US5039187A
Expired / Lapsed
US
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M1-x Nx TiAs1-a Pa O5 waveguides grown by liquid phase epitaxy and process of making same
Assignee: EIDP Inc
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Filing: 1990-09-06
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Granted: 1991-08-13
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Expires: 2010-09-06
Abstract
Abstract Optical waveguides prepared by liquid phase epitaxy comprising a film of M 1-x N x TiAs 1-a P a O 5 on a substrate of MTiAs 1- (a+b) O 5 P.sub.(a+30 b) is disclosed.
Inventors
- 👤 Albert A. Ballman
- 👤 Lap K. Cheng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:12
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/134; G02B6/1345; C; C30; C30B; C30B19/00; C30B19/02; C30B29/00; C30B29/10; C30B29/14; C30B7/00; C30B7/005; G02B6/131; Y; Y10; Y10S; Y10S117/00; Y10S117/918
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
124 words
A waveguide comprising an homogeneous film of M 1-x NxTiAs 1-a P a O 5 on a substrate of MTiAs 1- (a+b)P a+b O 5 wherein M and N are each independently potassium, rubidium, cesium or thallium; a is 0 to 1; b is greater than 0 and less than or equal to (1-a); (a+b) is greater than 0 and less than or equal to 1; and x is 0 to 1; said film is heteroepitaxial with respect to said substrate; and the refractive index of said film is greater than the refractive index of said substrate by at least about 0.001; provided that when M or N is rubidium, the concentration of rubidium in the film is equal to that in the substrate.
Claim 2
Dependent Claim
124 words
A waveguide comprising an homogeneous film of M 1-x NxTiAs 1-a P a O 5 on a substrate of MTiAs 1- (a+b)P a+b O 5 wherein M and N are each independently potassium, rubidium, cesium or thallium; a is 0 to 1; b is greater than 0 and less than or equal to (1-a); (a+b) is greater than 0 and less than or equal to 1; and x is 0 to 1; said film is heteroepitaxial with respect to said substrate; and the refractive index of said film is greater than the refractive index of said substrate by at least about 0.001; provided that when M or N is rubidium, the concentration of rubidium in the film is equal to that in the substrate.
Claim 3
Dependent Claim
13 words
The waveguide of claim 1 wherein b is a maximum of about 0.3.
Claim 4
Dependent Claim
9 words
The waveguide of claim 1 wherein a is 0.
Claim 5
Dependent Claim
9 words
The waveguide of claim 1 wherein (a+b) is 1.
Claim 6
Dependent Claim
15 words
The waveguide of claim 1 wherein M and N are each potassium, rubidium, or thallium.
Claim 7
Dependent Claim
12 words
The waveguide of claim 5 wherein M and N are each potassium.
Claim 8
Dependent Claim
12 words
The waveguide of claim 6 wherein b is a maximum of 0.3.
Claim 9
Dependent Claim
22 words
The waveguide of claim 1 wherein the film comprises KTiOAs 1-a P a O 5 and the substrate comprises KTiPO 5 .
Claim 10
Dependent Claim
10 words
The waveguide of claim 8 wherein a is about 0.7.
Claim 11
Dependent Claim
27 words
The waveguide of claim 1 wherein the film is KTiAs 1-a P a O 5 and the substrate is KTiAs 1- (a+b) P a+b O 5 .
Claim 12
Dependent Claim
15 words
The waveguide of claim 10 wherein a is about 0.4 and b is about 0.3.
Claim 13
Dependent Claim
23 words
The waveguide of claim 1 wherein the film comprises KTiAsO 5 and the substrate comprises KTiAs 1- (a+b) P a+b O 5 .
Claim 14
Dependent Claim
14 words
The waveguide of claim 12 wherein a is 0 and b is about 0.2.
Claim 15
Dependent Claim
33 words
The waveguide of claim 1 or 6 wherein the refractive index of the film is greater than the refractive index of the substrate by an amount of from about 0.001 to about 0.06.
Claim 16
Dependent Claim
31 words
The waveguide of claim 14 wherein the refractive index of the film is greater than the refractive index of the substrate by an amount of from about 0.001 to about 0.03.
Claim 17
Dependent Claim
19 words
The waveguide of claim 1 wherein the thickness of the film is from about 0.5 to about 50 microns.
Claim 18
Dependent Claim
19 words
The waveguide of claim 16 wherein the thickness of the film is from about 3 to about 5 microns.
Claim 19
Dependent Claim
190 words
A process for the liquid phase epitaxial growth of a thin film of M 1-x N x TiAs 1-a P a O 5 on a substrate of MTiAs 1- (a+b) P a+b O 5 wherein M and N are each independently potassium, rubidium, cesium, or thallium; a is 0 to 1; b is greater than 0 and less than or equal to (1-a); (a+b) is greater than 0 and less than or equal to 1; and x is 0 to 1; and wherein said film is heteroepitaxial with respect to said substrate, and the refractive index of said film is greater than the refractive index of said substrate by at least about 0.001, provided that when M or N is rubidium, the concentration of rubidium in the film is equal to that in the substrate; comprising the steps of immersing substrate seed crystal into a supercooled melt of a suitable flux, withdrawing the seed crystal from the melt, and effecting cooling thereof, resulting in supersaturation of the flux solution on the seed and growth of a crystal film of M 1-x N x TiAs 1-a P a O 5 .
Claim 20
Dependent Claim
190 words
A process for the liquid phase epitaxial growth of a thin film of M 1-x N x TiAs 1-a P a O 5 on a substrate of MTiAs 1- (a+b) P a+b O 5 wherein M and N are each independently potassium, rubidium, cesium, or thallium; a is 0 to 1; b is greater than 0 and less than or equal to (1-a); (a+b) is greater than 0 and less than or equal to 1; and x is 0 to 1; and wherein said film is heteroepitaxial with respect to said substrate, and the refractive index of said film is greater than the refractive index of said substrate by at least about 0.001, provided that when M or N is rubidium, the concentration of rubidium in the film is equal to that in the substrate; comprising the steps of immersing substrate seed crystal into a supercooled melt of a suitable flux, withdrawing the seed crystal from the melt, and effecting cooling thereof, resulting in supersaturation of the flux solution on the seed and growth of a crystal film of M 1-x N x TiAs 1-a P a O 5 .
Claim 21
Dependent Claim
40 words
The process of claim 18 wherein the flux comprises a tungstate, phosphate, arsenate, molybdate, sulfate, halide or combination thereof which results in crystallization of M x-1 N x TiAs 1-a P a O 5 as the only stable solid phase.
Claim 22
Dependent Claim
12 words
The process of claim 19 wherein the flux comprises tungstate or phosphate/arsenate.
Claim 23
Dependent Claim
36 words
The process of claim 18 wherein said film is heteroepitaxial with respect to said substrate and the refractive index of said film is greater than the refractive index of said substrate by at least about 0.001.
Claim 24
Dependent Claim
13 words
The process of claim 18 wherein b is a maximum of about 0.3.
Claim 25
Dependent Claim
18 words
The process of claim 22 wherein the resulting film thickness is from about 3 to about 5 microns.
Claim 26
Dependent Claim
9 words
A waveguide prepared by the process of claim 18.
Claim 27
Dependent Claim
9 words
The waveguide of claim 24 wherein a is 1.
Claim 28
Dependent Claim
235 words
A process for producing an optical waveguide comprising: a) growing by liquid phase epitaxy a thin film of M 1-x N x TiAs 1-a P a O 5 on a substrate of MTiAs 1- (a+b) P a+b O 5 wherein M and N are each independently potassium, rubidium, cesium or thallium; a is 0 to 1; b is greater than 0 and less than or equal to (1-a); (a+b) is greater than 0 and less than or equal to 1; and x is 0 to 1; and wherein said film is heteroepitaxial with respect to said substrate, and the refractive index of said film is greater than the refractive index of said substrate by at least about 0.001, provided that when M or N is rubidium, the concentration of rubidium in the film is equal to that in the substrate; by immersing substrate seed crystal into a supercooled melt of a suitable flux, withdrawing the seed crystal from the melt, and effecting cooling thereof, resulting in supersaturation of the flux solution on the seed and growth of a crystal film of M 1-x N x TiAs 1-a P a O 5 ; and b) contacting the substrate and film of (a) with a molten salt or molten mixture of salts of at least one salt of rubidium, cesium, thallium, strontium, calcuim, zinc or barium at a temperature of from about 200° to about 600° C.
Claim 29
Dependent Claim
235 words
A process for producing an optical waveguide comprising: a) growing by liquid phase epitaxy a thin film of M 1-x N x TiAs 1-a P a O 5 on a substrate of MTiAs 1- (a+b) P a+b O 5 wherein M and N are each independently potassium, rubidium, cesium or thallium; a is 0 to 1; b is greater than 0 and less than or equal to (1-a); (a+b) is greater than 0 and less than or equal to 1; and x is 0 to 1; and wherein said film is heteroepitaxial with respect to said substrate, and the refractive index of said film is greater than the refractive index of said substrate by at least about 0.001, provided that when M or N is rubidium, the concentration of rubidium in the film is equal to that in the substrate; by immersing substrate seed crystal into a supercooled melt of a suitable flux, withdrawing the seed crystal from the melt, and effecting cooling thereof, resulting in supersaturation of the flux solution on the seed and growth of a crystal film of M 1-x N x TiAs 1-a P a O 5 ; and b) contacting the substrate and film of (a) with a molten salt or molten mixture of salts of at least one salt of rubidium, cesium, thallium, strontium, calcuim, zinc or barium at a temperature of from about 200° to about 600° C.
Claim 30
Dependent Claim
9 words
A waveguide prepared by the process of claim 26.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-12 | 1995-02-11 | 1995-08-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-12 | 1999-02-11 | 1999-08-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-12 | 2003-02-11 | 2003-08-13 | $7700.00 | Window Closed / Lapsed |