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US5315432A
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Thin film of lithium niobate single crystal
Assignee: Ibiden Co Ltd
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Filing: 1991-02-01
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Granted: 1994-05-24
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Expires: 2011-02-01
Abstract
Abstract This invention relates to a thin film of lithium niobate single crystal formed on a lithium tantalate substrate having a high electrooptical constant and a low propagation loss, which can be utilized in a thin-film wave-guiding second harmonic generating devices for converting the wavelength of an incident laser beam to a 1/2 level, characterized in that the lattice constant of the thin film of lithium niobate single crystal is matched with that of the lithium tantalate substrate.
Inventors
- 👤 Satoshi Ohno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:39
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/35; G02F1/365; C; C30; C30B; C30B19/00; C30B19/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/30; G02F1/355; G02F1/3551; G02F1/37; G02F1/377; G02F2202/00; G02F2202/20
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
64 words
A thin film of lithium niobate single crystal formed on a (0001) surface of a lithium tantalate substrate wherein the thin film has an a-axis lattice constant in the range of 99.92 to 100.03% of the a-axis lattice constant of the lithium tantalate substrate, and the thin film is lattice matched with the substrate to thereby improve the optical properties of the thin film.
Claim 2
Dependent Claim
64 words
A thin film of lithium niobate single crystal formed on a (0001) surface of a lithium tantalate substrate wherein the thin film has an a-axis lattice constant in the range of 99.92 to 100.03% of the a-axis lattice constant of the lithium tantalate substrate, and the thin film is lattice matched with the substrate to thereby improve the optical properties of the thin film.
Claim 3
Dependent Claim
17 words
The thin film of lithium niobate single crystal according to claim 1, which contains sodium and magnesium.
Claim 4
Dependent Claim
32 words
The thin film of lithium niobate single crystal according to claim 2, wherein the sodium content and magnesium content are 0.1 to 14.3 mol % and 0.8 to 10.8 mol %, respectively.
Claim 5
Dependent Claim
24 words
The thin film of lithium niobate single crystal according to claim 1, which is formed on the (0001) plane of the lithium tantalate substrate.
Claim 6
Dependent Claim
30 words
The thin film of lithium niobate single crystal according to claim 1, wherein the lithium tantalate substrate has a MgO diffusion layer having a thickness of 250 to 1,000 Å.
Claim 7
Dependent Claim
35 words
The thin film of lithium niobate single crystal according to claim 1 wherein said lithium tantalate substrate has a surface roughness of lithium niobate single crystal thin film formation surface of Rmax=10 to 1,000 angstroms.
Claim 8
Dependent Claim
44 words
The thin film of lithium niobate single crystal according to claim 1 wherein said thin film contains at least one element selected from the group consisting of chromium (Cr), neodymium (Nd), rhodium (Rh), zinc (Zn), nickel (Ni), cobalt (Co), titanium (Ti), and vanadium (V).
Claim 9
Dependent Claim
68 words
The thin film of lithium niobate single crystal according to claim 7 wherein the elements are contained in amounts of: Rh: 0.05 to 20 mole %, Zn: 0.02 to 30 mole %, Ni: 0.10 to 20 mole %, Co: 0.05 to 20 mole %, Cr: 0.02 to 20 mole %, Ti: 0.20 to 30 mole %, Nd: 0.02 to 10 mole %, V: 0.05 to 30 mole %.
Claim 10
Dependent Claim
20 words
The thin film of lithium niobate single crystal according to claim 1 wherein said lithium tantalate substrate has chamfered edges.
Claim 11
Dependent Claim
29 words
The thin film of lithium niobate single crystal according to claim 1 wherein said lithium niobate single crystal thin film has a surface roughness of Rmax=0.001 to 0.1 μm.
Claim 12
Dependent Claim
87 words
A thin film of lithium single crystal formed on the (0001) plan of a lithium tantalate substrate wherein the thin film contains sodium in an amount of 0.1 to 14.3 mole % and magnesium in an amount of 0.8 to 10.8 mole %, has an a-axis lattice constant in the range of 99.92 to 100.03% of the a-axis lattice constant of the lithium tantalate substrate, and the thin film is lattice matched with the lithium tantalate substrate to thereby improve the optical properties of the thin film.
Claim 13
Dependent Claim
87 words
A thin film of lithium single crystal formed on the (0001) plan of a lithium tantalate substrate wherein the thin film contains sodium in an amount of 0.1 to 14.3 mole % and magnesium in an amount of 0.8 to 10.8 mole %, has an a-axis lattice constant in the range of 99.92 to 100.03% of the a-axis lattice constant of the lithium tantalate substrate, and the thin film is lattice matched with the lithium tantalate substrate to thereby improve the optical properties of the thin film.
Claim 14
Dependent Claim
30 words
The thin film of lithium niobate single crystal according to claim 11, wherein the lithium tantalate substrate has a MgO diffusion layer having a thickness of 250 to 1,000 Å.
Claim 15
Dependent Claim
38 words
The thin film of lithium niobate single crystal according to claim 11, wherein the thin film contains sodium in an amount of 0.03 to 4.8 mole % and magnesium in an amount of 3.5 to 8.6 mole %.
Claim 16
Dependent Claim
30 words
The thin film of lithium niobate single crystal formed on the lithium tantalate substrate of claim 11 wherein the lithium tantalate substrate has a thickness of 0.5 to 2.0 mm.
Claim 17
Dependent Claim
101 words
The thin film of lithium niobate single crystal according to claim 11 wherein said thin film contains at least one element selected from the group consisting of chromium (Cr), neodymium (Nd), rhodium (Rh), zinc (Zn), nickel (Ni), cobalt (Co), titanium (Ti), and vanadium (V), and wherein the elements are in the amounts of: Rh: 0.05 to 20 mole %, Zn: 0.02 to 30 mole %, Ni: 0.10 to 20 mole %, Co: 0.05 to 20 mole %, Cr: 0.02 to 20 mole %, Ti: 0.20 to 30 mole %, Nd: 0.02 to 10 mole %, V: 0.05 to 30 mole %.
Claim 18
Dependent Claim
29 words
The thin film of lithium niobate single crystal according to claim 11, wherein said lithium niobate single crystal thin film has a surface roughness of Rmax=0.001 to 0.1 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-23 | 1997-11-22 | 1998-05-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-23 | 2001-11-22 | 2002-05-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-23 | 2005-11-22 | 2006-05-24 | $7700.00 | Window Closed / Lapsed |