US4911805A — Apparatus and process for producing a stable beam…

Claim 1

Independent Claim 169 words

Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising: a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein; gas exciting means upstream of said nozzle, said gas exciting means comprising a pair of electrodes with a gas flow space therebetween, and means for creating a DC glow discharge or a high frequency glow discharge between the electrodes; and means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance; wherein each electrode of said gas exciting means is semi-circular in cross-section and forms half of a tube, the electrodes being joined to an insulating material to form a tube through which gases may pass.

Claim 2

Dependent Claim 169 words

Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising: a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein; gas exciting means upstream of said nozzle, said gas exciting means comprising a pair of electrodes with a gas flow space therebetween, and means for creating a DC glow discharge or a high frequency glow discharge between the electrodes; and means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance; wherein each electrode of said gas exciting means is semi-circular in cross-section and forms half of a tube, the electrodes being joined to an insulating material to form a tube through which gases may pass.

Claim 3

Dependent Claim 20 words

Apparatus according to claim 1, wherein the nozzle is formed from a material which allows the passages of microwaves therethrough.

Claim 4

Dependent Claim 12 words

Apparatus according to claim 2, wherein the nozzle is formed of quartz.

Claim 5

Dependent Claim 19 words

Apparatus according to claim 1, wherein the nozzle is formed from a material which allows passage of light therethrough.

Claim 6

Dependent Claim 22 words

Apparatus according to claim 4, wherein the nozzle is formed from a material which allows passage of ultraviolet or infrared light therethrough.

Claim 7

Dependent Claim 30 words

Apparatus according to claim 2, 3, 4 or 5, wherein the second substance is a solid arranged within the chamber such that the beam formed by the nozzle impinges thereon.

Claim 8

Dependent Claim 32 words

Apparatus according to claim 1, 2, 3, 4 or 5, further comprising, at the upstream side of said nozzle, a reservoir for storing the fine particles for dispersal in the carrier gas.

Claim 9

Dependent Claim 17 words

Apparatus according to claim 1, 2, 3, 4 or 5, further comprising shutter means for said nozzle.

Claim 10

Dependent Claim 39 words

Apparatus according to claim 2, 3, 4 or 5, further comprising, at the downstream side of said nozzle, a skimmer having a variable aperture function which can be externally regulated to vary aperture area between open and closed positions.

Claim 11

Dependent Claim 35 words

Apparatus according to claim 1, 2, 3, 4 or 5, wherein said means for regulating is operable in cooperation with said gas supply means to form a film of the first substance on a substrate.

Claim 12

Independent Claim 187 words

A method of bringing fine particles formed from a first substance into contact with a second substance, comprising: supplying a carrier gas under pressure with fine particles of the first substance dispersed therein to a convergent-divergent nozzle; regulating the pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas, having dispersed therein fine particles of the first substance, is formed downstream of the nozzle; and causing the fine particles in the stable beam to contact the second substance; wherein the first substance is gaseous and is treated before passage through the nozzle to produce active particles, the active particles being produced by passing the carrier gas and the first substance through gas exciting means upstream of the nozzle. the gas exciting means comprising a pair of electrodes between which the gases pass, and means for creating a DC glow discharge or a high frequency glow discharge between the electrode; and wherein each electrode is semi-circular in cross-section and forms half of a tube, the electrodes being joined to an insulating material to form a tube through which the gases pass.

Claim 13

Independent Claim 187 words

A method of bringing fine particles formed from a first substance into contact with a second substance, comprising: supplying a carrier gas under pressure with fine particles of the first substance dispersed therein to a convergent-divergent nozzle; regulating the pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas, having dispersed therein fine particles of the first substance, is formed downstream of the nozzle; and causing the fine particles in the stable beam to contact the second substance; wherein the first substance is gaseous and is treated before passage through the nozzle to produce active particles, the active particles being produced by passing the carrier gas and the first substance through gas exciting means upstream of the nozzle. the gas exciting means comprising a pair of electrodes between which the gases pass, and means for creating a DC glow discharge or a high frequency glow discharge between the electrode; and wherein each electrode is semi-circular in cross-section and forms half of a tube, the electrodes being joined to an insulating material to form a tube through which the gases pass.

Claim 14

Dependent Claim 26 words

A method according to claim 11, wherein the first substance is exposed to activating energy passing through the walls of the nozzle to produce active particles.

Claim 15

Dependent Claim 21 words

A method according to claim 12, wherein the nozzle is formed from a material which allows the passage of microwaves therethrough.

Claim 16

Dependent Claim 13 words

A method according to claim 13, wherein the nozzle is formed of quartz.

Claim 17

Dependent Claim 21 words

A method according to claim 12, wherein the nozzle is formed from a material which allows the passage of light therethrough.

Claim 18

Dependent Claim 13 words

A method according to claim 15, wherein the activating energy comprises laser light.

Claim 19

Dependent Claim 24 words

A method according to claim 15, wherein the nozzle is formed from a material which allows the passage of ultraviolet or infrared light therethrough.

Claim 20

Dependent Claim 44 words

A method according to claim 11, 12, 13, 14, 15, 16 or 17, wherein the first substance is gaseous and the fine particles are formed by condensing the gaseous first substance in the nozzle to form ultra fine particles dispersed in the carrier gas.

Claim 21

Dependent Claim 28 words

A method according to claim 11, 12, 13, 14, 15, 16 or 17, further comprising the step of forming a film of the first substance on a substrate.

Claim 22

Dependent Claim 116 words

Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising: a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein; and means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance; wherein the second substance is a solid arranged within the chamber such that the beam formed by the nozzle impinges thereon.

Claim 23

Dependent Claim 116 words

Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising: a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein; and means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance; wherein the second substance is a solid arranged within the chamber such that the beam formed by the nozzle impinges thereon.

Claim 24

Dependent Claim 125 words

Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising: a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein; and means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance; further comprising, at the downstream side of said nozzle, a skimmer having a variable aperture function which can be externally regulated to vary aperture area between open and closed positions.

Claim 25

Dependent Claim 125 words

Apparatus for bringing fine particles formed from a first substance into contact with a second substance, comprising: a convergent divergent nozzle connected between gas supply means and a chamber, the gas supply means being arranged to supply to the nozzle a carrier gas with fine particles of the first substance dispersed therein; and means for regulating pressure conditions upstream and downstream of the nozzle such that a stable beam of the carrier gas with fine particles of the first substance dispersed therein is formed in the chamber and comes into contact with the second substance; further comprising, at the downstream side of said nozzle, a skimmer having a variable aperture function which can be externally regulated to vary aperture area between open and closed positions.

Claim 26

Dependent Claim 22 words

Apparatus according to claim 20 or 21, wherein the nozzle is formed from a material which allows the passage of microwaves therethrough.

Claim 27

Dependent Claim 12 words

Apparatus according to claim 22, wherein the nozzle is formed of quartz.

Claim 28

Dependent Claim 21 words

Apparatus according to claim 20 or 21, wherein the nozzle is formed from a material which allows passage of light therethrough.

Claim 29

Dependent Claim 22 words

Apparatus according to claim 24, wherein the nozzle is formed from a material which allows passage of ultraviolet or infrared light therethrough.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1993-03-26	1993-09-25	1994-03-27	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1997-03-26	1997-09-25	1998-03-27	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2001-03-26	2001-09-25	2002-03-27	$7700.00	Window Closed / Lapsed

Apparatus and process for producing a stable beam of fine particles

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