Apparatus for forming deposited film

Claim 1

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous halogenic oxidizing agent; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous halogenic oxidizing agent for introducing said gaseous halogenic oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and means for selectively preventing said precursors from one of said gas introducing means from effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 2

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous halogenic oxidizing agent; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous halogenic oxidizing agent for introducing said gaseous halogenic oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and means for selectively preventing said precursors from one of said gas introducing means from effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 10

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous halogenic oxidizing material; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous halogenic oxidizing agent for introducing said gaseous halogenic oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous halogenic oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and at least one of said plural number of gas introducing means having means for selectively preventing said precursors from said at least one of said plural number of gas introducing means from effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 11

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous halogenic oxidizing material; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous halogenic oxidizing agent for introducing said gaseous halogenic oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous halogenic oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and at least one of said plural number of gas introducing means having means for selectively preventing said precursors from said at least one of said plural number of gas introducing means from effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 12

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous oxidizing agent; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous oxidizing agent for introducing said gaseous oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and means for selectively preventing said precursors form one of said gas introducing means form effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 13

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous oxidizing agent; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous oxidizing agent for introducing said gaseous oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and means for selectively preventing said precursors form one of said gas introducing means form effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 14

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous halogenic oxidizing material; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous halogenic oxidizing agent for introducing said gaseous halogenic oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous halogenic oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and at least one of said plural number of gas introducing means having means for selectively preventing said precursors from said at least one of said plural number of gas introducing means for effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 15

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous halogenic oxidizing material; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous halogenic oxidizing agent for introducing said gaseous halogenic oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous halogenic oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and at least one of said plural number of gas introducing means having means for selectively preventing said precursors from said at least one of said plural number of gas introducing means for effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 16

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous halogenic oxidizing agent; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous halogenic oxidizing agent for introducing said gaseous halogenic oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and means for selectively preventing said precursors from one of said gas introducing means form effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 17

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous halogenic oxidizing agent; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous halogenic oxidizing agent for introducing said gaseous halogenic oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and means for selectively preventing said precursors from one of said gas introducing means form effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 18

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous oxidizing agent; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous oxidizing agent for introducing said gaseous oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and means for selectively preventing said precursors from one of said gas introducing means from effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.

Claim 19

An apparatus for forming a deposited film by introducing into a film forming space two or more gaseous starting materials for formation of a deposited film and a gaseous oxidizing agent having the property of oxidation action on said gaseous starting materials to effect chemical contact therebetween and thereby effect the formation of a deposited film on a substrate, said deposited film having a plurality of layers with different compositions, said apparatus comprising: a plurality of means for separately providing a plurality of different gaseous starting materials; means for providing a gaseous oxidizing agent; a plural number of gas introducing means of a multiple tubular structure, each gas introducing means positioned so as to be capable of effecting film formation; each of said gas introducing means including a first tube with a first discharging outlet which is in fluid communication with at least one of said means for separately providing a plurality of different gaseous starting materials in order to introduce at least one of said different gaseous starting materials and a second tube with a second discharging outlet in fluid communication with said means for providing said gaseous oxidizing agent for introducing said gaseous oxidizing agent, said first and second discharging outlets positioned relative to one another so as to permit said at least one of said different gaseous starting materials and said gaseous oxidizing agent to mix and chemically react with each other so as to form a plural number of the precursors including precursors in an excited state, at least one of which is used to effect film formation; and means for selectively preventing said precursors from one of said gas introducing means from effecting film formation on the substrate, wherein said means for selectively preventing said precursors is an electromagnetic valve or a shielding plate.