US4001076A
Expired / Lapsed
US
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Method for growing thin epitaxial layers of a non-linear, optically active material
Assignee: Verizon Laboratories Inc
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Filing: 1974-12-11
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Granted: 1977-01-04
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Expires: 1994-12-11
Abstract
Abstract Thin film epitaxial layers of mixed oxide compounds, or of solid solutions of two mixed oxides, are deposited on a suitable single crystal substrate. Growth is achieved by introducing the substrate into a crucible containing a saturated solution of the oxide(s) in a molten alkali metal halide having additional undissolved oxide(s) present in the crucible. Evaporation of the alkali metal halide solvent produces and/or maintains the supersaturated condition, which is relieved by epitaxial deposition of the oxide(s) onto the substrate. When two mixed oxides are dissolved in the solvent, the composition of the film is determined and fixed by the temperature of growth. To produce a thin film of a constant composition, growth is conducted isothermally. To produce a thin film with a graded composition throughout its thickness, growth is conducted by slowly cooling the temperature of the solution. Excess, undissolved oxide is kept in a region of the crucible such that the undissolved oxide is several degrees hotter than the liquid in contact with the substrate. This condition results in additional oxide dissolving in the solvent as elsewhere the oxide is being deposited onto the substrate. This method of epitaxial growth provides good control of both the film composition and the film thickness.
Inventors
- 👤 Lawrence B. Robinson
- 👤 William Powazinik
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 00:28
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/062; C30B19/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B9/00; C30B9/02; Y; Y10; Y10S; Y10S117/00; Y10S117/912
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
191 words
A method for growing thin single crystal epitaxial layers of a non-linear, optially active material on a lithium tantalate or lithium niobate substrate comprising: a. providing a solution of said non-linear, optically active material represented by the formula M x M'.sub.(1-x) NO 3 or MN x N'.sub.(1-x) O 3 , where M and M' are independently alkali metals, and N and N' are independently niobium and tantalum and x can be any value from 0 to 1, inclusive, in a molten alkali metal halide solvent; b. heating said solution to an elevated temperature to produce saturation of said non-linear, optically active material in said solvent, with an excess of said non-linear, optically active material remaining undissolved in said solvent; c. slowly evaporating a portion of said solvent to induce a super-saturated condition in said solution; d. heating said substrate to a temperature approximately equal to that of said solution; e. bringing said substrate into contact with said solution; and f. removing said substrate from said solution after a predetermined time interval during which said thin single crystal epitaxial layer of said non-linear, optically active material has been deposited upon said substrate.
Claim 2
Independent Claim
191 words
A method for growing thin single crystal epitaxial layers of a non-linear, optially active material on a lithium tantalate or lithium niobate substrate comprising: a. providing a solution of said non-linear, optically active material represented by the formula M x M'.sub.(1-x) NO 3 or MN x N'.sub.(1-x) O 3 , where M and M' are independently alkali metals, and N and N' are independently niobium and tantalum and x can be any value from 0 to 1, inclusive, in a molten alkali metal halide solvent; b. heating said solution to an elevated temperature to produce saturation of said non-linear, optically active material in said solvent, with an excess of said non-linear, optically active material remaining undissolved in said solvent; c. slowly evaporating a portion of said solvent to induce a super-saturated condition in said solution; d. heating said substrate to a temperature approximately equal to that of said solution; e. bringing said substrate into contact with said solution; and f. removing said substrate from said solution after a predetermined time interval during which said thin single crystal epitaxial layer of said non-linear, optically active material has been deposited upon said substrate.
Claim 3
Dependent Claim
32 words
The method of claim 1 wherein said thin single crystal epitaxial layer of said non-linear, optically active material is deposited onto said substrate while said solution is maintained at a constant temperature.
Claim 4
Dependent Claim
33 words
The method of claim 1 wherein said thin single crystal epitaxial layer of said non-linear, optically active material is deposited onto said substrate while said solution is slowly cooled at a uniform rate.
Claim 5
Dependent Claim
11 words
The method of claim 1 wherein said substrate is lithium tantalate.
Claim 6
Dependent Claim
18 words
The method of claim 1 wherein said non-linear, optically active material is either lithium niobate or lithium tantalate.
Claim 7
Dependent Claim
14 words
The method of claim 1 wherein said alkali metal halide solvent is lithium chloride.
Claim 8
Dependent Claim
24 words
The method of claim 1 wherein said non-linear, optically active material comprises a solid solution or mixed crystal of lithium niobate and lithium tantalate.
Claim 9
Dependent Claim
27 words
The method of claim 1 wherein said solution and said substrate are heated to a temperature in the range of about 950° C to about 1100° C.
Claim 10
Dependent Claim
22 words
The method of claim 1 further including the step of g. maintaining said super-saturated condition by continued volatilization of further solvent material.
Claim 11
Dependent Claim
40 words
The method of claim 1 further including the step of h. dissolving a portion of said excess, undissolved non-linear, optically active material to thereby replenish the supply of said non-linear, optically active material which has been deposited upon said substrate.
Claim 12
Dependent Claim
41 words
The method of claim 10 wherein step (h) is accomplished by maintaining a zone of excess, undissolved non-linear, optically active material in said solution at a temperature slightly higher than the region where said epitaxial growth upon said substrate is occurring.
Claim 13
Dependent Claim
53 words
The method of claim 1 further including the steps of g. maintaining said super-saturated condition by continued volatilization of further solvent material, and h. dissolving a portion of said excess, undissolved non-linear, optically active material to thereby replenish the supply of said non-linear, optically active material which has been deposited upon said substrate.
Claim 14
Dependent Claim
41 words
The method of claim 12 wherein step (h) is accomplished by maintaining a zone of excess, undissolved non-linear, optically active material in said solution at a temperature slightly higher than the region where said epitaxial growth upon said substrate is occurring.
Claim 15
Independent Claim
140 words
The method of growing a thin epitaxial layer of lithium niobate on a lithium tantalate substrate comprising: a. heating a solution of lithium niobate in lithium chloride to a temperature within the range of about 900° C to about 1100° C to produce a saturated solution of lithium niobate in lithium chloride, with an excess of lithium niobate remaining undissolved in said lithium chloride; b. slowly evaporating a portion of said lithium chloride to induce a super-saturated condition in said solution; c. heating said lithium tantalate substrate to a temperature closely approximating that of said solution; d. bringing said heated lithium tantalate substrate into contact with said solution of lithium niobate in lithium chloride; e. removing said substrate after a predetermined time interval during which said thin epitaxial layer of lithium niobate has been deposited upon said lithium tantalate substrate.
Claim 16
Independent Claim
140 words
The method of growing a thin epitaxial layer of lithium niobate on a lithium tantalate substrate comprising: a. heating a solution of lithium niobate in lithium chloride to a temperature within the range of about 900° C to about 1100° C to produce a saturated solution of lithium niobate in lithium chloride, with an excess of lithium niobate remaining undissolved in said lithium chloride; b. slowly evaporating a portion of said lithium chloride to induce a super-saturated condition in said solution; c. heating said lithium tantalate substrate to a temperature closely approximating that of said solution; d. bringing said heated lithium tantalate substrate into contact with said solution of lithium niobate in lithium chloride; e. removing said substrate after a predetermined time interval during which said thin epitaxial layer of lithium niobate has been deposited upon said lithium tantalate substrate.
Claim 17
Dependent Claim
41 words
The method of claim 14 wherein said solution further includes quantities of lithium tantalate, thereby resulting in a thin epitaxial layer of a solid or mixed crystal solution of lithium niobate and lithium tantalate being deposited upon said lithium tantalate substrate.
Claim 18
Dependent Claim
18 words
The method of claim 14 wherein said solution is maintained at isothermal conditions during said predetermined time interval.
Claim 19
Dependent Claim
20 words
The method of claim 14 wherein during said predetermined time interval said solution is slowly cooled at a uniform rate.
Claim 20
Dependent Claim
46 words
The method of claim 17 wherein said solution further includes a quantity of lithium tantalate thereby resulting in a thin epitaxial layer of a solid or mixed crystal solution of lithium niobate and lithium tantalate having a graded composition being deposited upon said lithium tantalate substrate.
Claim 21
Dependent Claim
22 words
The method of claim 14 further incuding the step of f. maintaining said super-saturated condition by continued volatilization of further solvent material.
Claim 22
Dependent Claim
40 words
The method of claim 14 further including the step of g. dissolving a portion of said excess, undissolved non-linear, optically active material to thereby replenish the supply of said non-linear, optically active material which has been deposited upon said substrate.
Claim 23
Dependent Claim
41 words
The method of claim 20 wherein step (g) is accomplished by maintaining a zone of excess, undissolved non-linear, optically active material in said solution at a temperature slightly higher than the region where said epitaxial growth upon said substrate is occurring.
Claim 24
Dependent Claim
53 words
The method of claim 14 further including the steps of f. maintaining said super-saturated condition by continued volatilization of further solvent material, and g. dissolving a portion of said excess, undissolved non-linear, optically active material to thereby replenish the supply of said non-linear, optically active material which has been deposited upon said substrate.
Claim 25
Dependent Claim
41 words
The method of claim 22 wherein step (g) is accomplished by maintaining a zone of excess, undissolved non-linear, optically active material in said solution at a temperature slightly higher that the region where said epitaxial growth upon said substrate is occurring.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-01-04 | 1980-07-05 | 1981-01-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-01-04 | 1984-07-05 | 1985-01-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-01-04 | 1988-07-05 | 1989-01-04 | $7700.00 | Window Closed / Lapsed |