US5326716A
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Liquid phase epitaxial process for producing three-dimensional semiconductor structures by liquid phase expitaxy
Assignee: Max-Planck-Gesellschaft zur Förderung der Wissenschaften eV
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Filing: 1991-07-15
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Granted: 1994-07-05
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Expires: 2011-07-15
Abstract
Abstract The present invention relates to a new application of the liquid epitaxial method, especially the manufacturing of epitaxial monocrystalline semiconductor layers having high crystalline perfection in multi-layer arrangements on an intermediate layer of an insulating material and/or carbon and/or metal for the manufacturing of a three-dimensional semi-conductor structure, in which low mechanical stresses are present and the charge carrier capacity is available between 1014 and 1021 per cubic centimeter, wherein very low process temperatures can be used, namely between 300 DEG and 900 DEG C. The seeding for the epitaxial layer is performed in openings made in the intermediate layer, wherein the monocrystalline material is exposed. From the openings the intermediate layers become overgrown laterally and in a monocrystalline fashion. The repeated application of the liquid epitaxy in the described fashion will permit a three-dimensional integration in monocrystalline multi-layer structures which are extremely devoid of defects.
Inventors
- 👤 Elisabeth Bauser
- 👤 Horst P. Strunk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 23:19
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/01; H10D84/02; H10D84/03; H10D84/038; H10D88/00; H10D88/01; H10P; H10P14/00; H10P14/20; H10P14/26; H10P14/263; H10P14/265; H10P14/27; H10P14/271; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2907; H10P14/2911; H10P14/2926; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3414; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3442
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
186 words
A method of manufacturing a three-dimensional semiconductive structure comprising a substrate having an active component connectable in a first circuit and at least one layer of a semiconductor material, said semiconductor layer having an active component connectable in a second circuit, having high structural perfection and having low mechanical stresses, said method comprising the steps of: (a) providing a substrate having a surface, said substrate surface being crystallographically oriented in such a fashion that during crystal growth, crystal growth velocity is smaller perpendicularly to said surface as compared to crystal growth velocity parallel to said surface, (b) depositing a mask pattern on said substrate surface, said mask pattern having mask pattern portions masking areas of said surface and narrow intermediate spaces between said mask portions, said intermediate spaces being narrower than said mask portions whereby said surface is exposed in said spaces to have an exposed area less than that of said masked areas; and (c) by means of liquid-phase epitaxy from solution, growing said semiconductor material on said surface exposed between said mask portions and over said mask pattern portions to form said semiconductor layer.
Claim 2
Independent Claim
186 words
A method of manufacturing a three-dimensional semiconductive structure comprising a substrate having an active component connectable in a first circuit and at least one layer of a semiconductor material, said semiconductor layer having an active component connectable in a second circuit, having high structural perfection and having low mechanical stresses, said method comprising the steps of: (a) providing a substrate having a surface, said substrate surface being crystallographically oriented in such a fashion that during crystal growth, crystal growth velocity is smaller perpendicularly to said surface as compared to crystal growth velocity parallel to said surface, (b) depositing a mask pattern on said substrate surface, said mask pattern having mask pattern portions masking areas of said surface and narrow intermediate spaces between said mask portions, said intermediate spaces being narrower than said mask portions whereby said surface is exposed in said spaces to have an exposed area less than that of said masked areas; and (c) by means of liquid-phase epitaxy from solution, growing said semiconductor material on said surface exposed between said mask portions and over said mask pattern portions to form said semiconductor layer.
Claim 3
Dependent Claim
37 words
A method as claimed in claim 1, wherein said semiconductor layer is monocrystalline and has a thickness and a varying composition, said varying composition being a function of distance from said substrate throughout said monocrystalline layer thickness.
Claim 4
Dependent Claim
22 words
A method as claimed in claim 2, wherein said varying composition is achieved by repeating said liquid-phase growing step with differing compositions.
Claim 5
Dependent Claim
25 words
A method as claimed in claim 2, wherein said varying composition is achieved by varying the temperature at which said liquid-phase growing step is conducted.
Claim 6
Dependent Claim
53 words
A method as claimed in claim 1, wherein said semiconductor layer is a monocrystalline layer formed from a material selected from the group consisting of germanium and a compound semiconductor material containing at least one of the elements in periodic table group III and at least one element from periodic table group V.
Claim 7
Dependent Claim
25 words
A method as claimed in claim 1, wherein said substrate is a bicrystalline substrate, with portions having a twin-plane or a small angle grain boundary.
Claim 8
Dependent Claim
28 words
A method as claimed in claim 1, wherein said substrate is made of silicon; said semiconductor material is silicon, and said substrate surface is a |111| crystallographic plane.
Claim 9
Dependent Claim
43 words
A method as claimed in claim 1, wherein said substrate is made of gallium arsenide; said semiconductor material comprises gallium and arsenic; and said substrate surface is a crystallographic plane selected from the group consisting of the |111| plane and the |100| plane.
Claim 10
Dependent Claim
33 words
A process as claimed in claim 1, wherein said mask pattern comprises an interrupted layer-like pattern formed of at least one material selected from the group consisting of carbon, insulator material and metal.
Claim 11
Dependent Claim
64 words
A process as claimed in claim 1, wherein said substrate comprises an integrated circuit structure and said semiconductor material is selected from the group consisting of germanium and a compound semiconductor containing at least one element from group III and at least one element from group V of the periodic system, and wherein said semiconductor material is used to form another integrated circuit structure.
Claim 12
Dependent Claim
36 words
A process according to claim 1, comprising depositing, in a liquid epitaxial process, between said substrate and said semiconductor layer, an epitaxial transitional layer providing a transition of lattice constants and made from a germanium-silicon alloy.
Claim 13
Dependent Claim
21 words
A process according to claim 11, wherein said transitional layer has an increasing germanium content with increasing distance from said substrate.
Claim 14
Dependent Claim
37 words
A process as in claim 1, wherein said semiconductor material is grown as a thin epitaxial semiconductor layer and said growing step is repeated alternately with materials having different lattice constants to produce multiple thin semiconductor layers.
Claim 15
Dependent Claim
22 words
A process according to claim 13, wherein each said thin semiconductor layer is grown with a thickness between 1 and 1000 atoms.
Claim 16
Dependent Claim
17 words
A process according to claim 13 wherein growing is done alternately with silicon and a silicon-germanium alloy.
Claim 17
Dependent Claim
15 words
A process according to claim 15, wherein said silicon-germanium alloy comprises 30 to 50% germanium.
Claim 18
Dependent Claim
37 words
A liquid epitaxial process as in claim 1, wherein said liquid-phase epitaxy-growing solution comprises a material selected from the group consisting of indium, gallium, antimony, bismuth, zinc, aluminum, and lead, as a solvent for said semiconductor material.
Claim 19
Dependent Claim
82 words
A process according to claim 17, wherein said solvent has a composition selected in such a manner that said grown semiconductor layer has a charge carrier density meeting a criterion selected from the following group: a) the charge carrier density assumes values under 10 14 per cubic centimeter; b) the charge carrier density assumes a desired value between 10 14 and 10 20 per cubic centimeter; and c) the charge carrier density assumes a value greater than 10 20 per cubic centimeter.
Claim 20
Dependent Claim
66 words
A process according to claim 1, wherein said solvent material is selected from one of the following groups: a) mainly indium, zinc or lead; b) the components of indium, gallium, antimony, bismuth, zinc and lead in an appropriate mixture relationship; and c) mainly gallium and respectively phosphorous and/or arsenic in high concentration; respectively, according to said respective desired charge carrier density criterion a), b) or c).
Claim 21
Dependent Claim
15 words
A process as claimed in claim 19, wherein said substrate is a polycrystalline polysilicon material.
Claim 22
Dependent Claim
31 words
A process as claimed in claim 1, wherein said substrate is polycrystalline and said semiconductor material is selected from the group consisting of said polycrystalline substrate material and crystallographically comparable materials.
Claim 23
Dependent Claim
15 words
A process as claimed in claim 1, wherein said substrate has defined localized crystal defects.
Claim 24
Dependent Claim
34 words
A process according to claim 22, wherein said substrate is bicrystalline with portions having a twin-plane or small angle grain boundary with very small angular displacement of the crystal planes of both crystal portions.
Claim 25
Dependent Claim
15 words
A process according to claim 23, wherein said angle is smaller than one angular minute.
Claim 26
Dependent Claim
64 words
A method according to claim 1 being a spin liquid-phase epitaxy method, said semiconductor substrate having high structural perfection, which method includes providing a liquid solution of a semiconductor material in a solvent, causing said solution to flow over said substrate by means of centrifugal forces, and providing each said circuit structure layer with contact means for individual connection of said layers in circuit.
Claim 27
Dependent Claim
16 words
A method according to claim 1 wherein said mask pattern portions are strips of insulator material.
Claim 28
Dependent Claim
23 words
A method according to claim 1 comprising growing said semiconductor layer to form a smooth surface extending across at least one mask portion.
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