US5135581A
Expired / Lapsed
US
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Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas
Assignee: 3M Co
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Filing: 1991-04-08
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Granted: 1992-08-04
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Expires: 2011-04-08
Abstract
Abstract A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H2 and H2O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20 DEG C. to 300 DEG C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.
Inventors
- 👤 Nang T. Tran
- 👤 James R. Gilbert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:59
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/245; C03C17/2453; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; C23C14/06; C23C14/08; C23C14/086; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/23; C03C2217/231; C03C2217/24; C03C2217/241; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/154
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
74 words
A process for making a light transmissive, electrically conductive electrode, comprising the step of sputtering an indium tin oxide precursor onto a substrate at a temperature from 20° C. to 300° C., wherein said sputtering step occurs in a gaseous mixture comprising a) a sputtering gas; and b) a stabilizing gas comprising at least one gas selected from the group consisting of H 2 and H 2 O; and c) a fluorine containing gas.
Claim 2
Dependent Claim
74 words
A process for making a light transmissive, electrically conductive electrode, comprising the step of sputtering an indium tin oxide precursor onto a substrate at a temperature from 20° C. to 300° C., wherein said sputtering step occurs in a gaseous mixture comprising a) a sputtering gas; and b) a stabilizing gas comprising at least one gas selected from the group consisting of H 2 and H 2 O; and c) a fluorine containing gas.
Claim 3
Dependent Claim
27 words
The process of claim 1, wherein the indium tin oxide precursor comprises a mixture of In and Sn having a Sn:In weight ratio of 1:5 or less.
Claim 4
Dependent Claim
20 words
The process of claim 1, wherein said sputtering step occurs at a temperature of from 25° C. to 150° C.
Claim 5
Dependent Claim
17 words
The process of claim 1, wherein said sputtering step occurs at a temperature of about 25° C.
Claim 6
Dependent Claim
11 words
The process of claim 1, wherein the sputtering gas is argon.
Claim 7
Dependent Claim
30 words
The process of claim 1, wherein the sputtering gas is a mixture of from 50 to 100 percent by weight Ar and from 0 to 50 percent by weight He.
Claim 8
Dependent Claim
22 words
The process of claim 6, wherein said mixture of Ar and He comprises from 2 to 5 percent by weight of He.
Claim 9
Dependent Claim
18 words
The process of claim 1, wherein said sputtering step occurs at a pressure of 50 millitorr or less.
Claim 10
Dependent Claim
34 words
The process of claim 1, wherein the molar ratio of F atoms from the fluorine containing gas to the number of moles of hydrogen atoms from the stabilizing gas is from 0.005 to 1.0.
Claim 11
Dependent Claim
27 words
The process of claim 1, wherein the fluorine containing gas is selected from the group consisting of F 2 , CF 4 , and BF 6 .
Claim 12
Dependent Claim
22 words
The process of claim 1, wherein the molar ratio of the stabilizing gas to the sputtering gas is from 0.005 to 1.0.
Claim 13
Dependent Claim
19 words
The process of claim 1, wherein the molar ratio of the stabilizing gas to the sputtering gas is 0.05.
Claim 14
Dependent Claim
13 words
The process of claim 1, wherein the gaseous mixture further comprises oxygen gas.
Claim 15
Dependent Claim
20 words
The process of claim 13, wherein the molar ratio of the stabilizing gas to oxygen gas is 0.1 to 2.0.
Claim 16
Dependent Claim
22 words
A light transmissive, electrically conductive electrode, wherein the electrode is formed from indium tin oxide that is doped with fluorine and hydrogen.
Claim 17
Dependent Claim
22 words
A light transmissive, electrically conductive electrode, wherein the electrode is formed from indium tin oxide that is doped with fluorine and hydrogen.
Claim 18
Dependent Claim
74 words
A photovoltaic device, comprising: (a) a photovoltaic semiconductor structure having a first side and a second side; (b) a first electrode in electrical contact with the first side of the photovoltaic semiconductor structure, wherein said first electrode is formed from a conductive material; and (c) a second electrode in electrical contact with the second side of the photovoltaic semiconductor structure, said second electrode comprising indium tin oxide that is doped with fluorine and hydrogen.
Claim 19
Dependent Claim
74 words
A photovoltaic device, comprising: (a) a photovoltaic semiconductor structure having a first side and a second side; (b) a first electrode in electrical contact with the first side of the photovoltaic semiconductor structure, wherein said first electrode is formed from a conductive material; and (c) a second electrode in electrical contact with the second side of the photovoltaic semiconductor structure, said second electrode comprising indium tin oxide that is doped with fluorine and hydrogen.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-08-04 | 1996-02-03 | 1996-08-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-04 | 2000-02-03 | 2000-08-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-04 | 2004-02-03 | 2004-08-04 | $7700.00 | Window Closed / Lapsed |