Abstract A deposition furnace boat includes a plurality of wells each of which is adapted to contain a solution of the material to be deposited. A slide extends across the bottoms of the wells and is adapted to carry a substrate from one well to the next. Between each pair of adjacent wells is a narrow slot extending to the surface of the slide. Epitaxial layers are deposited on the substrate by moving the slide to bring the substrate into each well in succession. While the substrate is in each well, the solution is cooled to deposit the material from the solution onto the substrate. When the slide is moved to carry the substrate from one well to the next, the substrate passes beneath the slot which is between the wells. Any of the solution which may be carried with the substrate from the one well will be drawn up into the slot by capillary action so as to prevent contamination of the solution in the next well by any carry-over solution.
IN A METHOD OF DEPOSITING A PLURALITY OF EPITAXIAL LAYERS ON A SUBSTRATE IN SUCCESSION IN A FURNACE BOAT HAVING A PLURALITY OF WELLS EACH OF WHICH CONTAINS A SOLUTION OF THE MATERIAL TO BE DEPOSITED IN A SOLVENT AND A SLIDE EXTENDING ACROSS THE BOTTOMS OF THE WELLS AND CARRYING THE SUBSTRATE WHEREIN THE SLIDE IS MOVED TO CARRY THE SUBSTRATE INTO EACH WELL AND BENEATH THE SOLUTION IN EACH WELL IN SUCCESSION AND WHILE THE SUBSTRATE IS IN EACH WELL, THE SOLUTION IN THE WELL IS COOLED TO DEPOSIT A LAYER OF THE MATERIAL FROM THE SOLUTION ONTO THE SUBSTRATE, THE IMPROVEMENT COMPRISING; WHILE THE SUBSTRATE IS BEING CARRIED FROM ONE WELL TO THE NEXT WELL, MOVING THE SUBSTRATE ACROSS AN OPENING IN THE FURNACE BOAT TO DRAW OFF OF THE SUBSTRATE INTO THE OPENING ANY SOLUTION WHICH MAY HAVE BEEN DRAWN ALONG WITH THE SUBSTRATE FROM THE ONE WELL AND THEREBY PREVENT CONTAMINATION OF THE SOLUTION IN THE NEXT WELL.
Claim 2
Dependent Claim
163 words
IN A METHOD OF DEPOSITING A PLURALITY OF EPITAXIAL LAYERS ON A SUBSTRATE IN SUCCESSION IN A FURNACE BOAT HAVING A PLURALITY OF WELLS EACH OF WHICH CONTAINS A SOLUTION OF THE MATERIAL TO BE DEPOSITED IN A SOLVENT AND A SLIDE EXTENDING ACROSS THE BOTTOMS OF THE WELLS AND CARRYING THE SUBSTRATE WHEREIN THE SLIDE IS MOVED TO CARRY THE SUBSTRATE INTO EACH WELL AND BENEATH THE SOLUTION IN EACH WELL IN SUCCESSION AND WHILE THE SUBSTRATE IS IN EACH WELL, THE SOLUTION IN THE WELL IS COOLED TO DEPOSIT A LAYER OF THE MATERIAL FROM THE SOLUTION ONTO THE SUBSTRATE, THE IMPROVEMENT COMPRISING; WHILE THE SUBSTRATE IS BEING CARRIED FROM ONE WELL TO THE NEXT WELL, MOVING THE SUBSTRATE ACROSS AN OPENING IN THE FURNACE BOAT TO DRAW OFF OF THE SUBSTRATE INTO THE OPENING ANY SOLUTION WHICH MAY HAVE BEEN DRAWN ALONG WITH THE SUBSTRATE FROM THE ONE WELL AND THEREBY PREVENT CONTAMINATION OF THE SOLUTION IN THE NEXT WELL.
Claim 3
Dependent Claim
23 words
The method in accordance with claim 1 in which the solution is drawn off of the substrate into the opening by capillary action.