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EP0440144A2
Expired / Lapsed
EP
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Substrate for liquid crystal display device
Assignee: Tokyo Sanyo Electric Co Ltd
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Filing: 1991-01-28
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Granted: —
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Expires: 2011-01-28
Abstract
Abstract A substrate for a liquid crystal display device includes an insulating substrate (1), a first conductor layer (2) of tantalum nitride formed on a region of the insulating substrate (1), an insulator layer (3) formed to cover at least a portion (2b; 2b₁, 2b₂) of the first conductor layer (2), a second conductor layer (4) formed to cover at least a portion (3b; 3b₁, 3b₂) of the insulator layer (3), and a pixel electrode (5) formed on another region of the insulating substrate (11) and connected to the second conductor layer (4).
Inventors
- 👤 Toshihiko Tanaka
- 👤 Naoto Fukuta
- 👤 Shouji Nakanishi
- 👤 Hiroshi Inamura
- 👤 Takao Yamauchi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 22:45
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/1365; H; H10; H10N; H10N70/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
92 words
A substrate for a liquid crystal display device, comprising: an insulating substrate (1), a first conductor layer (2) of tantalum nitride formed on a region of said insulating substrate (1), an insulator layer (3) formed to cover at least a portion (2b; 2b₁, 2b₂) of said first conductor layer (2), a second conductor layer (4) formed to cover at least a portion (3b; 3b₁, 3b₂) of said insulator layer (3), and a pixel electrode (5) formed on another region of said insulating substrate (1) and connected to said second conductor layer (4).
Claim 2
Dependent Claim
43 words
The substrate of claim 1, wherein said first conductor layer (2) includes a portion (2a) serving as a signal line, a portion (2b; 2b₁, 2b₂) serving as a first metal layer of an MIM element, and a portion (2c) serving as a terminal.
Claim 3
Dependent Claim
34 words
The substrate of claim 2, wherein said insulator layer (3) includes a portion (3b; 3b₁, 3b₂) serving as an insulator layer in said MIM element, and a portion (3a) covering said signal line (2a).
Claim 4
Dependent Claim
18 words
The substrate of claim 1, wherein said insulator layer (3) is formed of an anodized tantalum nitride film.
Claim 5
Dependent Claim
99 words
A substrate for a liquid crystal display device, comprising: an insulating substrate (1), a first conductor layer (2) of tantalum nitride formed on a region of said insulating substrate (1) and having a nitriding ratio in the range of 0.05 to 0.14, an insulator layer (3) formed to cover at least a portion (2b) of said first conductor layer (2), a second conductor layer (4) formed to cover at least a portion (3b) of said insulator layer, and a pixel electrode (5) formed on another region of said insulating substrate (1) and connected to said second conductor layer (4).
Claim 6
Dependent Claim
20 words
The substrate of claim 5, wherein said insulator layer (3) has a thickness in the range of 480 to 800Å.
Claim 7
Dependent Claim
109 words
A substrate for a liquid crystal display device, comprising: an insulating substrate (1), a first conductor layer (2) including a lower first sub layer (2b₁) and an upper second sub layer (2b₂) of tantalum nitride formed on a region of said insulating substrate (1) and having different nitriding ratios, an insulator layer (3) formed to cover at least a portion (2b₁, 2b₂) of said first conductor layer (2), a second conductor layer (4) formed to cover at least a portion (3b₁, 3b₂) of said insulator layer (3), and a pixel electrode (5) formed on another region of said insulating substrate (1) and connected to said second conductor layer (4).
Claim 8
Dependent Claim
73 words
The substrate of claim 7, wherein said insulator layer (3) includes a portion (3b₁, 3b₂) serving as an insulator layer in an MIM element, and in said MIM element, a ratio of an area of an interface between said insulator layer (3b₁) and said first sub layer (2b₁) to an area of an interface between said insulator layer (3b₂) and said second sub layer (2b₂) is in the range of 1/5 to 1/30.
Claim 9
Dependent Claim
39 words
The substrate of claim 7, wherein said first sub layer (2b₁) has the nitriding ratio in the range of 0.05 to 0.2, and said second sub layer (2b₂) has the nitriding ratio in the range of 0.6 to 1.0.
Claim 10
Dependent Claim
20 words
The substrate of claim 9, wherein said insulator layer (3) has a thickness in the range of 500 to 700Å.
References Cited (Backward Citations)
No citation records indexed.
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