US5274485A — Liquid crystal display

Claim 1

Independent Claim 158 words

A liquid crystal display comprising: a first insulating substrate; a plurality of signal lines formed on said first substrate; a plurality of MIM elements connected to said signal lines; pixel electrodes connected to said MIM elements a second insulating substrate; a plurality of opposing electrodes formed on said second substrate and facing said pixel electrodes; and a liquid crystal layer sandwiched between said first and second substrate; wherein said MIM elements each include a first metal layer including a portion of said signal line, a first insulating layer formed on said first metal layer and including an oxide of tantalum nitride (TaO x N y ) with a first ratio of nitrization, a second insulating layer formed on said first insulating layer and including an oxide of tantalum nitride (TaO x N y ) with a second ratio of nitrization which is lower than said first ratio, and a second metal layer formed on said second insulating layer.

Claim 2

Dependent Claim 158 words

A liquid crystal display comprising: a first insulating substrate; a plurality of signal lines formed on said first substrate; a plurality of MIM elements connected to said signal lines; pixel electrodes connected to said MIM elements a second insulating substrate; a plurality of opposing electrodes formed on said second substrate and facing said pixel electrodes; and a liquid crystal layer sandwiched between said first and second substrate; wherein said MIM elements each include a first metal layer including a portion of said signal line, a first insulating layer formed on said first metal layer and including an oxide of tantalum nitride (TaO x N y ) with a first ratio of nitrization, a second insulating layer formed on said first insulating layer and including an oxide of tantalum nitride (TaO x N y ) with a second ratio of nitrization which is lower than said first ratio, and a second metal layer formed on said second insulating layer.

Claim 3

Dependent Claim 22 words

The liquid crystal display according to claim 1, wherein said first metal layer is formed of tantalum nitride of TaN y .

Claim 4

Dependent Claim 22 words

The liquid crystal display according to claim 2, wherein said first metal layer has a ratio of nitrization of y=0.7 to 3.0.

Claim 5

Dependent Claim 29 words

The liquid crystal display according to claim 3, wherein said first metal layer has a thickness of 100 to 500 nm and the width of 2 to 50 μm.

Claim 6

Dependent Claim 54 words

The liquid crystal display according to claim 1, wherein said first insulating layer has said first ratio of nitrization of y=0.7 to 3.0 and a thickness of 5 to 25 nm, and said second insulating layer has said second ratio of nitrization of y=0.1 to 0.4 and a thickness of 25 to 5 nm.

Claim 7

Dependent Claim 34 words

The liquid crystal display according to claim 1, wherein said signal lines are formed of tantalum nitride, and having the thickness of 100 to 500 nm and the width of 3 to 50 μm.

Claim 8

Dependent Claim 28 words

The liquid crystal display according to claim 1, wherein said second metal layer is formed of a metal selected from the group consisting of chromium, copper and aluminum.

Claim 9

Dependent Claim 29 words

The liquid crystal display according to claim 7, wherein said second metal layer has a thickness of 10 to 200 nm and a width of 3 to 10 μm.

Claim 10

Dependent Claim 18 words

The liquid crystal display according to claim 1, wherein said first and second substrates are formed of glass.

Claim 11

Dependent Claim 19 words

The liquid crystal display according to claim 1, wherein said liquid crystal layer is of a twist nematic type.

Claim 12

Dependent Claim 27 words

The liquid crystal display according to claim 1, wherein said liquid crystal layer is held in an insulative three-dimensional network sandwiched between said first and second substrate.

Claim 13

Dependent Claim 38 words

The liquid crystal display according to claim 1, wherein said first insulating layer has said first ratio of nitrization of y=0.7 to 3.0 and said second insulating layer has said second ratio of nitrization of y=0.1 to 0.4.

Claim 14

Dependent Claim 34 words

The liquid crystal display according to claim 1, wherein said first insulating layer has said first ratio of nitrization of y and said second insulating layer has said second ratio of nitrization of y.

Claim 15

Dependent Claim 82 words

A MIM element used in a liquid crystal display, comprising: an insulating substrate; a first metal layer formed on said substrate; a first insulating layer including an oxide of tantalum nitride with a first ratio of nitrization formed on said first metal layer; a second insulating layer formed on the first insulating layer and including an oxide of tantalum nitride with a second ratio of nitrization lower than said first ratio, and a second metal layer formed on the second insulating layer.

Claim 16

Dependent Claim 82 words

A MIM element used in a liquid crystal display, comprising: an insulating substrate; a first metal layer formed on said substrate; a first insulating layer including an oxide of tantalum nitride with a first ratio of nitrization formed on said first metal layer; a second insulating layer formed on the first insulating layer and including an oxide of tantalum nitride with a second ratio of nitrization lower than said first ratio, and a second metal layer formed on the second insulating layer.

Claim 17

Dependent Claim 17 words

The MIM element according to claim 14, wherein said first metal layer is formed of tantalum nitride.

Claim 18

Dependent Claim 66 words

An MIM element used in a liquid crystal display, comprising: a first metal layer of tantalum nitride formed on an insulating substrate; a second tantalum nitride layer on and lying over said first tantalum nitride layer; an insulating film formed by oxidizing a surface of said first tantalum nitride layer and the second tantalum nitride layer; and a second metal layer formed on said insulating film.

Claim 19

Dependent Claim 66 words

An MIM element used in a liquid crystal display, comprising: a first metal layer of tantalum nitride formed on an insulating substrate; a second tantalum nitride layer on and lying over said first tantalum nitride layer; an insulating film formed by oxidizing a surface of said first tantalum nitride layer and the second tantalum nitride layer; and a second metal layer formed on said insulating film.

Claim 20

Dependent Claim 15 words

The MIM element according to claim 16, wherein said oxidation is carried out by anodization.

Claim 21

Dependent Claim 19 words

The MIM element according to claim 16, wherein said first and second tantalum nitride layers are formed by sputtering.

Claim 22

Dependent Claim 44 words

The MIM element according to claim 16 wherein the nitrization ratio of the portion of the insulating film formed by oxidizing the surface of said first tantalum nitride layer is greater than that of the portion formed by oxidizing said second tantalum nitride layer.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1996-12-27	1997-06-28	1997-12-28	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2000-12-27	2001-06-28	2001-12-28	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2004-12-27	2005-06-28	2005-12-28	$7700.00	Window Closed / Lapsed

Liquid crystal display

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