US5296388A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fabrication method for semiconductor devices
Assignee: Panasonic Holdings Corp
•
Filing: 1991-07-12
•
Granted: 1994-03-22
•
Expires: 2011-07-12
Abstract
Abstract A fabrication method for semiconductor devices connecting a multi-crystal semiconductor thin film and a semiconductor region including a high density of an impurity formed in a single crystal semiconductor substrate. After forming a N-type semiconductor region as the emitter by ion implanting, for instance, as into a P-type semiconductor region as the base, a polysilicon thin film 114 is deposited so as to be implanted with As ions and then heat treated. In this case, an amorphous portion of the N-type semiconductor region and an amorphous silicon thin film in contact therewith are transformed by solid phase epitaxial growth so as to form a single crystal semiconductor region, a single-crystalline silicon thin film, and a polysilicon thin film, thus forming a bipolar element having an emitter.
Inventors
- 👤 Shuichi Kameyama
- 👤 Atsushi Hori
- 👤 Hiroshi Shimomura
- 👤 Mizuki Segawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 08:21
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/38; H10P14/3802; H10D; H10D10/00; H10D10/01; H10D10/051; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0113; H10P30/00; H10P30/20; H10P30/202; H10P30/204; H10P30/21; H10P30/212; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; Y; Y10; Y10S; Y10S148/00; Y10S148/011; Y10S148/124; Y10S438/00; Y10S438/969
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
252 words
A manufacturing method for semi-conductor devices comprising steps of; forming a first semiconductor region of a second conductive type on a single crystal semiconductor layer of a first conductive type; forming a first non-single crystalline semiconductor thin film on the surface of said semiconductor layer, with a first residual insulation film placed therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said first semiconductor region to form a second semiconductor region of the first conductive type and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said second semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film containing an impurity of the first conductive type on said first semiconductor thin film, with a second residual insulation film placed therebetween; causing a solid phase epitaxial growth in said second semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized second semiconductor region; increasing the activation rate of the impurity in said first semiconductor thin film and said second non-single crystalline semiconductor thin film and said semiconductor regions, through a second heat treatment of a higher temperature and a shorter time than in the first heat treatment; and forming a metallic electrode on said second semiconductor thin film subjected to said second heat treatment.
Claim 2
Dependent Claim
252 words
A manufacturing method for semi-conductor devices comprising steps of; forming a first semiconductor region of a second conductive type on a single crystal semiconductor layer of a first conductive type; forming a first non-single crystalline semiconductor thin film on the surface of said semiconductor layer, with a first residual insulation film placed therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said first semiconductor region to form a second semiconductor region of the first conductive type and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said second semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film containing an impurity of the first conductive type on said first semiconductor thin film, with a second residual insulation film placed therebetween; causing a solid phase epitaxial growth in said second semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized second semiconductor region; increasing the activation rate of the impurity in said first semiconductor thin film and said second non-single crystalline semiconductor thin film and said semiconductor regions, through a second heat treatment of a higher temperature and a shorter time than in the first heat treatment; and forming a metallic electrode on said second semiconductor thin film subjected to said second heat treatment.
Claim 3
Dependent Claim
289 words
A manufacturing method for semiconductor devices comprising steps of: forming a first semiconductor region of a second conductive type on a single crystal semiconductor layer of a first conductive type; forming a non-single-crystalline first semiconductor thin film on said semiconductor layer, with a first residual insulation film placed therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said first semiconductor region to form a second semiconductor region of the first conductive type and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said second semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film containing an impurity of the first conductive type on said first semiconductor thin film, with a second residual insulation film placed therebetween; causing a solid phase epitaxial growth at said amorphous regions in said second semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized second semiconductor region; increasing the activation rate of the impurity in said single-crystallized first semiconductor thin film, and said semiconductor regions said second non-single crystalline semiconductor thin film through a second heat treatment of a higher temperature than in the first heat treatment and a shorter time and, at the same time, forming a non-single-crystalline semiconductor region in succession with said second non-single-crystalline semiconductor thin film in said single-crystallized first semiconductor thin film by destroying said second residual insulation film; and forming a metallic electrode on said second semiconductor thin film subjected to said second heat treatment of a shorter time.
Claim 4
Dependent Claim
289 words
A manufacturing method for semiconductor devices comprising steps of: forming a first semiconductor region of a second conductive type on a single crystal semiconductor layer of a first conductive type; forming a non-single-crystalline first semiconductor thin film on said semiconductor layer, with a first residual insulation film placed therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said first semiconductor region to form a second semiconductor region of the first conductive type and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said second semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film containing an impurity of the first conductive type on said first semiconductor thin film, with a second residual insulation film placed therebetween; causing a solid phase epitaxial growth at said amorphous regions in said second semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized second semiconductor region; increasing the activation rate of the impurity in said single-crystallized first semiconductor thin film, and said semiconductor regions said second non-single crystalline semiconductor thin film through a second heat treatment of a higher temperature than in the first heat treatment and a shorter time and, at the same time, forming a non-single-crystalline semiconductor region in succession with said second non-single-crystalline semiconductor thin film in said single-crystallized first semiconductor thin film by destroying said second residual insulation film; and forming a metallic electrode on said second semiconductor thin film subjected to said second heat treatment of a shorter time.
Claim 5
Dependent Claim
39 words
The manufacturing method for semiconductor devices in accordance with claim 2, wherein the first heat treatment is effected at less than 900° C., while the second heat treatment is effected at a temperature between 900° C. and 1100° C.
Claim 6
Dependent Claim
40 words
The fabrication method for semiconductor devices in accordance with claim 1, where, in order to form amorphous regions without creating semiconductivity therein, additional atomic ions of a neutral conductive type are implanted into a desired region of said semiconductor layer.
Claim 7
Dependent Claim
270 words
A fabrication method for semiconductor devices comprising steps of: forming a first semiconductor region of a second conductive type on a single crystal semiconductor layer of a first conductive type; forming a second semiconductor region of the first conductive type in said first semiconductor region from the surface of said semiconductor layer; forming a first non-single crystalline semiconductor thin film on the semiconductor layer whereon said second semiconductor region is formed, with a first residual insulation film placed therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said second semiconductor region to form a third semiconductor region of the first conductive type, and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said third semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film on said first semiconductor thin film, with a second residual insulation film placed therebetween; causing a solid phase epitaxial growth in said third semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized third semiconductor region; increasing the activation rate of the impurity in said single-crystallized first semiconductor thin film, said second non-single crystalline semiconductor thin film through a second heat treatment of a higher temperature and a shorter time than in said first heat treatment; and forming a metallic electrode on the second semiconductor thin film subjected to said second heat treatment of a shorter time.
Claim 8
Dependent Claim
270 words
A fabrication method for semiconductor devices comprising steps of: forming a first semiconductor region of a second conductive type on a single crystal semiconductor layer of a first conductive type; forming a second semiconductor region of the first conductive type in said first semiconductor region from the surface of said semiconductor layer; forming a first non-single crystalline semiconductor thin film on the semiconductor layer whereon said second semiconductor region is formed, with a first residual insulation film placed therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said second semiconductor region to form a third semiconductor region of the first conductive type, and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said third semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film on said first semiconductor thin film, with a second residual insulation film placed therebetween; causing a solid phase epitaxial growth in said third semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized third semiconductor region; increasing the activation rate of the impurity in said single-crystallized first semiconductor thin film, said second non-single crystalline semiconductor thin film through a second heat treatment of a higher temperature and a shorter time than in said first heat treatment; and forming a metallic electrode on the second semiconductor thin film subjected to said second heat treatment of a shorter time.
Claim 9
Dependent Claim
39 words
The manufacturing method for semiconductor devices in accordance with claim 5, wherein the first heat treatment is effected at less than 900° C., while the second heat treatment is effected at a temperature between 900° C. and 1100° C.
Claim 10
Dependent Claim
325 words
A fabrication method for semiconductor devices comprising steps of: forming a first semiconductor region of a second conductive type on a single crystal semiconductor layer of a first conductive type; forming a second semiconductor region of the first conductive type on said first semiconductor region from the surface of said semiconductor layer; forming a first non-single crystalline semiconductor thin film on the surface of the semiconductor layer whereon said second semiconductor region is formed, with a first residual insulation film placed therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said second semiconductor region to form a third semiconductor region of the first conductive type and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said third semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film containing an impurity of the first conductive type on said first semiconductor thin film, with a second residual insulation film placed therebetween; causing a solid phase epitaxial growth at said amorphous regions in said third semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized third semiconductor region; increasing the activation rate of impurities of the second conductive type in said single-crystallized first semiconductor thin film, said second semiconductor thin film of non-single-crystal type and said semiconductor regions, through a second heat treatment of a higher temperature than in said first heat treatment and a shorter time, and, at the same time, destroying said second residual insulation film so as to form a non-single-crystalline semiconductor region in succession with said second polycrystalline semiconductor thin film into said single-crystallized first semiconductor thin film; and forming a metallic electrode on said second semiconductor thin film subjected to said second heat treatment.
Claim 11
Dependent Claim
325 words
A fabrication method for semiconductor devices comprising steps of: forming a first semiconductor region of a second conductive type on a single crystal semiconductor layer of a first conductive type; forming a second semiconductor region of the first conductive type on said first semiconductor region from the surface of said semiconductor layer; forming a first non-single crystalline semiconductor thin film on the surface of the semiconductor layer whereon said second semiconductor region is formed, with a first residual insulation film placed therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said second semiconductor region to form a third semiconductor region of the first conductive type and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said third semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film containing an impurity of the first conductive type on said first semiconductor thin film, with a second residual insulation film placed therebetween; causing a solid phase epitaxial growth at said amorphous regions in said third semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized third semiconductor region; increasing the activation rate of impurities of the second conductive type in said single-crystallized first semiconductor thin film, said second semiconductor thin film of non-single-crystal type and said semiconductor regions, through a second heat treatment of a higher temperature than in said first heat treatment and a shorter time, and, at the same time, destroying said second residual insulation film so as to form a non-single-crystalline semiconductor region in succession with said second polycrystalline semiconductor thin film into said single-crystallized first semiconductor thin film; and forming a metallic electrode on said second semiconductor thin film subjected to said second heat treatment.
Claim 12
Dependent Claim
39 words
The fabrication method for semiconductor devices in accordance with claim 7, wherein the first heat treatment is effected at less than 900° C., while the second heat treatment is effected at a temperature between 900° C. and 1100° C.
Claim 13
Dependent Claim
305 words
A fabrication method for semiconductor devices comprising steps of: forming a first semiconductor region of a second conductive type in a single crystalline semiconductor layer; forming a second semiconductor region of a first conductive type in said first semiconductor region from the surface of said semiconductor layer; forming a non-single crystalline semiconductor thin film on the surface of said semiconductor layer where said second semiconductor region has been formed, with a first residual insulation film put therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said second semiconductor region to form a third semiconductor region of the first conductive type and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said third semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film containing an impurity of the first conductive type on said first semiconductor thin film with a second residual insulation film put therebetween; causing a solid phase epitaxial growth at said amorphous regions in said third semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized third semiconductor region; increasing the activation rate of the impurity in said single-crystallized first semiconductor through a second heat treatment of a higher temperature and a shorter time than in the first heat treatment and, at the same time, forming a non-single-crystalline semiconductor region in said single-crystallized first semiconductor thin film in succession with said second non-single crystalline semiconductor thin film by destroying said second residual insulation film; and forming a metallic electrode on said second semiconductor thin film subjected to said second heat treatment of a shorter time.
Claim 14
Dependent Claim
305 words
A fabrication method for semiconductor devices comprising steps of: forming a first semiconductor region of a second conductive type in a single crystalline semiconductor layer; forming a second semiconductor region of a first conductive type in said first semiconductor region from the surface of said semiconductor layer; forming a non-single crystalline semiconductor thin film on the surface of said semiconductor layer where said second semiconductor region has been formed, with a first residual insulation film put therebetween; implanting ions of an impurity of the first conductive type, through said first semiconductor thin film, into said second semiconductor region to form a third semiconductor region of the first conductive type and, by this ion implanting, destroying said first residual insulation film and, at the same time, forming amorphous regions in said third semiconductor region and said first semiconductor thin film; forming a second non-single crystalline semiconductor thin film containing an impurity of the first conductive type on said first semiconductor thin film with a second residual insulation film put therebetween; causing a solid phase epitaxial growth at said amorphous regions in said third semiconductor region and said first semiconductor thin film by a first heat treatment, while aligning to said single crystal semiconductor layer to transform said amorphous regions into single-crystallized first semiconductor thin film and single-crystallized third semiconductor region; increasing the activation rate of the impurity in said single-crystallized first semiconductor through a second heat treatment of a higher temperature and a shorter time than in the first heat treatment and, at the same time, forming a non-single-crystalline semiconductor region in said single-crystallized first semiconductor thin film in succession with said second non-single crystalline semiconductor thin film by destroying said second residual insulation film; and forming a metallic electrode on said second semiconductor thin film subjected to said second heat treatment of a shorter time.
Claim 15
Dependent Claim
38 words
The fabrication method for semiconductor devices in accordance with claim 9 wherein the first heat treatment is at less than 900° C., while the second heat treatment is effected at a temperature between 900° C. and 1100° C.
Claim 16
Dependent Claim
37 words
The fabrication method for semiconductor devices in accordance with claim 1, wherein said non-single-crystalline second thin film has a double layered structure of non-single-crystalline semiconductor thin film and a conductive thin film having a high melting point.
References Cited (Backward Citations)
US4063967A
Cited
US4500388A
Cited
EP0090940A2
Cited
US4629520A
Cited
US4663825A
Cited
US4800177A
Cited
JPS63204648A
Cited
JPS6476763A
Cited
JPH01181561A
Cited
JPH026032A
Cited
EP0350610A2
Cited
US5116770A
Cited
US4977098A
Cited
EP0365107A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-21 | 1997-09-20 | 1998-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-21 | 2001-09-20 | 2002-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-21 | 2005-09-20 | 2006-03-22 | $7700.00 | Window Closed / Lapsed |