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JPS535569A Expired / Lapsed JP ⏱️ 0.0 years remaining

Liquid-phase epitaxial growth method

Assignee: Sanyo Electric Co Ltd
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Filing: 1976-07-05
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Granted: —
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Expires: 1996-07-05
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Abstract

Abstract PURPOSE: To have a continuous growth of different epitaxial layers without taking in and out of the substrate by dividing the growth boat in the upper, middle and lower parts with two upper and lower sliding plates containing small holes. COPYRIGHT: (C)1978,JPO&Japio

Inventors

  • 👤 Tatsuhiko Niina
  • 👤 Takao Yamaguchi

Bibliographic Details

Application Number —
Jurisdiction JP
Data Source google_patents
Last Synchronized 2026-11-06 11:05
CPC Classifications
—

Claims Analysis

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References Cited (Backward Citations)

JPS49121462U Cited

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