US4957061A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plurality of beam producing means disposed in different longitudinal and lateral directions from each other with respect to a substrate
Assignee: Canon Inc
•
Filing: 1989-12-18
•
Granted: 1990-09-18
•
Expires: 2009-12-18
Abstract
Abstract A device for blowing fine particles is provided which comprises a plural number of upstream chambers for jetting out fine particles provided against a movable substrate. Each of the upstream chambers may be provided with a gas exciter, and also may be provided with an energy imparter for imparting energy to the substrate.
Inventors
- 👤 Kenji Ando
- 👤 Osamu Kamiya
- 👤 Masao Sugata
- 👤 Noriko Kurihara
- 👤 Hiroyuki Sugata
- 👤 Tohru Den
- 👤 Toshiaki Kimura
- 👤 Takashi Hamamoto
- 👤 Masahiro Haruta
- 👤 Kuniji Osabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 23:18
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/02; H05H1/16; H05H1/18; C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/562; C23C4/00; C23C4/12
Claims Analysis
Total Claims: 66
Claim 1
Independent Claim
170 words
A device for blowing fine particles onto a substrate, the device comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; energy imparting means for imparting energy to the substrate, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and said plurality of beams produced by said beam producing means being arranged such that each of a plurality of the beams produced by said beam producing means is projected on different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 2
Independent Claim
170 words
A device for blowing fine particles onto a substrate, the device comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; energy imparting means for imparting energy to the substrate, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and said plurality of beams produced by said beam producing means being arranged such that each of a plurality of the beams produced by said beam producing means is projected on different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 3
Dependent Claim
13 words
A device according to claim 1, wherein said nozzle is a convergent-divergent nozzle.
Claim 4
Dependent Claim
15 words
A device according to claim 1, wherein said substrate comprises a metal or a polymer.
Claim 5
Dependent Claim
23 words
A device according to claim 3, wherein said metal is selected from the group consisting of aluminum, nickel, bronze, stainless steel, and molybdenum.
Claim 6
Dependent Claim
18 words
A device according to claim 3, wherein said polymer is capable of forming a heat-resistant and flexible film.
Claim 7
Dependent Claim
25 words
A device according to claim 3, wherein said polymer is selected from the group consisting of polyethylene terephthalate, polyimides, polyamides, polycarbonate, polyacetate, and polymethyl methacrylate.
Claim 8
Independent Claim
183 words
A device for blowing fine particles onto a substrate, the device comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; gas exciting means provided in each said upstream chamber for exciting the fine particles; energy imparting means for imparting energy to the substrate, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and the plurality of beams provided by said beam producing means being arranged such that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 9
Independent Claim
183 words
A device for blowing fine particles onto a substrate, the device comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; gas exciting means provided in each said upstream chamber for exciting the fine particles; energy imparting means for imparting energy to the substrate, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and the plurality of beams provided by said beam producing means being arranged such that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 10
Dependent Claim
19 words
A device according to claim 7, wherein said gas exciting means uses microwave discharging to excite the fine particles.
Claim 11
Dependent Claim
20 words
A device according to claim 7, wherein said energy imparting means is a means for heating, pressurization or light irradiation.
Claim 12
Dependent Claim
15 words
A device according to claim 7, wherein said substrate comprises a metal or a polymer.
Claim 13
Dependent Claim
23 words
A device according to claim 10, wherein said metal is selected from the group consisting of aluminum, nickel, bronze, stainless steel, and molybdenum.
Claim 14
Dependent Claim
18 words
A device according to claim 10, wherein said polymer is capable of forming a heat-resistant and flexible film.
Claim 15
Dependent Claim
25 words
A device according to claim 10, wherein said polymer is selected from the group consisting of polyethylene terephthalate, polyimides, polyamides, polycarbonate, polyacetate, and polymethyl methacrylate.
Claim 16
Independent Claim
163 words
A device for blowing fine particles onto a substrate, the device comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and the plurality of beams produced by said beam producing means being arranged in a manner that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 17
Independent Claim
163 words
A device for blowing fine particles onto a substrate, the device comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and the plurality of beams produced by said beam producing means being arranged in a manner that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 18
Dependent Claim
12 words
A device according to claim 14, wherein the substrate is a drum.
Claim 19
Dependent Claim
13 words
An apparatus according to claim 7, wherein said nozzle is a convergent-divergent nozzle.
Claim 20
Dependent Claim
13 words
A device according to claim 14, wherein said nozzle is a convergent-divergent nozzle.
Claim 21
Dependent Claim
15 words
A device according to claim 14, wherein the substrate comprises a metal or a polymer.
Claim 22
Dependent Claim
23 words
A device according to claim 18, wherein said metal is selected from the group consisting of aluminum, nickel, bronze, stainless steel, and molybdenum.
Claim 23
Dependent Claim
16 words
A device according to claim 18, wherein said polymer is capable of forming a flexible film.
Claim 24
Dependent Claim
25 words
A device according to claim 18, wherein said polymer is selected from the group consisting of polyethylene terephthalate, polyimides, polyamides, polycarbonate, polyacetate, and polymethyl methacrylate.
Claim 25
Independent Claim
176 words
A device for blowing fine particles onto a substrate, the device comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; gas exciting means provided in each said upstream chamber for exciting the fine particles, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate and the plurality of beams produced by said beam producing means being arranged in a manner that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 26
Independent Claim
176 words
A device for blowing fine particles onto a substrate, the device comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; gas exciting means provided in each said upstream chamber for exciting the fine particles, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate and the plurality of beams produced by said beam producing means being arranged in a manner that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 27
Dependent Claim
12 words
A device according to claim 20, wherein the substrate is a drum.
Claim 28
Dependent Claim
13 words
A device according to claim 22, wherein said nozzle is a convergent-divergent nozzle.
Claim 29
Dependent Claim
19 words
A device according to claim 22, wherein said gas exciting means uses microwave discharging to excite the fine particles.
Claim 30
Dependent Claim
16 words
A device according to claim 22 , wherein said substrate comprises a metal or a polymer.
Claim 31
Dependent Claim
23 words
A device according to claim 26, wherein said metal is selected from the group consisting of aluminum, nickel, bronze, stainless steel, and molybdenum.
Claim 32
Dependent Claim
18 words
A device according to claim 26, wherein said polymer is capable of forming a heat-resistant and flexible film.
Claim 33
Dependent Claim
25 words
A device according to claim 26, wherein said polymer is selected from the group consisting of polyethylene terephthalate, polyimides, polyamides, polycarbonate, polyacetate, and polymethyl methacrylate.
Claim 34
Dependent Claim
172 words
A film forming apparatus for forming a film on a substrate, said apparatus comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; energy imparting means for imparting energy to the substrate, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and said plurality of beams produced by said beam producing means being arranged such that each of a plurality of the beams produced by said beam producing means is projected on different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 35
Dependent Claim
172 words
A film forming apparatus for forming a film on a substrate, said apparatus comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; energy imparting means for imparting energy to the substrate, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and said plurality of beams produced by said beam producing means being arranged such that each of a plurality of the beams produced by said beam producing means is projected on different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 36
Dependent Claim
13 words
An apparatus according to claim 30, wherein said nozzle is a convergent-divergent nozzle.
Claim 37
Dependent Claim
15 words
An apparatus according to claim 30, wherein said substrate comprises a metal or a polymer.
Claim 38
Dependent Claim
23 words
An apparatus according to claim 32, wherein said metal is selected from the group consisting of aluminum, nickel bronze, stainless steel, and molybdenum.
Claim 39
Dependent Claim
18 words
An apparatus according to claim 32, wherein said polymer is capable of forming a heat-resilient and flexible film.
Claim 40
Dependent Claim
25 words
An apparatus according to claim 32, wherein said polymer is selected from the group consisting of polyethylene terephthalate, polyimides, polyamides, polycarbonate, polyacetate, and polymethyl methacrylate.
Claim 41
Dependent Claim
186 words
A film-forming apparatus for forming a film on a substrate, said apparatus comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each of said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for wetting out the dispersed fine particles as a beam to a downstream side; gas exciting means provided in each said upstream chamber for exciting the fine particles; energy imparting means for imparting energy to the substrate, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and the plurality of beams produced by said beam producing means being arranged such that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 42
Dependent Claim
186 words
A film-forming apparatus for forming a film on a substrate, said apparatus comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each of said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for wetting out the dispersed fine particles as a beam to a downstream side; gas exciting means provided in each said upstream chamber for exciting the fine particles; energy imparting means for imparting energy to the substrate, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and the plurality of beams produced by said beam producing means being arranged such that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 43
Dependent Claim
13 words
An apparatus according to claim 36, wherein said nozzle is a convergent-divergent nozzle.
Claim 44
Dependent Claim
19 words
An apparatus according to claim 36, wherein said gas exciting means uses microwave discharging to excite the fine particles.
Claim 45
Dependent Claim
20 words
An apparatus according to claim 36, wherein said energy imparting means is a means for heating, pressurization or light irradiation.
Claim 46
Dependent Claim
15 words
An apparatus according to claim 36, wherein said substrate comprises a metal or a polymer.
Claim 47
Dependent Claim
23 words
An apparatus according to claim 40, wherein said metal is selected from the group consisting of aluminum, nickel, bronze, stainless steel, and molybdenum.
Claim 48
Dependent Claim
18 words
An apparatus according to claim 40, wherein said polymer is capable of forming a heat-resistant and flexible film.
Claim 49
Dependent Claim
25 words
An apparatus according to claim 30, wherein said polymer is selected from the group consisting of polyethylene terephthalate, polyimides, polyamides, polycarbonate, polyacetate, and polymethyl methacrylate.
Claim 50
Dependent Claim
164 words
A film-forming apparatus for forming a film on a substrate, said apparatus comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and the plurality of beams produced by said beam producing means being arranged in a manner that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 51
Dependent Claim
164 words
A film-forming apparatus for forming a film on a substrate, said apparatus comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate, and the plurality of beams produced by said beam producing means being arranged in a manner that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being disposed in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 52
Dependent Claim
13 words
An apparatus according to claim 44, wherein said nozzle is a convergent-divergent nozzle.
Claim 53
Dependent Claim
15 words
An apparatus according to claim 44, wherein said substrate comprises a metal or a polymer.
Claim 54
Dependent Claim
23 words
An apparatus according to claim 46, wherein said metal is selected from the group consisting of aluminum, nickel, bronze, stainless steel, and molybdenum.
Claim 55
Dependent Claim
16 words
An apparatus according to claim 46, wherein said polymer is capable of forming a flexible film.
Claim 56
Dependent Claim
25 words
An apparatus according to claim 46, wherein said polymer is selected from the group consisting of polyethylene terephthalate, polyimides, polyamides, polycarbonate, polyacetate, and polymethyl methacrylate.
Claim 57
Dependent Claim
12 words
An apparatus according to claim 44, wherein the substrate is a drum.
Claim 58
Dependent Claim
177 words
A film-forming apparatus for forming a film on a substrate, said substrate comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; gas exciting means provided in each said upstream chamber for exciting the fine particles, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate and the plurality of beams provided by said beam producing means being arranged in a manner that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 59
Dependent Claim
177 words
A film-forming apparatus for forming a film on a substrate, said substrate comprising: a plurality of means for producing a beam of a flow of fine particles, wherein each said beam producing means is provided with an upstream chamber for dispersing the fine particles in a carrier gas, with said upstream chamber communicating with a pressure-adjusting chamber through a nozzle for jetting out the dispersed fine particles as a beam to a downstream side; gas exciting means provided in each said upstream chamber for exciting the fine particles, wherein said beam producing means communicates through each of said pressure-adjusting chambers with a downstream chamber provided therein with a movable substrate and the plurality of beams provided by said beam producing means being arranged in a manner that each of a plurality of the beams produced by said beam producing means is projected to different portions on the substrate along the moving direction of the substrate, with said plurality of beam producing means being in different longitudinal and lateral directions from each other with respect to the substrate.
Claim 60
Dependent Claim
13 words
An apparatus according to claim 51, wherein said nozzle is a convergent-divergent nozzle.
Claim 61
Dependent Claim
19 words
An apparatus according to claim 51, wherein said gas exciting means uses microwave discharging to excite the fine particles.
Claim 62
Dependent Claim
15 words
An apparatus according to claim 51, wherein said substrate comprises a metal or a polymer.
Claim 63
Dependent Claim
23 words
An apparatus according to claim 54, wherein said metal is selected from the group consisting of aluminum, nickel, bronze, stainless steel, and molybdenum.
Claim 64
Dependent Claim
18 words
An apparatus according to claim 54, wherein said polymer is capable of forming a heat-resistant and flexible film.
Claim 65
Dependent Claim
25 words
An apparatus according to claim 54, wherein said polymer is selected from the group consisting of polyethylene terephthalate, polyimides, polyamides, polycarbonate, polyacetate, and polymethyl methacrylate.
Claim 66
Dependent Claim
12 words
An apparatus according to claim 51, wherein the substrate is a drum.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1993-09-17 | 1994-03-19 | 1994-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-17 | 1998-03-19 | 1998-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-17 | 2002-03-19 | 2002-09-18 | $7700.00 | Window Closed / Lapsed |