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US5364815A Expired / Lapsed US ⏱️ 0.0 years remaining

Crystal articles and method for forming the same

Assignee: Canon Inc
•
Filing: 1993-02-17
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Granted: 1994-11-15
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Expires: 2013-02-17
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Abstract

Abstract A crystal article comprises; a substrate having i) a nonnucleation surface (S NDS ) having a small nucleation density, ii) at least one single-nucleation surface (S NDL -S) provided adjacent to said nonnucleation surface (S NDS ), having an area small enough for a crystal to grow from only a single nucleus and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ), and iii) at least one multiple-nucleation surface (S NDL -M) having an area large enough for crystals to grow from plural nuclei and having a larger nucleation density (ND L ) than the nucleation density (ND S ) of said nonnucleation surface (S NDS ); at least one monocrystal grown from said single nucleus and extending over said single-nucleation surface (S NDL -S) to cover part of said nonnucleation surface (S NDS ); and a polycrystalline film grown from said plural nuclei to cover said multiple-nucleation surface.

Inventors

  • 👤 Yoshiyuki Osada

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 07:14
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/18; H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/27; H10P14/271; H10P14/274; H10P14/29; H10P14/2901; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3238; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; Y; Y10; Y10S; Y10S117/00; Y10S117/913

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 244 words
A method for forming a crystal article on a substrate which comprises: (a) forming on said substrate a free surface having a nonnucleation surface; (b) forming in said nonnucleation surface at least one amorphous single nucleation surface for forming a monocrystal by ion implanting a material in said nonnucleation surface having a nucleation density substantially larger than the material constituting said nonnucleation surface; and at least one amorphous multiple nucleation surface for forming a polycrystal by implanting a material in said nonnucleation surface having a nucleation density substantially larger than the material constituting said nonnucleation surface; wherein each said amorphous single nucleation surface has an area of sufficient size and a nucleation density sufficiently larger than the nucleation density of said nonnucleation surface to selectively form a single nucleus for growing said monocrystal and each said amorphous multiple nucleation surface has an area of sufficient size and a nucleation density sufficiently larger than the nucleation density of said nonnucleation surface to selectively form plural nuclei thereon for growing said polycrystal; (c) simultaneously vapor depositing each said single nucleus for forming each said monocrystal on each said amorphous single nucleation surface and each said plural nuclei for forming each said polycrystal on each said multiple nucleation surface; and (d) simultaneously growing by vapor deposition each said monocrystal from each said vapor deposited single nucleus and each said polycrystal from each said vapor deposited plural nuclei, wherein each said monocrystal is overgrown on said nonnucleation surface.
Claim 2
Independent Claim 244 words
A method for forming a crystal article on a substrate which comprises: (a) forming on said substrate a free surface having a nonnucleation surface; (b) forming in said nonnucleation surface at least one amorphous single nucleation surface for forming a monocrystal by ion implanting a material in said nonnucleation surface having a nucleation density substantially larger than the material constituting said nonnucleation surface; and at least one amorphous multiple nucleation surface for forming a polycrystal by implanting a material in said nonnucleation surface having a nucleation density substantially larger than the material constituting said nonnucleation surface; wherein each said amorphous single nucleation surface has an area of sufficient size and a nucleation density sufficiently larger than the nucleation density of said nonnucleation surface to selectively form a single nucleus for growing said monocrystal and each said amorphous multiple nucleation surface has an area of sufficient size and a nucleation density sufficiently larger than the nucleation density of said nonnucleation surface to selectively form plural nuclei thereon for growing said polycrystal; (c) simultaneously vapor depositing each said single nucleus for forming each said monocrystal on each said amorphous single nucleation surface and each said plural nuclei for forming each said polycrystal on each said multiple nucleation surface; and (d) simultaneously growing by vapor deposition each said monocrystal from each said vapor deposited single nucleus and each said polycrystal from each said vapor deposited plural nuclei, wherein each said monocrystal is overgrown on said nonnucleation surface.
Claim 3
Dependent Claim 52 words
The method of forming a crystal article of claim 1, wherein each said single nucleation surface an each said multiple nucleation surface are simultaneously formed by depositing a material having a nucleation density substantially larger than the material constituting said nonnucleation surface on said nonnucleation surface, followed by patterning according to lithography.
Claim 4
Independent Claim 38 words
The method of forming a crystal article of any one of claims 1 or 2, wherein the position and size of each said monocrystal are controlled by the spacing between said single nucleation surface and multiple nucleation surface.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-11-14 1998-05-16 1998-11-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-11-14 2002-05-16 2002-11-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-11-14 2006-05-16 2006-11-15 $7700.00 Window Closed / Lapsed

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