Method for microwave plasma assisted supersonic gas jet deposition of thin films

Claim 1

A method for depositing a film upon a substrate, said method comprising the steps of: providing a vacuum chamber having a port allowing for access to a vacuum chamber interior, positioning the substrate within said vacuum chamber interior; depositing the film on said substrate by providing controlled entry of a reactant gas substantially at room temperature into the interior of the vacuum chamber by means of a gas jet apparatus affixed to said vacuum chamber port, said gas jet apparatus comprising an outer nozzle having an interior cavity; means for providing carrier gas, substantially at room temperature to said outer nozzle interior cavity; an inner nozzle located within said outer nozzle interior cavity for providing a supersonic jet of reactant gas from an inner nozzle tip configured to provide said reactant gas directly to an outer surface of said substrate, said inner nozzle tip being recessed from said vacuum chamber port within said outer nozzle interior cavity; a discharge means configured about said gas jet apparatus for generating a discharge in said carrier and reactant gas only in a portion of said outer nozzle interior cavity extending from approximately said inner nozzle tip towards said vacuum chamber; and evacuating gas from said vacuum chamber for maintaining a pressure in said vacuum chamber.

Claim 2

A method for depositing a film upon a substrate, said method comprising the steps of: providing a vacuum chamber having a port allowing for access to a vacuum chamber interior, positioning the substrate within said vacuum chamber interior; depositing the film on said substrate by providing controlled entry of a reactant gas substantially at room temperature into the interior of the vacuum chamber by means of a gas jet apparatus affixed to said vacuum chamber port, said gas jet apparatus comprising an outer nozzle having an interior cavity; means for providing carrier gas, substantially at room temperature to said outer nozzle interior cavity; an inner nozzle located within said outer nozzle interior cavity for providing a supersonic jet of reactant gas from an inner nozzle tip configured to provide said reactant gas directly to an outer surface of said substrate, said inner nozzle tip being recessed from said vacuum chamber port within said outer nozzle interior cavity; a discharge means configured about said gas jet apparatus for generating a discharge in said carrier and reactant gas only in a portion of said outer nozzle interior cavity extending from approximately said inner nozzle tip towards said vacuum chamber; and evacuating gas from said vacuum chamber for maintaining a pressure in said vacuum chamber.

Claim 3

A method for depositing a film upon a substrate, said method comprising the steps of: providing a vacuum chamber having a plurality of ports allowing for access to a vacuum chamber interior, positioning the substrate on a translation fixture within said vacuum chamber interior; moving said substrate between a first position and a second position; depositing a first portion of the film on said substrate by providing controlled entry of a first reactant gas substantially at room temperature into the interior of the vacuum chamber by means of a first gas jet apparatus affixed to a first vacuum chamber port, said first gas jet apparatus including: a first outer nozzle having an interior cavity; a first means for providing carrier gas substantially at room temperature within said first outer nozzle interior cavity; a first inner nozzle located within said first outer nozzle interior cavity for providing a supersonic jet of first reactant gas from a first inner nozzle tip configured to provide said first reactant gas directly towards said substrate first position, said first inner nozzle tip being recessed from said vacuum chamber port within said first outer nozzle interior cavity; depositing a second portion of the film on said substrate by providing controlled entry of a second reactant gas into the interior of the vacuum chamber by means of a second gas jet apparatus affixed to a second vacuum chamber port, said second gas jet apparatus including: a second outer nozzle having an interior cavity; a second means for providing carrier gas substantially at room temperature within said second outer nozzle interior cavity; a second inner nozzle located within said second outer nozzle interior cavity for providing a supersonic jet of second reactant gas substantially at room temperature from a second inner nozzle tip configured to provide said second reactant gas directly towards said substrate second position, said second inner nozzle tip being recessed from said vacuum chamber port within said second outer nozzle interior cavity; evacuating gas from said vacuum chamber to maintain a pressure in said vacuum chamber: and translating said substrate between said first and second positions within a time less than a time needed to complete film formation on said substrate to ensure the film is chemically comprised of chemical reaction products of said first and second reactant gasses.

Claim 4

A method for depositing a film upon a substrate, said method comprising the steps of: providing a vacuum chamber having a plurality of ports allowing for access to a vacuum chamber interior, positioning the substrate on a translation fixture within said vacuum chamber interior; moving said substrate between a first position and a second position; depositing a first portion of the film on said substrate by providing controlled entry of a first reactant gas substantially at room temperature into the interior of the vacuum chamber by means of a first gas jet apparatus affixed to a first vacuum chamber port, said first gas jet apparatus including: a first outer nozzle having an interior cavity; a first means for providing carrier gas substantially at room temperature within said first outer nozzle interior cavity; a first inner nozzle located within said first outer nozzle interior cavity for providing a supersonic jet of first reactant gas from a first inner nozzle tip configured to provide said first reactant gas directly towards said substrate first position, said first inner nozzle tip being recessed from said vacuum chamber port within said first outer nozzle interior cavity; depositing a second portion of the film on said substrate by providing controlled entry of a second reactant gas into the interior of the vacuum chamber by means of a second gas jet apparatus affixed to a second vacuum chamber port, said second gas jet apparatus including: a second outer nozzle having an interior cavity; a second means for providing carrier gas substantially at room temperature within said second outer nozzle interior cavity; a second inner nozzle located within said second outer nozzle interior cavity for providing a supersonic jet of second reactant gas substantially at room temperature from a second inner nozzle tip configured to provide said second reactant gas directly towards said substrate second position, said second inner nozzle tip being recessed from said vacuum chamber port within said second outer nozzle interior cavity; evacuating gas from said vacuum chamber to maintain a pressure in said vacuum chamber: and translating said substrate between said first and second positions within a time less than a time needed to complete film formation on said substrate to ensure the film is chemically comprised of chemical reaction products of said first and second reactant gasses.

Claim 8

A method for depositing a film upon a substrate, said method comprising the steps of: providing a vacuum chamber having a port allowing for access to a vacuum chamber interior, positioning a substrate within said vacuum chamber interior; providing controlled entry of a reactant gas substantially at room temperature into the interior of the vacuum chamber by means of a gas jet apparatus affixed to said vacuum chamber port, said gas jet apparatus comprising an outer nozzle having an interior cavity; a means for providing carrier gas at an approximate pressure of 2.5 Torr and substantially at room temperature to said outer nozzle interior cavity; an inner nozzle located within said outer nozzle interior cavity for providing a supersonic jet of reactant gas from an inner nozzle tip configured to provide said reactant gas directly to an outer surface of said substrate, said inner nozzle tip being recessed from said vacuum chamber port within said outer nozzle interior cavity; a discharge means configured about said gas jet apparatus for generating a discharge in said carrier and reactant gas only in a portion of said outer nozzle interior cavity extending from approximately said inner nozzle tip towards said vacuum chamber; and evacuating gas from said vacuum chamber for maintaining a pressure in said vacuum chamber.

Claim 9

A method for depositing a film upon a substrate, said method comprising the steps of: providing a vacuum chamber having a port allowing for access to a vacuum chamber interior, positioning a substrate within said vacuum chamber interior; providing controlled entry of a reactant gas substantially at room temperature into the interior of the vacuum chamber by means of a gas jet apparatus affixed to said vacuum chamber port, said gas jet apparatus comprising an outer nozzle having an interior cavity; a means for providing carrier gas at an approximate pressure of 2.5 Torr and substantially at room temperature to said outer nozzle interior cavity; an inner nozzle located within said outer nozzle interior cavity for providing a supersonic jet of reactant gas from an inner nozzle tip configured to provide said reactant gas directly to an outer surface of said substrate, said inner nozzle tip being recessed from said vacuum chamber port within said outer nozzle interior cavity; a discharge means configured about said gas jet apparatus for generating a discharge in said carrier and reactant gas only in a portion of said outer nozzle interior cavity extending from approximately said inner nozzle tip towards said vacuum chamber; and evacuating gas from said vacuum chamber for maintaining a pressure in said vacuum chamber.

Claim 10

A method for depositing a film upon a substrate, said method comprising the steps of: providing a vacuum chamber having a port allowing for access to a vacuum chamber interior, positioning a substrate within said vacuum chamber interior; providing controlled entry of a reactant gas substantially at room temperature into the interior of the vacuum chamber by means of a gas jet apparatus affixed to said vacuum chamber port, said gas jet apparatus comprising an outer nozzle having an interior cavity; a means for providing carrier gas substantially at room temperature to said outer nozzle interior cavity; an inner nozzle located within said outer nozzle interior cavity for providing a supersonic jet of reactant gas at an approximate pressure of 600 Torr from an inner nozzle tip configured to provide said reactant gas directly to an outer surface of said substrate, said inner nozzle tip being recessed from said vacuum chamber port within said outer nozzle interior cavity; a discharge means configured about said gas jet apparatus for generating a discharge in said carrier and reactant gas only in a portion of said outer nozzle interior cavity extending from approximately said inner nozzle tip towards said vacuum chamber; and evacuating gas from said vacuum chamber for maintaining a pressure in said vacuum chamber.

Claim 11

A method for depositing a film upon a substrate, said method comprising the steps of: providing a vacuum chamber having a port allowing for access to a vacuum chamber interior, positioning a substrate within said vacuum chamber interior; providing controlled entry of a reactant gas substantially at room temperature into the interior of the vacuum chamber by means of a gas jet apparatus affixed to said vacuum chamber port, said gas jet apparatus comprising an outer nozzle having an interior cavity; a means for providing carrier gas substantially at room temperature to said outer nozzle interior cavity; an inner nozzle located within said outer nozzle interior cavity for providing a supersonic jet of reactant gas at an approximate pressure of 600 Torr from an inner nozzle tip configured to provide said reactant gas directly to an outer surface of said substrate, said inner nozzle tip being recessed from said vacuum chamber port within said outer nozzle interior cavity; a discharge means configured about said gas jet apparatus for generating a discharge in said carrier and reactant gas only in a portion of said outer nozzle interior cavity extending from approximately said inner nozzle tip towards said vacuum chamber; and evacuating gas from said vacuum chamber for maintaining a pressure in said vacuum chamber.