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Substrate having an active element array with low hydroxyl and chlorine

Assignee: Sony Corp
•
Filing: 1993-01-27
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Granted: 1994-09-20
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Expires: 2013-01-27
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Abstract

Abstract A synthetic quartz glass substrate (1) supporting active elements is formed of high-purity synthetic quartz glass having, a hydroxyl group content of 200 ppm or below and chlorine group content of 50 ppm or below. The substrate (1) may have an impurity level of 1 ppm or less sodium and 1 ppm or less aluminum. TFTs (6), i.e., active elements, and picture element electrodes (7) are formed on the surface of the synthetic quartz glass substrate (1) to construct a driving panel for a liquid crystal display of an active matrix type. A liquid crystal panel is formed by disposing the driving panel and a counter substrate (2) opposite to each other and sandwiching a liquid crystal layer (3) between the driving panel and the counter substrate (2).

Inventors

  • 👤 Toshihiko Iwanaga
  • 👤 Kazuyoshi Yoshida
  • 👤 Takusei Sato

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 14:18
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; C; C03; C03C; C03C3/00; C03C3/04; C03C3/06; C03C2201/00; C03C2201/06; C03C2201/08; C03C2201/11; C03C2201/20; C03C2201/23; C03C2201/30; C03C2201/32; C03C2201/50; C03C2203/00; C03C2203/40; G02F1/136; G02F1/1362; G02F1/1368; Y; Y10; Y10S; Y10S501/00; Y10S501/90

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 38 words
A substrate having an active element array comprising: a glass substrate composed of synthetic quartz glass including a hydroxyl group whose concentration is 200 ppm or less and a chlorine group whose concentration is 50 ppm or less.
Claim 2
Dependent Claim 38 words
A substrate having an active element array comprising: a glass substrate composed of synthetic quartz glass including a hydroxyl group whose concentration is 200 ppm or less and a chlorine group whose concentration is 50 ppm or less.
Claim 3
Dependent Claim 28 words
A substrate as claimed in claim 1, wherein said synthetic quartz glass includes impurities of 0.1 ppm or less of sodium and 1 ppm or less of aluminum.
Claim 4
Dependent Claim 17 words
A substrate as claimed in claim 2, wherein said active element array comprises a thin-film transistor array.
Claim 5
Dependent Claim 17 words
A substrate as claimed in claim 1, wherein said active element array comprises a thin-film transistor array.
Claim 6
Dependent Claim 82 words
An electrooptical device comprising: a glass substrate composed of synthetic quartz glass including a hydroxyl group whose concentration is 200 ppm or less and a chlorine group whose concentration is 50 ppm or less; a plurality of picture element electrodes disposed in the matrix form, each picture element electrode being associated with a switching element; an insulating substrate placed opposite to and spaced apart from the glass substrate; and an electrooptical material layer sandwiched between the glass substrate and the insulating substrate.
Claim 7
Dependent Claim 82 words
An electrooptical device comprising: a glass substrate composed of synthetic quartz glass including a hydroxyl group whose concentration is 200 ppm or less and a chlorine group whose concentration is 50 ppm or less; a plurality of picture element electrodes disposed in the matrix form, each picture element electrode being associated with a switching element; an insulating substrate placed opposite to and spaced apart from the glass substrate; and an electrooptical material layer sandwiched between the glass substrate and the insulating substrate.
Claim 8
Dependent Claim 29 words
An electrooptical device as claimed in claim 5, wherein said synthetic quartz glass includes impurities of 0.1 ppm or less of sodium and 1 ppm or less of aluminum.
Claim 9
Dependent Claim 17 words
An electrooptical device as claimed in claim 5, wherein said switching element is a thin film transistor.
Claim 10
Dependent Claim 19 words
An electrooptical device as claimed in claim 7, wherein said thin-film transistor comprises a thin film of polycrystalline silicon.
Claim 11
Dependent Claim 15 words
An electrooptical device as claimed in claim 5, wherein said electrooptical material is liquid crystal.
Claim 12
Dependent Claim 20 words
An electrooptical device as claimed in claim 5, wherein said glass substrate has a thickness of 1 mm or less.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-09-19 1998-03-21 1998-09-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-09-19 2002-03-21 2002-09-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-09-19 2006-03-21 2006-09-20 $7700.00 Window Closed / Lapsed

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