US5372849A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical vapor deposition of iron, ruthenium, and osmium
Assignee: 3M Co
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Filing: 1994-01-18
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Granted: 1994-12-13
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Expires: 2014-01-18
Abstract
Abstract A method is provided for forming films comprising Fe, Ru or Os employing the techniques of chemical vapor deposition to decompose a vapor comprising an organometallic compound of the formula (a): (CO) 4 ML or (b): M 2 [μ-η:η 4 -C 4 ](CO) 6 ; wherein L is a two-electron donor ligand and each R is H, halo, OH, alkyl, perfluoroalkyl or aryl; so as to deposit a coating comprising one or more of said metals on the surface of a substrate.
Inventors
- 👤 Fred B. McCormick
- 👤 Wayne L. Gladfelter
- 👤 Yoshihide Senzaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:35
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
322 words
A method for applying a metal film on the surface of a substrate comprising employing the techniques of chemical vapor deposition to decompose a vapor comprising a compound of the formula: (CO) 4 ML, wherein (a) M is Fe, Ru or Os; and (b) L is 1. (R 1 ) 3 P, (R 1 O) 3 P, (R 1 ) 3 N, (R 1 ) 3 As or (R 1 ) 3 Sb; wherein each R 1 is H, halo, (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl or (C 6 -C 10 )aryl, and each R 1 is selected so that L comprises a total of 0-30 carbon atoms; 2. (R 1 O) 3 P, wherein each R 1 is (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl or (C 6 -C 10 )aryl, and each R 1 is selected so that L comprises 3-30 carbon atoms; 3. R 1 OR 1 , R 1 SR 1 , R 1 CN, or R 1 NC, wherein each R 1 is (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl or (C 6 -C 10 )aryl; and each R 1 is selected so that L comprises 2-30 carbon atoms; 4. (R 1 ) 2 C═C(R 1 ) 2 or R 1 C═CR 1 , wherein each R 1 is H, halo, (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl, --CHO, --CN, tris(C 1 -C 4 )alkylsilyl or (C 6 -C 10 )aryl; and each R 1 is selected so that L comprises 2-30 carbon atoms; 5. thiocarbonyl; or 6. (R 1 ) 2 C═; wherein R 1 is H, (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl, halo, amino or (C 6 -C 10 ) aryl, and each R 1 is selected so that L comprises 1-30 carbon atoms; so as to deposit a film comprising Fe, Ru or Os on said surface.
Claim 2
Independent Claim
322 words
A method for applying a metal film on the surface of a substrate comprising employing the techniques of chemical vapor deposition to decompose a vapor comprising a compound of the formula: (CO) 4 ML, wherein (a) M is Fe, Ru or Os; and (b) L is 1. (R 1 ) 3 P, (R 1 O) 3 P, (R 1 ) 3 N, (R 1 ) 3 As or (R 1 ) 3 Sb; wherein each R 1 is H, halo, (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl or (C 6 -C 10 )aryl, and each R 1 is selected so that L comprises a total of 0-30 carbon atoms; 2. (R 1 O) 3 P, wherein each R 1 is (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl or (C 6 -C 10 )aryl, and each R 1 is selected so that L comprises 3-30 carbon atoms; 3. R 1 OR 1 , R 1 SR 1 , R 1 CN, or R 1 NC, wherein each R 1 is (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl or (C 6 -C 10 )aryl; and each R 1 is selected so that L comprises 2-30 carbon atoms; 4. (R 1 ) 2 C═C(R 1 ) 2 or R 1 C═CR 1 , wherein each R 1 is H, halo, (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl, --CHO, --CN, tris(C 1 -C 4 )alkylsilyl or (C 6 -C 10 )aryl; and each R 1 is selected so that L comprises 2-30 carbon atoms; 5. thiocarbonyl; or 6. (R 1 ) 2 C═; wherein R 1 is H, (C 1 -C 10 )alkyl, (C 1 -C 10 )perfluoroalkyl, halo, amino or (C 6 -C 10 ) aryl, and each R 1 is selected so that L comprises 1-30 carbon atoms; so as to deposit a film comprising Fe, Ru or Os on said surface.
Claim 3
Dependent Claim
12 words
The method of claim 1 wherein the metal is Ru or Os.
Claim 4
Dependent Claim
10 words
The method of claim 2 wherein the metal is Ru.
Claim 5
Dependent Claim
10 words
The method of claim 2 wherein the metal is Os.
Claim 6
Dependent Claim
46 words
The method of claim 1 wherein L is (R 1 ) 3 P, (R 1 ) 3 As, (R 1 O) 3 P, CS, (R 1 ) 2 C═, (R 1 )NC, (R 1 ) 2 C═C(R 1 ) 2 or R 1 C═CR 1 .
Claim 7
Dependent Claim
29 words
The method of claim 1 or 5 wherein R 1 is halo, (C 1 -C 4 )alkyl, (C 1 -C 4 )perfluoroalkyl, phenyl H, CHO, CN or mixtures thereof.
Claim 8
Dependent Claim
18 words
The method of claim 6 wherein R 1 is halo, methyl, CF 3 , H or mixtures thereof.
Claim 9
Dependent Claim
24 words
The method of claim 5 wherein L is R 1 C═CR 1 ,( R 1 O) 3 P or (R 1 ) 3 N.
Claim 10
Dependent Claim
9 words
The method of claim 1 wherein L is hexafluoro-2-butyne.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-12 | 1998-06-13 | 1998-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-12 | 2002-06-13 | 2002-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-12 | 2006-06-13 | 2006-12-13 | $7700.00 | Window Closed / Lapsed |