US4871580A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of treating surfaces of substrates with the aid of a plasma
Assignee: EINDHOVEN UNIVERSITY OF TECHNOLOGY FACULTY OF PHYSICS
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Filing: 1988-06-13
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Granted: 1989-10-03
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Expires: 2008-06-13
Abstract
Abstract A method of treating substrate surfaces with the aid of a plasma such as etching, deposition etc. In the practice of the method, the plasma flows from its place of generation to the treatment-chamber, and in which method the plasma-generator is flushed through with a flushing gas. Preferably, and firstly after the flushing gas has passed the cathodes, the reactant is fed to the plasma-generator. The invention includes the reactor necessary for carrying out the method.
Inventors
- 👤 Daniel C. Schram
- 👤 Gerardus M. W. Kroesen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 18:07
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/24; H05H1/26; H05H1/32; H05H1/42; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/513
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
105 words
A method of treating the surfaces of substrates with the aid of a plasma, comprising the steps: (a) supporting a substrate in a plasma treatment chamber, (b) providing at least one plasma-generator connected by at least one plasma-inlet to the plasma treatment chamber, (c) introducing a reactant via at least one inlet into said plasma-generator, (d) generating a plasma in said plasma-generator, (e) maintaining in the treatment chamber a pressure lower than that in the said plasma-generator whereby a stream of plasma flows through the plasma-inlet from the said plasma-generator to the said plasma treatment chamber, and (f) flushing through the plasma-generator a flushing gas.
Claim 2
Independent Claim
105 words
A method of treating the surfaces of substrates with the aid of a plasma, comprising the steps: (a) supporting a substrate in a plasma treatment chamber, (b) providing at least one plasma-generator connected by at least one plasma-inlet to the plasma treatment chamber, (c) introducing a reactant via at least one inlet into said plasma-generator, (d) generating a plasma in said plasma-generator, (e) maintaining in the treatment chamber a pressure lower than that in the said plasma-generator whereby a stream of plasma flows through the plasma-inlet from the said plasma-generator to the said plasma treatment chamber, and (f) flushing through the plasma-generator a flushing gas.
Claim 3
Dependent Claim
30 words
A method as set forth in claim 1 wherein, during the treatment of the substrate, forming an extra discharge in the plasma treatment chamber using the substrate as an electrode.
Claim 4
Dependent Claim
39 words
A method as claimed in claim 1, wherein the plasma-generator contains cathode and anode electrodes, the reactant is gas-like or liquid, and the reactant is first fed upstream in the plasma-generator after the flushing gas has passed the cathode.
Claim 5
Dependent Claim
28 words
A method as claimed in claim 3, wherein the flushing gas is built-up of molecules which contain no fragments which would react with the material of the cathode.
Claim 6
Dependent Claim
34 words
A method as claimed in claim 1, wherein the flushing gas is flowed through the plasma-generator at a rate of at least 1 meter/second in order to retard or prevent back-diffusion of the reactant.
Claim 7
Dependent Claim
18 words
A method as claimed in claim 5 wherein the flushing gas flow rate is at least 10 meters/second.
Claim 8
Dependent Claim
25 words
A method as claimed in claim 3 wherein during the treatment, the temperature of the cathode is maintained below the melting temperature of the cathode.
Claim 9
Dependent Claim
36 words
A method as claimed in claim 1 wherein the reactant is a liquid and is injected into the plasma-generator through at least one aperture in its wall with a diameter of between 0.0001 and 0.5 mm.
Claim 10
Dependent Claim
20 words
A method as claimed in claim 8, wherein the wall aperture has a diameter of between 0.005 and 0.1 mm.
Claim 11
Dependent Claim
28 words
A method as claimed in claim 8, wherein the liquid pressure in front of the aperture is maintained at a pressure greater than the pressure in the plasma-generator.
Claim 12
Dependent Claim
41 words
A method as claimed in claim 1, wherein the reactant is in the form of solid matter, and at least one discharge is established in the plasma treatment chamber or in the plasma-generator and which converts reactant into a gas-like phase.
Claim 13
Dependent Claim
25 words
A method as claimed in claim 1, wherein the treatment chamber is pumped out at a rate which is adjustable between 0 and 100,000 liters/second.
Claim 14
Dependent Claim
17 words
A method as claimed in claim 12, wherein the pumping rate is between 50 and 1000 liters/second.
Claim 15
Dependent Claim
22 words
A method as claimed in claim 1, wherein the diameter of the stream of plasma flowing into the treatment chamber is controlled.
Claim 16
Dependent Claim
22 words
A method as claimed in claim 14, wherein the plasma stream diameter is controlled by passing the plasma stream through a skimmer.
Claim 17
Dependent Claim
21 words
A method as claimed in claim 14, wherein the plasma stream diameter is controlled by subjecting it to a magnetic field.
Claim 18
Dependent Claim
20 words
A method as claimed in claim 1, wherein the reactant introduced to the plasma-generator in the vicinity of the plasma-inlet.
Claim 19
Dependent Claim
21 words
A method as claimed in claim 1, wherein the substrate is maintained at a temperature of between 70° and 1500° Kelvin.
Claim 20
Dependent Claim
18 words
A method as claimed in claim 18, wherein the temperature is maintained at between 273° and 1000° Kelvin.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-02 | 1993-04-03 | 1993-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-02 | 1997-04-03 | 1997-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-02 | 2001-04-03 | 2001-10-03 | $7700.00 | Window Closed / Lapsed |