US4400254A
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US
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Method for preparing transparent, electrically conducting indium oxide (In2 O3) films
Assignee: Siemens AG
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Filing: 1982-01-18
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Granted: 1983-08-23
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Expires: 2002-01-18
Abstract
Abstract Indium-tin alloy targets are high-frequency cathode sputtered using water vapor with a pressure of between 10 -3 mbar and 5×10 -3 mbar as the reaction gas. The temperature-sensitive substrates used are water-cooled during the deposition. This is a continuation of application Ser. No. 168,244 filed July 10, 1980, now abandoned.
Inventors
- 👤 Helmut Freller
- 👤 Peter Schack
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:58
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/245; C03C25/00; C03C25/10; C03C25/12; C03C25/22; C03C25/226; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/215; C03C2217/23; C03C2217/231; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/154
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
68 words
In a method for preparing transparent, electrically conducting tin-doped indium oxide (In 2 O 3 ) layers on temperature-sensitive substrates through high-frequency cathode sputtering of indium/tin alloy targets in a vacuum, using a reaction gas, the improvement comprising utilizing water vapor having a pressure in the range of from 3×10 -3 mbar to 5×10 -3 mbar as the reaction gas, and water-cooling the temperature-sensitive substrates during the deposition.
Claim 2
Dependent Claim
68 words
In a method for preparing transparent, electrically conducting tin-doped indium oxide (In 2 O 3 ) layers on temperature-sensitive substrates through high-frequency cathode sputtering of indium/tin alloy targets in a vacuum, using a reaction gas, the improvement comprising utilizing water vapor having a pressure in the range of from 3×10 -3 mbar to 5×10 -3 mbar as the reaction gas, and water-cooling the temperature-sensitive substrates during the deposition.
Claim 3
Dependent Claim
17 words
The method according to claim 1, wherein said water vapor has a pressure of 3×10 -3 mbar.
Claim 4
Dependent Claim
27 words
The method according to claim 2, wherein said temperature-sensitive substrate is selected from the group consisting of polyester foil, optical fibers and glass with thermally unstable layers.
References Cited (Backward Citations)
US4010291A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-08-22 | 1987-02-21 | 1987-08-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-08-22 | 1991-02-21 | 1991-08-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-08-22 | 1995-02-21 | 1995-08-23 | $7700.00 | Window Closed / Lapsed |