Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
38 words
A substrate having an active element array comprising: a glass substrate composed of synthetic quartz glass including a hydroxyl group whose concentration is 200 ppm or less and a chlorine group whose concentration is 50 ppm or less.
Claim 2
Dependent Claim
38 words
A substrate having an active element array comprising: a glass substrate composed of synthetic quartz glass including a hydroxyl group whose concentration is 200 ppm or less and a chlorine group whose concentration is 50 ppm or less.
Claim 3
Dependent Claim
28 words
A substrate as claimed in claim 1, wherein said synthetic quartz glass includes impurities of 0.1 ppm or less of sodium and 1 ppm or less of aluminum.
Claim 4
Dependent Claim
17 words
A substrate as claimed in claim 2, wherein said active element array comprises a thin-film transistor array.
Claim 5
Dependent Claim
17 words
A substrate as claimed in claim 1, wherein said active element array comprises a thin-film transistor array.
Claim 6
Dependent Claim
82 words
An electrooptical device comprising: a glass substrate composed of synthetic quartz glass including a hydroxyl group whose concentration is 200 ppm or less and a chlorine group whose concentration is 50 ppm or less; a plurality of picture element electrodes disposed in the matrix form, each picture element electrode being associated with a switching element; an insulating substrate placed opposite to and spaced apart from the glass substrate; and an electrooptical material layer sandwiched between the glass substrate and the insulating substrate.
Claim 7
Dependent Claim
82 words
An electrooptical device comprising: a glass substrate composed of synthetic quartz glass including a hydroxyl group whose concentration is 200 ppm or less and a chlorine group whose concentration is 50 ppm or less; a plurality of picture element electrodes disposed in the matrix form, each picture element electrode being associated with a switching element; an insulating substrate placed opposite to and spaced apart from the glass substrate; and an electrooptical material layer sandwiched between the glass substrate and the insulating substrate.
Claim 8
Dependent Claim
29 words
An electrooptical device as claimed in claim 5, wherein said synthetic quartz glass includes impurities of 0.1 ppm or less of sodium and 1 ppm or less of aluminum.
Claim 9
Dependent Claim
17 words
An electrooptical device as claimed in claim 5, wherein said switching element is a thin film transistor.
Claim 10
Dependent Claim
19 words
An electrooptical device as claimed in claim 7, wherein said thin-film transistor comprises a thin film of polycrystalline silicon.
Claim 11
Dependent Claim
15 words
An electrooptical device as claimed in claim 5, wherein said electrooptical material is liquid crystal.
Claim 12
Dependent Claim
20 words
An electrooptical device as claimed in claim 5, wherein said glass substrate has a thickness of 1 mm or less.