536; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
18 words
A compound of the formula ZnO 1-x F x wherein x is in the range 0.001 to 0.1.
Claim 2
Dependent Claim
18 words
A compound of the formula ZnO 1-x F x wherein x is in the range 0.001 to 0.1.
Claim 3
Dependent Claim
14 words
The compound of claim 1 wherein x is in the range 0.002 to 0.02.
Claim 4
Dependent Claim
12 words
The compound of claim 1 wherein x is in the range 0.005-0.01.
Claim 5
Dependent Claim
12 words
The compound of claim 1 in the form of a film .
Claim 6
Dependent Claim
52 words
Process for making a compound of the formula ZnO 1-x F x wherein x is in the range 0.001 to 0.1 comprising forming a vapor mixture of volatile zinc-containing, oxygen-containing and fluorine-containing compounds; and exposing the vapor mixture to a heated substrate to deposit a film of the compound on the substrate.
Claim 7
Dependent Claim
52 words
Process for making a compound of the formula ZnO 1-x F x wherein x is in the range 0.001 to 0.1 comprising forming a vapor mixture of volatile zinc-containing, oxygen-containing and fluorine-containing compounds; and exposing the vapor mixture to a heated substrate to deposit a film of the compound on the substrate.
Claim 8
Dependent Claim
22 words
Process of claim 5 in which said volatile zinc-containing compound is dialkyl zinc, R 2 Zn, wherein R is a hydrocarbon radical.
Claim 9
Dependent Claim
13 words
Process of claim 6 in which said volatile zinc-containing compound is diethyl zinc.
Claim 10
Dependent Claim
13 words
Process of claim 6 in which said volatile oxygen-containing compound is an alcohol.
Claim 11
Dependent Claim
10 words
Process of claim 8 in which said alcohol is ethanol.
Claim 12
Dependent Claim
13 words
Process of claim 6 in which said volatile fluorine-containing compound is a fluorocarbon.
Claim 13
Dependent Claim
10 words
Process of claim 10 in which said fluorocarbon is hexafluoropropene.
Claim 14
Dependent Claim
13 words
Process of claim 6 in which said volatile fluorine-containing compound is nitrogen trifluoride.
Claim 15
Dependent Claim
17 words
Process of claim 6 wherein the film thickness is in the range of 50 to 1000 nanometers.
Claim 16
Dependent Claim
9 words
Process of claim 6 wherein the film is polycrystalline.
Claim 17
Dependent Claim
12 words
Process of claim 6 sustained at low pressure, 0.001 to 0.01 atmosphere.
Claim 18
Dependent Claim
9 words
Process of claim 6 sustained at about atmospheric pressure.
Claim 19
Dependent Claim
12 words
Compound of claim 1 which may be patterned using standard photolithographic techniques.
Claim 20
Dependent Claim
10 words
Liquid crystal display device incorporating the compound of claim 1.
Claim 21
Dependent Claim
8 words
Transparent electrode incorporating the compound of claim 1.
Claim 22
Dependent Claim
9 words
Electrochromically adjustable device incorporating the compound of claim 1.
Claim 23
Dependent Claim
9 words
Electrochromically adjustable window incorporating the compound of claim 1.
Claim 24
Dependent Claim
9 words
Electrochromically adjustable mirror incorporating the compound of claim 1.
References Cited (Backward Citations)
FR20237E
Cited
US2695214A
Cited
US2934537A
Cited
US3051569A
Cited
US3555102A
Cited
US4592904A
Cited
US4751149A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-04 | 1994-08-06 | 1995-02-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-04 | 1998-08-06 | 1999-02-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-04 | 2002-08-06 | 2003-02-05 | $7700.00 | Window Closed / Lapsed |